tech scmos end version version 2001a description "SCMOS: Submit as technology.lambda: SCN3M.35 [to process: HPcmos14tb]" end planes well,w select,s active,a metal1,m1 metal2,m2 metal3,m3 oxide,ox comment xp contact via1,v1 via2,v2 end types well nwell,nw well pwell,pw select nselect,ns select pselect,ps active ntransistor,nfet active ptransistor,pfet active diffusion,diff active transistor,fet active ndiffusion,ndif,green active pdiffusion,pdif,brown active ndcontact,ndc active pdcontact,pdc active psubstratepdiff,pohmicdiff,pod,ppdiff,ppd,psd active nsubstratendiff,nohmicdiff,nod,nndiff,nnd,nsd active psubstratepcontact,pohmiccontact,poc,pwcontact,pwc,psc active nsubstratencontact,nohmiccontact,noc,nwcontact,nwc,nsc active polysilicon,red,poly,p active polycontact,pcontact,polycut,pc contact genericcontact,gcontact,gc metal1 metal1,m1,blue metal1 metal1tight,m1t metal1 m2contact,m2cut,m2c,via1,v1 metal2 metal2,m2,purple metal2 metal2tight,m2t via1 gv1 metal2 m3contact,m3cut,m3c,via2,v2 metal3 metal3,m3,cyan via2 gv2 metal3 pad oxide glass active silicide_block,sb active poly_resist,pres active activen_resist,anres active activep_resist,apres xp xp comment comment comment bb end contact pc poly metal1 ndc ndiff metal1 pdc pdiff metal1 nsc nsd metal1 psc psd metal1 m2c metal1 metal2 m3c metal2 metal3 end styles styletype mos nwell 12 pwell 13 nselect 43 pselect 44 diff 25 tran 2 tran 4 ndiff 2 pdiff 4 nsd 3 psd 5 nfet 6 nfet 7 pfet 8 pfet 9 ndc 2 ndc 20 ndc 32 pdc 4 pdc 20 pdc 32 nsc 3 nsc 20 nsc 32 psc 5 psc 20 psc 32 poly 1 pcontact 1 pcontact 20 pcontact 32 gc 32 metal1 20 m1t 49 gv1 55 m2contact 20 m2contact 21 m2contact 55 metal2 21 m2t 50 gv2 56 m3contact 21 m3contact 22 m3contact 56 metal3 22 pad 22 pad 23 pad 34 pad 38 glass 34 xp 25 xp 34 sb 10 pres 47 pres 48 anres 2 anres 48 apres 4 apres 53 comment 45 bb 32 error_p 42 error_s 42 error_ps 42 magnet 54 rotate 57 fence 59 end compose compose nfet poly ndiff compose pfet poly pdiff paint diff nselect ndiff paint diff pselect pdiff compose tran poly diff paint tran nselect nfet paint tran pselect pfet paint psd ns ndiff paint nsd ps pdiff paint ndiff ps psd paint pdiff ns nsd paint pad m1 pad paint pad m2 pad paint pad m2c pad paint anres nwell apres paint apres pwell anres paint ndc nwell pdc paint nfet nwell pfet paint ndiff nwell pdiff paint psd nwell nsd paint psc nwell nsc paint pdc pwell ndc paint pfet pwell nfet paint pdiff pwell ndiff paint nsd pwell psd paint nsc pwell psc paint pad m3 pad paint m1t m1 m1 paint m1 m1t m1t paint m2c m2t m2c paint ndc m1t ndc paint pdc m1t pdc paint pc m1t pc paint m2t m2 m2 paint m2 m2t m2t compose pres poly sb paint sb poly pres paint poly sb pres erase pres sb poly compose anres ndiff sb paint sb ndiff anres paint ndiff sb anres erase anres sb ndiff compose apres pdiff sb paint sb pdiff apres paint pdiff sb apres erase apres sb pdiff end connect nwell,nsc/a,nsd nwell,nsc/a,nsd pwell,psc/a,psd pwell,psc/a,psd m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 m2,m2t,m2c/m2,m3c/m2,m3c/m2 m2,m2t,m2c/m2,m3c/m2,m3c/m2 m3,m3c/m3 m3,m3c/m3 ndiff,nsd,ndc/a,nsc/a,pdiff,psd,pdc/a,psc/a ndiff,nsd,ndc/a,nsc/a,pdiff,psd,pdc/a,psc/a poly,nfet,pfet,fet,pc/a poly,nfet,pfet,fet,pc/a gc poly,ndiff,pdiff,nsd,psd,m1,m1t,m2c/m1 