MOSIS PARAMETRIC TEST RESULTS RUN: T46W VENDOR: AMIS TECHNOLOGY: SCN035 FEATURE SIZE: 0.35 microns INTRODUCTION: This report contains the lot average results obtained by MOSIS from measurements of MOSIS test structures on each wafer of this fabrication lot. SPICE parameters obtained from similar measurements on a selected wafer are also attached. COMMENTS: SMSCN4ME04_AMI TRANSISTOR PARAMETERS W/L N-CHANNEL P-CHANNEL UNITS MINIMUM 0.6/0.4 Vth 0.55 -0.47 volts SHORT 20.0/0.4 Idss 505 -241 uA/um Vth 0.53 -0.50 volts Vpt 10.0 -9.5 volts WIDE 20.0/0.4 Ids0 < 2.5 < 2.5 pA/um LARGE 50/50 Vth 0.45 -0.54 volts Vjbkd 9.3 -9.2 volts Ijlk <50.0 <50.0 pA Gamma 0.44 0.47 V^0.5 K' (Uo*Cox/2) 93.1 -22.2 uA/V^2 Low-field Mobility 431.39 102.87 cm^2/V*s COMMENTS: XL_AMI_C3O FOX TRANSISTORS GATE N+ACTIVE P+ACTIVE UNITS Vth Poly >10.0 <-10.0 volts PROCESS PARAMETERS N+ P+ POLY POLY2 N+BLK PLY+BLK M1 UNITS Sheet Resistance 3.9 2.8 2.7 9.9 92.7 789.5 0.06 ohms/sq Contact Resistance 4.0 3.2 3.9 3.8 ohms Gate Oxide Thickness 80 angstrom PROCESS PARAMETERS M2 M3 M4 POLY2_ME N\PLY N_W UNITS Sheet Resistance 0.06 0.06 0.05 3.0 1356 1308 ohms/sq Contact Resistance 2.15 1.72 1.64 ohms COMMENTS: N\POLY is N-well under polysilicon. CAPACITANCE PARAMETERS N+ P+ POLY POLY2 M1 M2 M3 M4 N_W UNITS Area (substrate) 1009 983 112 31 17 7 -- 100 aF/um^2 Area (N+active) 4339 40 17 12 10 aF/um^2 Area (P+active) 4176 aF/um^2 Area (poly) 922 50 15 9 6 aF/um^2 Area (poly2) 52 aF/um^2 Area (metal1) 32 12 8 aF/um^2 Area (metal2) 31 13 aF/um^2 Area (metal3) 37 aF/um^2 Fringe (substrate) 273 294 47 32 -- 13 aF/um Fringe (poly) 69 38 28 23 aF/um Fringe (metal1) 62 34 26 aF/um Fringe (metal2) 60 33 aF/um Fringe (metal3) 51 aF/um Overlap (N+active) 258 aF/um Overlap (P+active) 312 aF/um CIRCUIT PARAMETERS UNITS Inverters K Vinv 1.0 1.33 volts Vinv 1.5 1.48 volts Vol (100 uA) 2.0 0.30 volts Voh (100 uA) 2.0 2.87 volts Vinv 2.0 1.60 volts Gain 2.0 -17.23 Ring Oscillator Freq. DIV256 (31-stg,3.3V) 154.27 MHz Ring Oscillator Power DIV256 (31-stg,3.3V) 0.16 uW/MHz/gate COMMENTS: SUBMICRON T46W SPICE BSIM3 VERSION 3.1 PARAMETERS SPICE 3f5 Level 8, Star-HSPICE Level 49, UTMOST Level 8 * DATE: Sep 14/04 * LOT: T46W WAF: 1102 * Temperature_parameters=Default .MODEL CMOSN NMOS ( LEVEL = 49 +VERSION = 3.1 TNOM = 27 TOX = 8E-9 +XJ = 1E-7 NCH = 2.2E17 VTH0 = 0.4074928 +K1 = 0.4728294 K2 = 3.621074E-3 K3 = 70.0489524 +K3B = -10 W0 = 1.830495E-5 NLX = 2.193565E-7 +DVT0W = 0 DVT1W = 0 DVT2W = 0 +DVT0 = 0.802594 DVT1 = 0.4276766 DVT2 = -0.3 +U0 = 361.3464355 UA = -9.67751E-10 