MOSIS WAFER ACCEPTANCE TESTS RUN: T76F (MM_NON-EPI) VENDOR: TSMC TECHNOLOGY: SCN035 FEATURE SIZE: 0.35 microns Run type: SKD INTRODUCTION: This report contains the lot average results obtained by MOSIS from measurements of MOSIS test structures on each wafer of this fabrication lot. SPICE parameters obtained from similar measurements on a selected wafer are also attached. COMMENTS: TSMC 035 TRANSISTOR PARAMETERS W/L N-CHANNEL P-CHANNEL UNITS MINIMUM 0.6/0.4 Vth 0.55 -0.75 volts SHORT 20.0/0.4 Idss 521 -218 uA/um Vth 0.59 -0.74 volts Vpt 9.2 -9.8 volts WIDE 20.0/0.4 Ids0 < 2.5 < 2.5 pA/um LARGE 50/50 Vth 0.53 -0.73 volts Vjbkd 8.7 -8.5 volts Ijlk <50.0 <50.0 pA Gamma 0.60 0.36 V^0.5 K' (Uo*Cox/2) 94.0 -32.5 uA/V^2 Low-field Mobility 424.67 146.83 cm^2/V*s COMMENTS: Poly bias varies with design technology. To account for mask bias use the appropriate value for the parameter XL in your SPICE model card. Design Technology XL (um) XW (um) ----------------- ------- ------ SCMOS_SUBM (lambda=0.20) -0.05 0.15 thick oxide -0.10 0.15 SCMOS (lambda=0.25) -0.15 0.15 thick oxide -0.25 0.15 FOX TRANSISTORS GATE N+ACTIVE P+ACTIVE UNITS Vth Poly >10.0 <-10.0 volts PROCESS PARAMETERS N+ P+ POLY POLY2 POLY2_ME M1 M2 UNITS Sheet Resistance 78.4 149.7 8.4 47.1 47.2 0.07 0.07 ohms/sq Contact Resistance 64.7 122.7 6.5 36.1 1.21 ohms Gate Oxide Thickness 78 angstrom PROCESS PARAMETERS M3 M4 N_W N\PLY UNITS Sheet Resistance 0.07 0.04 973 1017 ohms/sq Contact Resistance 1.13 1.13 ohms COMMENTS: N\POLY is N-well under polysilicon. CAPACITANCE PARAMETERS N+ P+ POLY POLY2 M1 M2 M3 M4 N_W UNITS Area (substrate) 941 1408 109 24 10 6 4 104 aF/um^2 Area (N+active) 4446 34 16 11 9 aF/um^2 Area (P+active) 4501 aF/um^2 Area (poly) 858 46 15 9 6 aF/um^2 Area (poly2) 45 aF/um^2 Area (metal1) 34 14 8 aF/um^2 Area (metal2) 35 13 aF/um^2 Area (metal3) 34 aF/um^2 Fringe (substrate) 266 314 35 17 aF/um Fringe (poly) 64 40 30 23 aF/um Fringe (metal1) 58 34 28 aF/um Fringe (metal2) 43 38 aF/um Fringe (metal3) 59 aF/um CIRCUIT PARAMETERS UNITS Inverters K Vinv 1.0 1.20 volts Vinv 1.5 1.33 volts Vol (100 uA) 2.0 0.21 volts Voh (100 uA) 2.0 2.88 volts Vinv 2.0 1.43 volts Gain 2.0 -17.99 Ring Oscillator Freq. DIV256 (31-stg,3.3V) 177.69 MHz D256_THK (31-stg,5.0V) 127.02 MHz Ring Oscillator Power DIV256 (31-stg,3.3V) 0.15 uW/MHz/gate D256_THK (31-stg,5.0V) 0.30 uW/MHz/gate COMMENTS: SUBMICRON T76F SPICE BSIM3 VERSION 3.1 PARAMETERS SPICE 3f5 Level 8, Star-HSPICE Level 49, UTMOST Level 8 * DATE: Aug 31/07 * LOT: t76f WAF: 7001 * Temperature_parameters=Default .MODEL CMOSN NMOS ( LEVEL = 49 +VERSION = 3.1 TNOM = 27 TOX = 7.8E-9 +XJ = 1E-7 NCH = 2.2E17 VTH0 = 0.4678248 +K1 = 0.6099244 K2 = 1.474468E-3 K3 = 98.1260851 +K3B = -10 W0 = 3.123429E-5 