gv1 m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2,m2t,m3c/m2 gv2 m2,m2t,m2c/m2,m3c/m2,m3 pad m1,m1t,m2,m2t,m3 pres sb anres sb apres sb end cifoutput style lambda=0.35(p) scalefactor 35 calmaonly layer CWN nwell bloat-or pdiff,apres,pdc/a,pfet * 175 bloat-or nsd,nsc/a * 105 grow 105 shrink 105 labels nwell calma 42 0 layer CWP pwell bloat-or ndiff,anres,ndc/a,nfet * 175 bloat-or psd,psc/a * 105 grow 105 shrink 105 and-not CWN labels pwell calma 41 0 templayer TNS ns templayer TPS ps #we give priority to selects autogenerated around diffusions (vrs. ohmics) #XDP = (pdiff*70) Or ps #XDN = (ndiff*70) Or ns #FSP = ((pdiff*70,psc*70) Or XDP And-Not XDN Or ps shrink-grow #FSN = ((ndiff*70,nsc*70) Or XDN And-Not FDP Or ns shrink-grow #CSN = FSN #CSP = FSP #diffusion auto-nselect (will have priority) templayer XDN bloat-or ndiff,anres,ndc/a * 70 psd,psc/a 0 #PEZ poly exclusion zone bloat-or nfet * 105 or TNS #diffusion auto-pselect (will have priority) templayer XDP bloat-or pdiff,apres,pdc/a * 70 nsd,nsc/a 0 #PEZ poly exclusion zone bloat-or pfet * 105 or TPS #final pselect templayer FSP bloat-or pdiff,apres,pfet,psd,pdc/a,psc/a,pfet * 70 ndiff,anres,ndc/a,nsd,nsc/a,nfet 0 or XDP #give diff nselect priority and-not XDN or TPS shrink 20 grow 20 grow 20 shrink 20 #final nselect templayer FSN bloat-or ndiff,anres,nfet,nsd,ndc/a,nsc/a,nfet * 70 pdiff,apres,pdc/a,psd,psc/a,pfet 0 or XDN #never conflict with final pselect and-not FSP #drawn select always goes or TNS shrink 20 grow 20 grow 20 shrink 20 layer CSN FSN calma 45 0 layer CSP FSP calma 44 0 layer CAA diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a,pfet,pfet,fet labels diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a,pfet,pfet,fet calma 43 0 layer CCA ndc/m1,nsc/m1 squares 35 70 70 calma 48 0 layer CCA squares 35 70 105 calma 48 0 layer CCA pdc/m1,psc/m1 squares 35 70 70 calma 48 0 layer CCA squares 35 70 105 calma 48 0 layer CPG poly,pres,nfet,pfet,fet,pc/a labels poly,pres,nfet,pfet,fet,pc/a calma 46 0 layer CCP pc/m1 squares 35 70 70 calma 47 0 layer CCP squares 35 70 105 calma 47 0 layer CCC gc squares 0 70 70 calma 25 0 layer CV1 m2c/m1 squares 35 70 105 calma 50 0 layer CV1 gv1 squares 0 70 105 calma 50 0 layer CV2 m3c/m2 squares 35 70 105 calma 61 0 layer CV2 gv2 squares 0 70 105 calma 61 0 layer CM3 pad labels pad calma 62 0 templayer XPAD1 pad shrink 210 templayer XPAD2 XPAD1 shrink 210 layer CV2 XPAD1 and-not XPAD2 squares 35 70 105 calma 61 0 layer CM2 pad and-not XPAD2 calma 51 0 layer CV1 pad and-not XPAD1 squares 35 70 105 calma 50 0 layer CM1 pad and-not XPAD2 calma 49 0 layer CM1 m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 labels m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 calma 49 0 layer CM2 m2,m2t,m2c/m2,m3c/m2,m3c/m2 labels m2,m2t,m2c/m2,m3c/m2,m3c/m2 calma 51 0 layer CM3 m3,m3c/m3 labels m3,m3c/m3 calma 62 0 layer COG pad shrink 600 labels pad calma 52 0 layer COG glass labels glass calma 52 0 layer CSB sb,pres,anres,apres labels sb,pres,anres,apres calma 29 0 layer CX comment labels comment calma 63 0 layer XP pad,xp labels pad,xp calma 26 0 style lambda=0.35(cp) scalefactor 35 calmaonly layer CWN nwell bloat-or pdiff,apres,pdc/a,pfet * 175 bloat-or nsd,nsc/a * 105 