MOSIS WAFER ACCEPTANCE TESTS
RUN: V05Q (C5N_NON-EPI) VENDOR: AMIS (ON-SEMI)
TECHNOLOGY: SCN05 FEATURE SIZE: 0.5 microns
Run type: DED
INTRODUCTION: This report contains the lot average results obtained by MOSIS
from measurements of MOSIS test structures on each wafer of
this fabrication lot. SPICE parameters obtained from similar
measurements on a selected wafer are also attached.
COMMENTS: SMSCN3ME06_ON-
TRANSISTOR PARAMETERS W/L N-CHANNEL P-CHANNEL UNITS
MINIMUM 3.0/0.6
Vth 0.83 -0.88 volts
SHORT 20.0/0.6
Idss 446 -256 uA/um
Vth 0.70 -0.86 volts
Vpt 12.5 -12.5 volts
WIDE 20.0/0.6
Ids0 < 2.5 < 2.5 pA/um
LARGE 50/50
Vth 0.72 -0.91 volts
Vjbkd 11.2 -12.0 volts
Ijlk <50.0 <50.0 pA
Gamma 0.47 0.56 V^0.5
K' (Uo*Cox/2) 57.6 -19.0 uA/V^2
Low-field Mobility 467.06 154.07 cm^2/V*s
COMMENTS: Poly bias varies with design technology. To account for mask
bias use the appropriate value for the parameter XL in your
SPICE model card.
Design Technology XL (um) XW (um)
----------------- ------- ------
SCMOS_SUBM (lambda=0.30) 0.10 0.00
SCMOS (lambda=0.35) 0.00 0.20
FOX TRANSISTORS GATE N+ACTIVE P+ACTIVE UNITS
Vth Poly >15.0 <-15.0 volts
PROCESS PARAMETERS N+ P+ POLY PLY2_HR POLY2 M1 M2 UNITS
Sheet Resistance 82.2 105.3 23.1 1055 40.4 0.09 0.09 ohms/sq
Contact Resistance 56.9 149.1 16.2 25.9 0.90 ohms
Gate Oxide Thickness 140 angstrom
PROCESS PARAMETERS M3 N\PLY N_W UNITS
Sheet Resistance 0.05 849 828 ohms/sq
Contact Resistance 1.78 ohms
COMMENTS: N\POLY is N-well under polysilicon.
CAPACITANCE PARAMETERS N+ P+ POLY POLY2 M1 M2 M3 N_W UNITS
Area (substrate) 417 706 84 26 10 5 91 aF/um^2
Area (N+active) 2464 37 17 12 aF/um^2
Area (P+active) 2390 aF/um^2
Area (poly) 896 67 16 9 aF/um^2
Area (poly2) 56 aF/um^2
Area (metal1) 33 13 aF/um^2
Area (metal2) 30 aF/um^2
Fringe (substrate) 326 191 32 aF/um
Fringe (poly) 32 40 28 aF/um
Fringe (metal1) 51 33 aF/um
Fringe (metal2) 53 aF/um
Overlap (N+active) 326 aF/um
Overlap (P+active) 393 aF/um
CIRCUIT PARAMETERS UNITS
Inverters K
Vinv 1.0 2.10 volts
Vinv 1.5 2.36 volts
Vol 2.0 0.52 volts
Voh 2.0 4.46 volts
Vinv 2.0 2.55 volts
Gain 2.0 -18.80
Ring Oscillator Freq.
DIV256 (31-stg,5.0V) 91.37 MHz
D256_WIDE (31-stg,5.0V) 148.98 MHz
Ring Oscillator Power
DIV256 (31-stg,5.0V) 0.47 uW/MHz/gate
D256_WIDE (31-stg,5.0V) 1.00 uW/MHz/gate
COMMENTS: SUBMICRON
V05Q SPICE BSIM3 VERSION 3.1 PARAMETERS
SPICE 3f5 Level 8, Star-HSPICE Level 49, UTMOST Level 8
* DATE: Aug 5/11
* LOT: V05Q WAF: 6103
* Temperature_parameters=Default
.MODEL CMOSN NMOS ( LEVEL = 49
+VERSION = 3.1 TNOM = 27 TOX = 1.4E-8
+XJ = 1.5E-7 NCH = 1.7E17 VTH0 = 0.6824713
+K1 = 0.8682847 K2 = -0.0919074 K3 = 24.9392095
+K3B = -10.3036067 W0 = 1.026056E-8 NLX = 1E-9
+DVT0W = 0 DVT1W = 0 DVT2W = 0
