Rule | Description | Lambda | ||
---|---|---|---|---|
SCMOS | SUBM | DEEP | ||
4.1 | Minimum select spacing to channel of transistor to ensure adequate source/drain width | 3 | 3 | 3 |
4.2 | Minimum select overlap of active | 2 | 2 | 2 |
4.3 | Minimum select overlap of contact | 1 | 1 | 1.5 |
4.4 |
Minimum select width and spacing (Note: P-select and N-select may be coincident, but must not overlap) (not illustrated) |
2 | 2 1 | 4 |
Exception for AMIS C30 0.35 micron process:
1 Use lambda=3 for rule 4.4 only when using SCN4M_SUBM or SCN4ME_SUBM