grow 105 shrink 105 labels nwell calma 42 0 layer CWP pwell bloat-or ndiff,anres,ndc/a,nfet * 175 bloat-or psd,psc/a * 105 grow 105 shrink 105 and-not CWN labels pwell calma 41 0 templayer TNS ns templayer TPS ps #we give priority to selects autogenerated around diffusions (vrs. ohmics) #XDP = (pdiff*70) Or ps #XDN = (ndiff*70) Or ns #FSP = ((pdiff*70,psc*70) Or XDP And-Not XDN Or ps shrink-grow #FSN = ((ndiff*70,nsc*70) Or XDN And-Not FDP Or ns shrink-grow #CSN = FSN #CSP = FSP #diffusion auto-nselect (will have priority) templayer XDN bloat-or ndiff,anres,ndc/a * 70 psd,psc/a 0 #PEZ poly exclusion zone bloat-or nfet * 105 or TNS #diffusion auto-pselect (will have priority) templayer XDP bloat-or pdiff,apres,pdc/a * 70 nsd,nsc/a 0 #PEZ poly exclusion zone bloat-or pfet * 105 or TPS #final pselect templayer FSP bloat-or pdiff,apres,pfet,psd,pdc/a,psc/a,pfet * 70 ndiff,anres,ndc/a,nsd,nsc/a,nfet 0 or XDP #give diff nselect priority and-not XDN or TPS shrink 20 grow 20 grow 20 shrink 20 #final nselect templayer FSN bloat-or ndiff,anres,nfet,nsd,ndc/a,nsc/a,nfet * 70 pdiff,apres,pdc/a,psd,psc/a,pfet 0 or XDN #never conflict with final pselect and-not FSP #drawn select always goes or TNS shrink 20 grow 20 grow 20 shrink 20 layer CSN FSN calma 45 0 layer CSP FSP calma 44 0 layer CAA diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a,pfet,pfet,fet labels diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a,pfet,pfet,fet calma 43 0 layer CCC ndc/m1,nsc/m1 squares 35 70 70 calma 25 0 layer CCC squares 35 70 105 calma 25 0 layer CCC pdc/m1,psc/m1 squares 35 70 70 calma 25 0 layer CCC squares 35 70 105 calma 25 0 layer CPG poly,pres,nfet,pfet,fet,pc/a labels poly,pres,nfet,pfet,fet,pc/a calma 46 0 layer CCC pc/m1 squares 35 70 70 calma 25 0 layer CCC squares 35 70 105 calma 25 0 layer CCC gc squares 0 70 70 calma 25 0 layer CV1 m2c/m1 squares 35 70 105 calma 50 0 layer CV1 gv1 squares 0 70 105 calma 50 0 layer CV2 m3c/m2 squares 35 70 105 calma 61 0 layer CV2 gv2 squares 0 70 105 calma 61 0 layer CM3 pad labels pad calma 62 0 templayer XPAD1 pad shrink 210 templayer XPAD2 XPAD1 shrink 210 layer CV2 XPAD1 and-not XPAD2 squares 35 70 105 calma 61 0 layer CM2 pad and-not XPAD2 calma 51 0 layer CV1 pad and-not XPAD1 squares 35 70 105 calma 50 0 layer CM1 pad and-not XPAD2 calma 49 0 layer CM1 m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 labels m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 calma 49 0 layer CM2 m2,m2t,m2c/m2,m3c/m2,m3c/m2 labels m2,m2t,m2c/m2,m3c/m2,m3c/m2 calma 51 0 layer CM3 m3,m3c/m3 labels m3,m3c/m3 calma 62 0 layer COG pad shrink 600 labels pad calma 52 0 layer COG glass labels glass calma 52 0 layer CSB sb,pres,anres,apres labels sb,pres,anres,apres calma 29 0 layer CX comment labels comment calma 63 0 layer XP pad,xp labels pad,xp calma 26 0 style lambda=0.35(c) scalefactor 35 calmaonly layer CWN nwell bloat-or pdiff,apres,pdc/a,pfet * 175 bloat-or nsd,nsc/a * 105 grow 105 shrink 105 labels nwell calma 42 0 templayer TNS ns templayer TPS ps #we give priority to selects autogenerated around diffusions (vrs. ohmics) #XDP = (pdiff*70) Or ps #XDN = (ndiff*70) Or ns #FSP = ((pdiff*70,psc*70) Or XDP And-Not XDN Or ps shrink-grow #FSN = ((ndiff*70,nsc*70) Or XDN