The poly2 layer is a second polysilicon layer (physically above the standard, or first, poly layer). The oxide between the two polys is the capacitor dielectric. The capacitor area is the area of coincident poly and electrode.
Rule | Description | Lambda | ||
---|---|---|---|---|
SCMOS | SUBM | DEEP | ||
11.1 | Minimum width | 3 1 | 7 2 | n/a |
11.2 | Minimum spacing | 3 3 | 3 4 | n/a |
11.3 | Minimum poly overlap | 2 5 | 5 6 | n/a |
11.4 |
Minimum spacing to active or well edge
(not illustrated) |
2 | 2 | n/a |
11.5 | Minimum spacing to poly contact | 3 | 6 | n/a |
11.6 | Minimum spacing to unrelated metal | 2 | 2 | n/a |
Exceptions for AMIS C30 0.35 micron process:
1 Use lambda=8 for rule 11.1 only when using SCN4ME
2 Use lambda=10 for rule 11.1 only when using SCN4ME_SUBM
3 Use lambda=4 for rule 11.2 only when using SCN4ME
4 Use lambda=4 for rule 11.2 only when using SCN4ME_SUBM
5 Use lambda=5 for rule 11.3 only when using SCN4ME
6 Use lambda=6 for rule 11.3 only when using SCN4ME_SUBM
Rule | Description | Lambda | ||
---|---|---|---|---|
SCMOS | SUBM | DEEP | ||
12.1 | Minimum width | 2 | 2 | n/a |
12.2 | Minimum spacing | 3 1 | 3 2 | n/a |
12.3 | Minimum electrode gate overlap of active | 2 | 2 | n/a |
12.4 | Minimum spacing to active | 1 | 1 | n/a |
12.5 | Minimum spacing or overlap of poly | 2 | 2 | n/a |
12.6 | Minimum spacing to poly or active contact | 3 | 3 | n/a |
Exceptions for AMIS C30 0.35 micron process:
1 Use lambda=4 for rule 12.2 only when using SCN4ME
2 Use lambda=4 for rule 12.2 only when using SCN4ME_SUBM
The poly2 is contacted through the standard contact layer, similar to the first poly. The overlap numbers are larger, however.
Contacts must be drawn orthogonal to the grid of the layout. Non-Manhattan contacts are not allowed.
Rule | Description | Lambda | ||
---|---|---|---|---|
SCMOS | SUBM | DEEP | ||
13.1 | Exact contact size | 2 x 2 | 2 x 2 | n/a |
13.2 | Minimum contact spacing | 2 | 3 | n/a |
13.3 | Minimum electrode overlap (on capacitor) | 3 | 3 | n/a |
13.4 | Minimum electrode overlap (not on capacitor) | 2 | 2 | n/a |
13.5 | Minimum spacing to poly or active | 3 | 3 | n/a |