UB = 2.889157E-18 +UC = 4.669186E-11 VSAT = 1.898742E5 A0 = 1.3381235 +AGS = 0.2592162 B0 = 2.220067E-6 B1 = 5E-6 +KETA = -9.077245E-3 A1 = 0 A2 = 0.3487525 +RDSW = 780.376869 PRWG = 0.0713836 PRWB = -7.21866E-3 +WR = 1 WINT = 1.389179E-7 LINT = 1.24319E-9 +DWG = -1.034792E-8 DWB = 9.824117E-9 VOFF = -0.0869274 +NFACTOR = 0.7366118 CIT = 0 CDSC = 2.4E-4 +CDSCD = 0 CDSCB = 0 ETA0 = 0.0346215 +ETAB = -7.988336E-3 DSUB = 0.3317286 PCLM = 1.9546403 +PDIBLC1 = 4.161735E-3 PDIBLC2 = 1.19743E-5 PDIBLCB = 0.1 +DROUT = 2.748338E-3 PSCBE1 = 7.42428E8 PSCBE2 = 1E-3 +PVAG = 0 DELTA = 0.01 RSH = 3.9 +MOBMOD = 1 PRT = 0 UTE = -1.5 +KT1 = -0.11 KT1L = 0 KT2 = 0.022 +UA1 = 4.31E-9 UB1 = -7.61E-18 UC1 = -5.6E-11 +AT = 3.3E4 WL = 0 WLN = 1 +WW = 0 WWN = 1 WWL = 0 +LL = 0 LLN = 1 LW = 0 +LWN = 1 LWL = 0 CAPMOD = 2 +XPART = 0.5 CGDO = 2.58E-10 CGSO = 2.58E-10 +CGBO = 1E-12 CJ = 1.012513E-3 PB = 0.8 +MJ = 0.3510986 CJSW = 2.862666E-10 PBSW = 0.8 +MJSW = 0.1518459 CJSWG = 1.82E-10 PBSWG = 0.8 +MJSWG = 0.1518459 CF = 0 PVTH0 = -0.0100437 +PRDSW = -73.5674578 PK2 = 3.087074E-3 WKETA = 3.003636E-3 +LKETA = 2.647195E-3 ) * .MODEL CMOSP PMOS ( LEVEL = 49 +VERSION = 3.1 TNOM = 27 TOX = 8E-9 +XJ = 1E-7 NCH = 8.52E16 VTH0 = -0.6831778 +K1 = 0.3939412 K2 = 0.0308482 K3 = 0 +K3B = 15.35112 W0 = 1E-5 NLX = 1E-9 +DVT0W = 0 DVT1W = 0 DVT2W = 0 +DVT0 = 1.4617205 DVT1 = 0.3569339 DVT2 = -0.0368562 +U0 = 221.3795636 UA = 1.573901E-9 UB = 5E-18 +UC = 8.567678E-11 VSAT = 2E5 A0 = 1.999067 +AGS = 0.389467 B0 = 2.419633E-6 B1 = 5E-6 +KETA = -6.020293E-3 A1 = 4.394989E-5 A2 = 0.6320223 +RDSW = 4E3 PRWG = -0.2146377 PRWB = 0.1688991 +WR = 1 WINT = 1.569174E-7 LINT = 0 +DWG = -2.578547E-8 DWB = 9.89001E-9 VOFF = -0.1219424 +NFACTOR = 1.8063821 CIT = 0 CDSC = 2.4E-4 +CDSCD = 0 CDSCB = 0 ETA0 = 0.0518465 +ETAB = 4.735705E-3 DSUB = 0.4254421 PCLM = 2.7235598 +PDIBLC1 = 0 PDIBLC2 = 4.344554E-3 PDIBLCB = 4.528856E-3 +DROUT = 5.604876E-3 PSCBE1 = 8E10 PSCBE2 = 5.04016E-10 +PVAG = 4.6592572 DELTA = 0.01 RSH = 2.8 +MOBMOD = 1 PRT = 0 UTE = -1.5 +KT1 = -0.11 KT1L = 0 KT2 = 0.022 +UA1 = 4.31E-9 UB1 = -7.61E-18 UC1 = -5.6E-11 +AT = 3.3E4 WL = 0 WLN = 1 +WW = 0 WWN = 1 WWL = 0 +LL = 0 LLN = 1 LW = 0 +LWN = 1 LWL = 0 CAPMOD = 2 +XPART = 0.5 CGDO = 3.12E-10 CGSO = 3.12E-10 +CGBO = 1E-12 CJ = 9.916255E-4 PB = 0.8896731 +MJ = 0.392439 CJSW = 2.91776E-10 PBSW = 0.99 +MJSW = 0.1676363 CJSWG = 4.42E-11 PBSWG = 0.99 +MJSWG = 0.1676363 CF = 0 PVTH0 = 0.0107102 +PRDSW = -233.4720278 PK2 = 1.861393E-3 WKETA = -6.345721E-3 +LKETA = -0.0207051 ) * Download Text File