And-Not FDP Or ns shrink-grow #CSN = FSN #CSP = FSP #diffusion auto-nselect (will have priority) templayer XDN bloat-or ndiff,anres,ndc/a * 70 psd,psc/a 0 #PEZ poly exclusion zone bloat-or nfet * 105 or TNS #diffusion auto-pselect (will have priority) templayer XDP bloat-or pdiff,apres,pdc/a * 70 nsd,nsc/a 0 #PEZ poly exclusion zone bloat-or pfet * 105 or TPS #final pselect templayer FSP bloat-or pdiff,apres,pfet,psd,pdc/a,psc/a,pfet * 70 ndiff,anres,ndc/a,nsd,nsc/a,nfet 0 or XDP #give diff nselect priority and-not XDN or TPS shrink 20 grow 20 grow 20 shrink 20 #final nselect templayer FSN bloat-or ndiff,anres,nfet,nsd,ndc/a,nsc/a,nfet * 70 pdiff,apres,pdc/a,psd,psc/a,pfet 0 or XDN #never conflict with final pselect and-not FSP #drawn select always goes or TNS shrink 20 grow 20 grow 20 shrink 20 layer CSN FSN calma 45 0 layer CSP FSP calma 44 0 layer CAA diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a,pfet,pfet,fet labels diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a,pfet,pfet,fet calma 43 0 layer CCC ndc/m1,nsc/m1 squares 35 70 70 calma 25 0 layer CCC squares 35 70 105 calma 25 0 layer CCC pdc/m1,psc/m1 squares 35 70 70 calma 25 0 layer CCC squares 35 70 105 calma 25 0 layer CPG poly,pres,nfet,pfet,fet,pc/a labels poly,pres,nfet,pfet,fet,pc/a calma 46 0 layer CCC pc/m1 squares 35 70 70 calma 25 0 layer CCC squares 35 70 105 calma 25 0 layer CCC gc squares 0 70 70 calma 25 0 layer CV1 m2c/m1 squares 35 70 105 calma 50 0 layer CV1 gv1 squares 0 70 105 calma 50 0 layer CV2 m3c/m2 squares 35 70 105 calma 61 0 layer CV2 gv2 squares 0 70 105 calma 61 0 layer CM3 pad labels pad calma 62 0 templayer XPAD1 pad shrink 210 templayer XPAD2 XPAD1 shrink 210 layer CV2 XPAD1 and-not XPAD2 squares 35 70 105 calma 61 0 layer CM2 pad and-not XPAD2 calma 51 0 layer CV1 pad and-not XPAD1 squares 35 70 105 calma 50 0 layer CM1 pad and-not XPAD2 calma 49 0 layer CM1 m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 labels m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 calma 49 0 layer CM2 m2,m2t,m2c/m2,m3c/m2,m3c/m2 labels m2,m2t,m2c/m2,m3c/m2,m3c/m2 calma 51 0 layer CM3 m3,m3c/m3 labels m3,m3c/m3 calma 62 0 layer COG pad shrink 600 labels pad calma 52 0 layer COG glass labels glass calma 52 0 layer CSB sb,pres,anres,apres labels sb,pres,anres,apres calma 29 0 layer CX comment labels comment calma 63 0 layer XP pad,xp labels pad,xp calma 26 0 style lambda=0.35() scalefactor 35 calmaonly layer CWN nwell bloat-or pdiff,apres,pdc/a,pfet * 175 bloat-or nsd,nsc/a * 105 grow 105 shrink 105 labels nwell calma 42 0 templayer TNS ns templayer TPS ps #we give priority to selects autogenerated around diffusions (vrs. ohmics) #XDP = (pdiff*70) Or ps #XDN = (ndiff*70) Or ns #FSP = ((pdiff*70,psc*70) Or XDP And-Not XDN Or ps shrink-grow #FSN = ((ndiff*70,nsc*70) Or XDN And-Not FDP Or ns shrink-grow #CSN = FSN #CSP = FSP #diffusion auto-nselect (will have priority) templayer XDN bloat-or ndiff,anres,ndc/a * 70 psd,psc/a 0 #PEZ poly exclusion zone bloat-or nfet * 105 or TNS #diffusion auto-pselect (will have priority) templayer XDP bloat-or pdiff,apres,pdc/a * 70 nsd,nsc/a 0 #PEZ poly exclusion zone bloat-or pfet * 105 or TPS #final pselect templayer FSP bloat-or pdiff,apres,pfet,psd,pdc/a,psc/a,pfet * 70 ndiff,anres,ndc/a,nsd,nsc/a,nfet 0 or XDP #give diff nselect priority and-not XDN or TPS shrink 20 grow 20 grow 20 shrink 20 #final nselect templayer FSN bloat-or ndiff,anres,nfet,nsd,ndc/a,nsc/a,nfet * 70 pdiff,apres,pdc/a,psd,psc/a,pfet 0 or XDN #never conflict with final pselect and-not FSP #drawn select always goes or TNS shrink 20 grow 20 grow 20 shrink 20 layer CSN FSN calma 45 0 layer CSP FSP calma 44 0 layer CAA diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a,pfet,pfet,fet labels diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a,pfet,pfet,fet calma 43 0 layer CCA ndc/m1,nsc/m1 squares 35 70 70 calma 48 0 layer CCA squares 35 70 105 calma 48 0 layer CCA pdc/m1,psc/m1 squares 35 70 70 calma 48 0 layer CCA squares 35 70 105 calma 48 0 layer CPG poly,pres,nfet,pfet,fet,pc/a labels poly,pres,nfet,pfet,fet,pc/a calma 46 0 layer CCP pc/m1 squares 35 70 70 calma 47 0 layer CCP squares 35 70 105 calma 47 0 layer CCC gc squares 0 70 70 calma 25 0 layer CV1 m2c/m1 squares 35 70 105 calma 50 0 layer CV1 gv1 squares 0 70 105 calma 50 0 layer CV2 m3c/m2 squares 35 70 105 calma 61 0 layer CV2 gv2 squares 0 70 105 calma 61 0 layer CM3 pad labels pad calma 62 0 templayer XPAD1 pad shrink 210 templayer XPAD2 XPAD1 shrink 210 layer CV2 XPAD1 and-not XPAD2 squares 35 70 105 calma 61 0 layer CM2 pad and-not XPAD2 calma 51 0 layer CV1 pad and-not XPAD1 squares 35 70 105 calma 50 0 layer CM1 pad and-not XPAD2 calma 49 0 layer CM1 m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 labels m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 calma 49 0 layer CM2 m2,m2t,m2c/m2,m3c/m2,m3c/m2 labels m2,m2t,m2c/m2,m3c/m2,m3c/m2 calma 51 0 layer CM3 m3,m3c/m3 labels m3,m3c/m3 calma 62 0 layer COG pad shrink 600 labels pad calma 52 0 layer COG glass labels glass calma 52 0 layer CSB sb,pres,anres,apres labels sb,pres,anres,apres calma 29 0 layer CX comment labels comment calma 63 0 layer XP pad,xp labels pad,xp calma 26 0 end cifinput style lambda=0.35(p) scalefactor 35 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer pwell CWP and-not CTA labels CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * calma CSN 45 * calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer ndc CAA and CSN and CCA and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 35 calma CCA 48 * layer ndc CAA and CSN and CCC and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 35 calma CCC 25 * layer nsc CAA and CSN and CCA and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 35 calma CCA 48 * layer nsc CAA and CSN and CCC and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 35 calma CCC 25 * layer pdc CAA and CSP and CCA and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 35 calma CCA 48 * layer pdc CAA and CSP and CCC and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 35 calma CCC 25 * layer psc CAA and CSP and CCA and-not CV1 and-not CTA and-not CPS and-not CWN and CM1 grow 35 calma CCA 48 * layer psc CAA and CSP and CCC and-not CV1 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 35 calma CCC 25 * layer ndc CAA and CSN and CCA and CV1 and CV2 and-not CWNR and-not CTA and-not CWN and CM1 grow 35 calma CCA 48 * layer ndc CAA and CSN and CCC and CV1 and CV2 and-not CWNR and-not CTA