+DVT0 = 0.765967 DVT1 = 0.3351903 DVT2 = -0.4999689
+U0 = 450.2796059 UA = 1.275586E-13 UB = 1.587195E-18
+UC = 3.700359E-13 VSAT = 1.778175E5 A0 = 0.6055963
+AGS = 0.109344 B0 = 2.065544E-6 B1 = 5E-6
+KETA = -5.692218E-3 A1 = 9.026118E-5 A2 = 0.3274577
+RDSW = 1.384984E3 PRWG = 0.0488629 PRWB = -2.002037E-3
+WR = 1 WINT = 3.165966E-7 LINT = 7.981085E-8
+XL = 1E-7 XW = 0 DWG = -1.511084E-8
+DWB = 2.198359E-8 VOFF = 0 NFACTOR = 1.1747206
+CIT = 0 CDSC = 2.4E-4 CDSCD = 0
+CDSCB = 0 ETA0 = 2.493091E-3 ETAB = -1.598393E-4
+DSUB = 0.0474073 PCLM = 2.2635433 PDIBLC1 = 5.438765E-4
+PDIBLC2 = 1.347371E-3 PDIBLCB = 0.0815474 DROUT = 1.454013E-3
+PSCBE1 = 3.884322E10 PSCBE2 = 7.825593E-9 PVAG = 7.871461E-3
+DELTA = 0.01 RSH = 82.2 MOBMOD = 1
+PRT = 0 UTE = -1.5 KT1 = -0.11
+KT1L = 0 KT2 = 0.022 UA1 = 4.31E-9
+UB1 = -7.61E-18 UC1 = -5.6E-11 AT = 3.3E4
+WL = 0 WLN = 1 WW = 0
+WWN = 1 WWL = 0 LL = 0
+LLN = 1 LW = 0 LWN = 1
+LWL = 0 CAPMOD = 2 XPART = 0.5
+CGDO = 3.26E-10 CGSO = 3.26E-10 CGBO = 1E-9
+CJ = 4.187216E-4 PB = 0.8920542 MJ = 0.4421229
+CJSW = 2.950756E-10 PBSW = 0.8 MJSW = 0.1961345
+CJSWG = 1.64E-10 PBSWG = 0.8 MJSWG = 0.1961345
+CF = 0 PVTH0 = -0.074345 PRDSW = 415.9609222
+PK2 = -0.0704902 WKETA = -5.537192E-3 LKETA = 1.212675E-3 )
*
.MODEL CMOSP PMOS ( LEVEL = 49
+VERSION = 3.1 TNOM = 27 TOX = 1.4E-8
+XJ = 1.5E-7 NCH = 1.7E17 VTH0 = -0.9152268
+K1 = 0.553472 K2 = 7.871921E-3 K3 = 0
+K3B = 0.487191 W0 = 2.405804E-7 NLX = 6.971144E-9
+DVT0W = 0 DVT1W = 0 DVT2W = 0
+DVT0 = 0.5106741 DVT1 = 0.2486979 DVT2 = -0.3
+U0 = 201.3603195 UA = 2.408572E-9 UB = 1E-21
+UC = -1E-10 VSAT = 8.15121E4 A0 = 0.6613405
+AGS = 0.1231593 B0 = 7.984136E-7 B1 = 1.436868E-8
+KETA = -4.865785E-3 A1 = 1.215497E-3 A2 = 0.7419826
+RDSW = 3E3 PRWG = -0.0260617 PRWB = -0.0518155
+WR = 1 WINT = 2.911992E-7 LINT = 1.270856E-7
+XL = 1E-7 XW = 0 DWG = 1.092605E-9
+DWB = -1.69455E-8 VOFF = -0.0667563 NFACTOR = 0.7411151
+CIT = 0 CDSC = 2.4E-4 CDSCD = 0
+CDSCB = 0 ETA0 = 4.433819E-4 ETAB = -0.2
+DSUB = 1 PCLM = 2.2850045 PDIBLC1 = 0.0392156
+PDIBLC2 = 3.268594E-3 PDIBLCB = -0.0480276 DROUT = 0.2427192
+PSCBE1 = 1E8 PSCBE2 = 3.395327E-9 PVAG = 0.021004
+DELTA = 0.01 RSH = 105.3 MOBMOD = 1
+PRT = 0 UTE = -1.5 KT1 = -0.11
+KT1L = 0 KT2 = 0.022 UA1 = 4.31E-9
+UB1 = -7.61E-18 UC1 = -5.6E-11 AT = 3.3E4
+WL = 0 WLN = 1 WW = 0
+WWN = 1 WWL = 0 LL = 0
+LLN = 1 LW = 0 LWN = 1
+LWL = 0 CAPMOD = 2 XPART = 0.5
+CGDO = 3.93E-10 CGSO = 3.93E-10 CGBO = 1E-9
+CJ = 7.100127E-4 PB = 0.9231476 MJ = 0.4965116
+CJSW = 1.944801E-10 PBSW = 0.8 MJSW = 0.3263369
+CJSWG = 6.4E-11 PBSWG = 0.8 MJSWG = 0.3263369
+CF = 0 PVTH0 = 5.98016E-3 PRDSW = 14.8598424
+PK2 = 3.73981E-3 WKETA = 2.990249E-3 LKETA = -0.0161335 )
*
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