NLX = 2.687147E-7 +DVT0W = 0 DVT1W = 0 DVT2W = 0 +DVT0 = 2.5871248 DVT1 = 0.9773575 DVT2 = -0.3 +U0 = 362.2283066 UA = -7.42433E-10 UB = 2.207472E-18 +UC = 3.217529E-11 VSAT = 1.748108E5 A0 = 1.2497382 +AGS = 0.1747268 B0 = 5.126697E-7 B1 = 5E-6 +KETA = 2.658661E-3 A1 = 0 A2 = 0.4399222 +RDSW = 918.2811632 PRWG = -0.0321326 PRWB = -0.2 +WR = 1 WINT = 1.440695E-7 LINT = 0 +XL = -5E-8 XW = 1.5E-7 DWG = -3.074499E-9 +DWB = 4.785692E-9 VOFF = -0.0930532 NFACTOR = 1.3299137 +CIT = 0 CDSC = 2.4E-4 CDSCD = 0 +CDSCB = 0 ETA0 = 0.6777129 ETAB = -5.096498E-3 +DSUB = 0.6988262 PCLM = 1.5016946 PDIBLC1 = 1.584845E-4 +PDIBLC2 = 5.010863E-3 PDIBLCB = 0.0641626 DROUT = 4.025038E-4 +PSCBE1 = 7.152625E8 PSCBE2 = 9.525592E-4 PVAG = 0 +DELTA = 0.01 RSH = 78.4 MOBMOD = 1 +PRT = 0 UTE = -1.5 KT1 = -0.11 +KT1L = 0 KT2 = 0.022 UA1 = 4.31E-9 +UB1 = -7.61E-18 UC1 = -5.6E-11 AT = 3.3E4 +WL = 0 WLN = 1 WW = 0 +WWN = 1 WWL = 0 LL = 0 +LLN = 1 LW = 0 LWN = 1 +LWL = 0 CAPMOD = 2 XPART = 0.5 +CGDO = 3.18E-10 CGSO = 3.18E-10 CGBO = 1E-12 +CJ = 9.357009E-4 PB = 0.8 MJ = 0.3552073 +CJSW = 2.761917E-10 PBSW = 0.8 MJSW = 0.207207 +CJSWG = 1.82E-10 PBSWG = 0.8 MJSWG = 0.207207 +CF = 0 PVTH0 = -0.0313137 PRDSW = -91.998139 +PK2 = 1.50482E-3 WKETA = -8.189746E-4 LKETA = 1.324216E-3 ) * .MODEL CMOSP PMOS ( LEVEL = 49 +VERSION = 3.1 TNOM = 27 TOX = 7.8E-9 +XJ = 1E-7 NCH = 8.52E16 VTH0 = -0.6934891 +K1 = 0.4317217 K2 = -0.0122875 K3 = 86.945511 +K3B = -5 W0 = 6.76316E-6 NLX = 2.840257E-7 +DVT0W = 0 DVT1W = 0 DVT2W = 0 +DVT0 = 0.966108 DVT1 = 0.4672279 DVT2 = -0.0390688 +U0 = 153.8182157 UA = 1.016768E-10 UB = 2.008433E-18 +UC = -1.55575E-11 VSAT = 1.218826E5 A0 = 1.0689889 +AGS = 0.3600257 B0 = 2.298441E-6 B1 = 5E-6 +KETA = -5.680062E-3 A1 = 8.145484E-4 A2 = 0.7373129 +RDSW = 4E3 PRWG = -0.1369661 PRWB = -0.1374933 +WR = 1 WINT = 1.473811E-7 LINT = 0 +XL = -5E-8 XW = 1.5E-7 DWG = -1.728646E-8 +DWB = 1.095669E-8 VOFF = -0.1332038 NFACTOR = 2 +CIT = 0 CDSC = 2.4E-4 CDSCD = 0 +CDSCB = 0 ETA0 = 0.0294002 ETAB = 1.711034E-4 +DSUB = 0.3232772 PCLM = 5.1830543 PDIBLC1 = 1.016291E-3 +PDIBLC2 = -7.285682E-6 PDIBLCB = 0.0562184 DROUT = 9.965274E-4 +PSCBE1 = 8E10 PSCBE2 = 5.0479E-10 PVAG = 9.7162793 +DELTA = 0.01 RSH = 149.7 MOBMOD = 1 +PRT = 0 UTE = -1.5 KT1 = -0.11 +KT1L = 0 KT2 = 0.022 UA1 = 4.31E-9 +UB1 = -7.61E-18 UC1 = -5.6E-11 AT = 3.3E4 +WL = 0 WLN = 1 WW = 0 +WWN = 1 WWL = 0 LL = 0 +LLN = 1 LW = 0 LWN = 1 +LWL = 0 CAPMOD = 2 XPART = 0.5 +CGDO = 3.61E-10 CGSO = 3.61E-10 CGBO = 1E-12 +CJ = 1.415185E-3 PB = 0.99 MJ = 0.5614814 +CJSW = 3.008867E-10 PBSW = 0.99 MJSW = 0.3789882 +CJSWG = 4.42E-11 PBSWG = 0.99 MJSWG = 0.3789882 +CF = 0 PVTH0 = 7.161876E-3 PRDSW = 500 +PK2 = 2.101577E-3 WKETA = 3.311683E-3 LKETA = 0.0141376 ) * Download Text File