and-not CWN and CM1 grow 35 calma CCC 25 * layer nsc CAA and CSN and CCA and CV1 and CV2 and-not CWNR and-not CTA and CWN and CM1 grow 35 calma CCA 48 * layer nsc CAA and CSN and CCC and CV1 and CV2 and-not CWNR and-not CTA and CWN and CM1 grow 35 calma CCC 25 * layer pdc CAA and CSP and CCA and CV1 and CV2 and-not CTA and-not CPS and CWN and CM1 grow 35 calma CCA 48 * layer pdc CAA and CSP and CCC and CV1 and CV2 and-not CTA and-not CPS and CWN and CM1 grow 35 calma CCC 25 * layer psc CAA and CSP and CCA and CV1 and CV2 and-not CTA and-not CPS and-not CWN and CM1 grow 35 calma CCA 48 * layer psc CAA and CSP and CCC and CV1 and CV2 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 35 calma CCC 25 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer pc CCP and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 35 and CM1 calma CCP 47 * layer pc CCC and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 35 and CM1 calma CCC 25 * layer pc CCP and CV1 and CV2 and CPG and-not CPC and-not CEL and-not CAA grow 35 and CM1 calma CCP 47 * layer pc CCC and CV1 and CV2 and CPG and-not CPC and-not CEL and-not CAA grow 35 and CM1 calma CCC 25 * layer gc CCP and-not CPG and-not CPC calma CCP 47 * layer gc CCP and-not CM1 calma CCP 47 * layer gc CCA and-not COP and-not CAA and-not CBA calma CCA 48 * layer gc CCA and-not COP and-not CM1 calma CCA 48 * layer gc CCC and-not COP and-not CPG and-not CPC and-not CEL and-not CAA and-not CBA calma CCC 25 * layer gc CCC and-not COP and-not CM1 calma CCC 25 * layer gc CCE and-not CPC and-not CEL calma CCE 55 * layer gc CCE and-not CM1 calma CCE 55 * layer gv1 CV1 and-not COP and-not CM1 calma CV1 50 * layer gv1 CV1 and-not COP and-not CM2 calma CV1 50 * layer gv2 CV2 and-not COP and-not CM2 calma CV2 61 * layer gv2 CV2 and-not COP and-not CM3 calma CV2 61 * layer m2c CV1 and-not CV2 and-not CCC and-not CCP and-not CCA and-not XP grow 35 and CM2 and CM1 grow 20 shrink 20 calma CV1 50 * layer m1 CM1 and-not CRM and-not CRF and-not XP labels CM1 calma CM1 49 * layer m2 CM2 and-not CRM and-not CRS and-not XP labels CM2 calma CM2 51 * layer m3c CV2 and-not CV1 and-not XP grow 35 and CM3 and CM2 grow 20 shrink 20 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT and-not XP labels CM3 calma CM3 62 * layer pad XP labels pad calma XP 26 * layer glass COG and-not COP and-not XP labels COG calma COG 52 * layer sb CSB and-not CWNR labels CSB calma CSB 29 * layer pres CPG and CSB calma CPG 46 * layer anres CAA and CSN and-not CWNR and-not CTA and CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer apres CAA and CSP and-not CWNR and-not CTA and CSB and-not CPG and CWN and-not CSN and-not CPS and-not CBA calma CAA 43 * layer comment CX labels CX calma CX 63 * calma CTA 60 * style lambda=0.35(s) scalefactor 35 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * ignore CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer nselect CSN calma CSN 45 * layer pselect CSP calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer ndc CAA and CSN and CCA and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 35 calma CCA 48 * layer ndc CAA and CSN and CCC and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 35 calma CCC 25 * layer nsc CAA and CSN and CCA