MOSIS WAFER ACCEPTANCE TESTS RUN: T77Z VENDOR: AMIS TECHNOLOGY: SCN05 FEATURE SIZE: 0.5 microns Run type: SKD INTRODUCTION: This report contains the lot average results obtained by MOSIS from measurements of MOSIS test structures on each wafer of this fabrication lot. SPICE parameters obtained from similar measurements on a selected wafer are also attached. COMMENTS: American Microsystems, Inc. C5 TRANSISTOR PARAMETERS W/L N-CHANNEL P-CHANNEL UNITS MINIMUM 3.0/0.6 Vth 0.83 -0.94 volts SHORT 20.0/0.6 Idss 460 -249 uA/um Vth 0.71 -0.92 volts Vpt 10.0 -10.0 volts WIDE 20.0/0.6 Ids0 < 2.5 < 2.5 pA/um LARGE 50/50 Vth 0.73 -0.97 volts Vjbkd 11.0 -11.8 volts Ijlk <50.0 <50.0 pA Gamma 0.49 0.59 V^0.5 K' (Uo*Cox/2) 57.4 -18.5 uA/V^2 Low-field Mobility 472.09 152.15 cm^2/V*s COMMENTS: Poly bias varies with design technology. To account for mask bias use the appropriate value for the parameter XL in your SPICE model card. Design Technology XL (um) XW (um) ----------------- ------- ------ SCMOS_SUBM (lambda=0.30) 0.10 0.00 SCMOS (lambda=0.35) 0.00 0.20 FOX TRANSISTORS GATE N+ACTIVE P+ACTIVE UNITS Vth Poly >15.0 <-15.0 volts PROCESS PARAMETERS N+ P+ POLY PLY2_HR POLY2 M1 M2 UNITS Sheet Resistance 83.2 102.6 22.9 1042 42.0 0.09 0.09 ohms/sq Contact Resistance 62.3 142.9 16.9 28.2 0.83 ohms Gate Oxide Thickness 142 angstrom PROCESS PARAMETERS M3 N\PLY N_W UNITS Sheet Resistance 0.05 814 804 ohms/sq Contact Resistance 0.79 ohms COMMENTS: N\POLY is N-well under polysilicon. CAPACITANCE PARAMETERS N+ P+ POLY POLY2 M1 M2 M3 N_W UNITS Area (substrate) 426 739 87 30 14 9 37 aF/um^2 Area (N+active) 2430 35 16 12 aF/um^2 Area (P+active) 2330 aF/um^2 Area (poly) 912 58 16 9 aF/um^2 Area (poly2) 51 aF/um^2 Area (metal1) 32 13 aF/um^2 Area (metal2) 34 aF/um^2 Fringe (substrate) 335 231 71 57 33 aF/um Fringe (poly) 60 39 28 aF/um Fringe (metal1) 53 33 aF/um Fringe (metal2) 48 aF/um Overlap (N+active) 229 aF/um Overlap (P+active) 312 aF/um CIRCUIT PARAMETERS UNITS Inverters K Vinv 1.0 2.02 volts Vinv 1.5 2.27 volts Vol (100 uA) 2.0 0.12 volts Voh (100 uA) 2.0 4.87 volts Vinv 2.0 2.46 volts Gain 2.0 -19.31 Ring Oscillator Freq. DIV256 (31-stg,5.0V) 94.20 MHz D256_WIDE (31-stg,5.0V) 148.88 MHz Ring Oscillator Power DIV256 (31-stg,5.0V) 0.47 uW/MHz/gate D256_WIDE (31-stg,5.0V) 0.99 uW/MHz/gate COMMENTS: SUBMICRON T77Z SPICE BSIM3 VERSION 3.1 PARAMETERS SPICE 3f5 Level 8, Star-HSPICE Level 49, UTMOST Level 8 * DATE: Oct 5/07 * LOT: T77Z WAF: 5102 * Temperature_parameters=Default .MODEL CMOSN NMOS ( LEVEL = 49 +VERSION = 3.1 TNOM = 27 TOX = 1.42E-8 +XJ = 1.5E-7 NCH = 1.7E17 VTH0 = 0.6659489 +K1 = 0.889106 K2 = -0.0970558 K3 = 33.0718688 +K3B = -7.7995584 W0 = 1E-8 NLX = 1.268093E-9 +DVT0W = 0 DVT1W = 0 DVT2W = 0 +DVT0 = 0.7810872 DVT1 = 0.3640586 DVT2 = -0.4406922 +U0 = 447.2230113 UA = 1E-13 UB = 1.132752E-18 +UC = -4.14587E-13 VSAT = 1.766057E5 A0 = 0.6393557 +AGS = 0.1311377 B0 = 2.396659E-6 B1 = 5E-6 +KETA = -4.659654E-3 A1 = 1.408034E-6 A2 = 0.312332 +RDSW = 1.073999E3 PRWG = 0.1320635 PRWB = 0.0236156 +WR = 1 WINT = 1.648112E-7 LINT = 1.012669E-7 +XL = 1E-7 XW = 0 DWG = 4.044669E-9 +DWB = 7.009186E-8 VOFF = 0 NFACTOR = 0.9885491 +CIT = 0 CDSC = 2.4E-4 CDSCD = 0 +CDSCB = 0 ETA0 = 2.834473E-3 ETAB = -2.173853E-5 +DSUB = 0.0865566 PCLM = 2.7475265 PDIBLC1 = 1 +PDIBLC2 = 2.387819E-3 PDIBLCB = -9.882587E-5 DROUT = 1.1339894 +PSCBE1 = 7.104335E8 PSCBE2 = 5.876452E-4 PVAG = 0 +DELTA = 0.01 RSH = 83.2 MOBMOD = 1 +PRT = 0 UTE = -1.5 KT1 = -0.11 +KT1L = 0 KT2 = 0.022 UA1 = 4.31E-9 +UB1 = -7.61E-18 UC1 = -5.6E-11 AT = 3.3E4 +WL = 0 WLN = 1 WW = 0 +WWN = 1 WWL = 0 LL = 0 +LLN = 1 LW = 0 LWN = 1 +LWL = 0 CAPMOD = 2 XPART = 0.5 +CGDO = 2.29E-10 CGSO = 2.29E-10 CGBO = 1E-9 +CJ = 4.259589E-4 PB = 0.9378264 MJ = 0.4415776 +CJSW = 3.071641E-10 PBSW = 0.8 MJSW = 0.1788497 +CJSWG = 1.64E-10 PBSWG = 0.8 MJSWG = 0.1788497 +CF = 0 PVTH0 = -4.525102E-3 PRDSW = 388.235004 +PK2 = -0.0830102 WKETA = -4.028651E-3 LKETA = -3.260319E-3 ) * .MODEL CMOSP PMOS ( LEVEL = 49 +VERSION = 3.1 TNOM = 27 TOX = 1.42E-8 +XJ = 1.5E-7 NCH = 1.7E17 VTH0 = -0.9152268 +K1 = 0.553472 K2 = 7.871921E-3 K3 = 60.6035199 +K3B = -5 W0 = 7.631748E-6 NLX = 2.499005E-7 +DVT0W = 0 DVT1W = 0 DVT2W = 0 +DVT0 = 1.3016012 DVT1 = 0.2731126 DVT2 = -0.0477574 +U0 = 201.3603195 UA = 2.408572E-9 UB = 1E-21 +UC = -1E-10 VSAT = 1.381312E5 A0 = 0.8184183 +AGS = 0.0705138 B0 = 5.129381E-7 B1 = 5E-6 +KETA = -4.865785E-3 A1 = 1.290001E-4 A2 = 0.3479888 +RDSW = 3E3 PRWG = -0.0303967 PRWB = -0.0443625 +WR = 1 WINT = 2.603405E-7 LINT = 1.186984E-7 +XL = 1E-7 XW = 0 DWG = -2.047736E-9 +DWB = 6.199525E-10 VOFF = -0.0720317 NFACTOR = 0.6453775 +CIT = 0 CDSC = 2.4E-4 CDSCD = 0 +CDSCB = 0 ETA0 = 0 ETAB = -0.2 +DSUB = 1 PCLM = 2.4510425 PDIBLC1 = 0.0424671 +PDIBLC2 = 3.156178E-3 PDIBLCB = -0.0283411 DROUT = 0.2225329 +PSCBE1 = 6.663088E10 PSCBE2 = 6.452887E-9 PVAG = 4.636423E-3 +DELTA = 0.01 RSH = 102.6 MOBMOD = 1 +PRT = 0 UTE = -1.5 KT1 = -0.11 +KT1L = 0 KT2 = 0.022 UA1 = 4.31E-9 +UB1 = -7.61E-18 UC1 = -5.6E-11 AT = 3.3E4 +WL = 0 WLN = 1 WW = 0 +WWN = 1 WWL = 0 LL = 0 +LLN = 1 LW = 0 LWN = 1 +LWL = 0 CAPMOD = 2 XPART = 0.5 +CGDO = 3.12E-10 CGSO = 3.12E-10 CGBO = 1E-9 +CJ = 7.356618E-4 PB = 0.9619625 MJ = 0.4980942 +CJSW = 2.451265E-10 PBSW = 0.99 MJSW = 0.3409576 +CJSWG = 6.4E-11 PBSWG = 0.99 MJSWG = 0.3409576 +CF = 0 PVTH0 = 5.98016E-3 PRDSW = 14.8598424 +PK2 = 3.73981E-3 WKETA = 0.0129642 LKETA = -7.681181E-3 ) * Download Text File