and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 35 calma CCA 48 * layer nsc CAA and CSN and CCC and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 35 calma CCC 25 * layer pdc CAA and CSP and CCA and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 35 calma CCA 48 * layer pdc CAA and CSP and CCC and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 35 calma CCC 25 * layer psc CAA and CSP and CCA and-not CV1 and-not CTA and-not CPS and-not CWN and CM1 grow 35 calma CCA 48 * layer psc CAA and CSP and CCC and-not CV1 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 35 calma CCC 25 * layer ndc CAA and CSN and CCA and CV1 and CV2 and-not CWNR and-not CTA and-not CWN and CM1 grow 35 calma CCA 48 * layer ndc CAA and CSN and CCC and CV1 and CV2 and-not CWNR and-not CTA and-not CWN and CM1 grow 35 calma CCC 25 * layer nsc CAA and CSN and CCA and CV1 and CV2 and-not CWNR and-not CTA and CWN and CM1 grow 35 calma CCA 48 * layer nsc CAA and CSN and CCC and CV1 and CV2 and-not CWNR and-not CTA and CWN and CM1 grow 35 calma CCC 25 * layer pdc CAA and CSP and CCA and CV1 and CV2 and-not CTA and-not CPS and CWN and CM1 grow 35 calma CCA 48 * layer pdc CAA and CSP and CCC and CV1 and CV2 and-not CTA and-not CPS and CWN and CM1 grow 35 calma CCC 25 * layer psc CAA and CSP and CCA and CV1 and CV2 and-not CTA and-not CPS and-not CWN and CM1 grow 35 calma CCA 48 * layer psc CAA and CSP and CCC and CV1 and CV2 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 35 calma CCC 25 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer pc CCP and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 35 and CM1 calma CCP 47 * layer pc CCC and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 35 and CM1 calma CCC 25 * layer pc CCP and CV1 and CV2 and CPG and-not CPC and-not CEL and-not CAA grow 35 and CM1 calma CCP 47 * layer pc CCC and CV1 and CV2 and CPG and-not CPC and-not CEL and-not CAA grow 35 and CM1 calma CCC 25 * layer gc CCP and-not CPG and-not CPC calma CCP 47 * layer gc CCP and-not CM1 calma CCP 47 * layer gc CCA and-not COP and-not CAA and-not CBA calma CCA 48 * layer gc CCA and-not COP and-not CM1 calma CCA 48 * layer gc CCC and-not COP and-not CPG and-not CPC and-not CEL and-not CAA and-not CBA calma CCC 25 * layer gc CCC and-not COP and-not CM1 calma CCC 25 * layer gc CCE and-not CPC and-not CEL calma CCE 55 * layer gc CCE and-not CM1 calma CCE 55 * layer gv1 CV1 and-not COP and-not CM1 calma CV1 50 * layer gv1 CV1 and-not COP and-not CM2 calma CV1 50 * layer gv2 CV2 and-not COP and-not CM2 calma CV2 61 * layer gv2 CV2 and-not COP and-not CM3 calma CV2 61 * layer m2c CV1 and-not CV2 and-not CCC and-not CCP and-not CCA and-not XP grow 35 and CM2 and CM1 grow 20 shrink 20 calma CV1 50 * layer m1 CM1 and-not CRM and-not CRF and-not XP labels CM1 calma CM1 49 * layer m2 CM2 and-not CRM and-not CRS and-not XP labels CM2 calma CM2 51 * layer m3c CV2 and-not CV1 and-not XP grow 35 and CM3 and CM2 grow 20 shrink 20 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT and-not XP labels CM3 calma CM3 62 * layer pad XP labels pad calma XP 26 * layer glass COG and-not COP and-not XP labels COG calma COG 52 * layer sb CSB and-not CWNR labels CSB calma CSB 29 * layer pres CPG and CSB calma CPG 46 * layer anres CAA and CSN and-not CWNR and-not CTA and CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer apres CAA and CSP and-not CWNR and-not CTA and CSB and-not CPG and CWN and-not CSN and-not CPS and-not CBA calma CAA 43 * layer comment CX labels CX calma CX 63 * calma CTA 60 * style lambda=0.35(ps) scalefactor 35 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer pwell CWP and-not CTA labels CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer nselect CSN calma CSN 45 * layer pselect CSP calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer ndc CAA and CSN and CCA and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 35 calma CCA 48 * layer ndc CAA and CSN and CCC and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 35 calma CCC 25 * layer nsc CAA and CSN and CCA and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 35 calma CCA 48 * layer nsc CAA and CSN and CCC and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 35 calma CCC 25 * layer pdc CAA and CSP and CCA and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 35 calma CCA 48 * layer pdc CAA and CSP and CCC and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 35 calma CCC 25 * layer psc CAA and CSP and CCA and-not CV1 and-not CTA and-not CPS and-not CWN and CM1 grow 35 calma CCA 48 * layer psc CAA and CSP and CCC and-not CV1 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 35 calma CCC 25 * layer ndc CAA and CSN and CCA and CV1 and CV2 and-not CWNR and-not CTA and-not CWN and CM1 grow 35 calma CCA 48 * layer ndc CAA and CSN and CCC and CV1 and CV2 and-not CWNR and-not CTA and-not CWN and CM1 grow 35 calma CCC 25 * layer nsc CAA and CSN and CCA and CV1 and CV2 and-not CWNR and-not CTA and CWN and CM1 grow 35 calma CCA 48 * layer nsc CAA and CSN and CCC and CV1 and CV2 and-not CWNR and-not CTA and CWN and CM1 grow 35 calma CCC 25 * layer pdc CAA and CSP and CCA and CV1 and CV2 and-not CTA and-not CPS and CWN and CM1 grow 35 calma CCA 48 * layer pdc CAA and CSP and CCC and CV1 and CV2 and-not CTA and-not CPS and CWN and CM1 grow 35 calma CCC 25 * layer psc CAA and CSP and CCA and CV1 and CV2 and-not CTA and-not CPS and-not CWN and CM1 grow 35 calma CCA 48 * layer psc CAA and CSP and CCC and CV1 and CV2 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 35 calma CCC 25 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer pc CCP and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 35 and CM1 calma CCP 47 * layer pc CCC and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 35 and CM1 calma CCC 25 * layer pc CCP and CV1 and CV2 and CPG and-not CPC and-not CEL and-not CAA grow 35 and CM1 calma CCP 47 * layer pc CCC and CV1 and CV2 and CPG and-not CPC and-not CEL and-not CAA grow 35 and CM1 calma CCC 25 * layer gc CCP and-not CPG and-not CPC calma CCP 47 * layer gc CCP and-not CM1 calma CCP 47 * layer gc CCA and-not COP and-not CAA and-not CBA calma CCA 48 * layer gc CCA and-not COP and-not CM1 calma CCA 48 * layer gc CCC and-not COP and-not CPG and-not CPC and-not CEL and-not CAA and-not CBA calma CCC 25 * layer gc CCC and-not COP and-not CM1 calma CCC 25 * layer gc CCE and-not CPC and-not CEL calma CCE 55 * layer gc CCE and-not CM1 calma CCE 55 * layer gv1 CV1 and-not COP and-not CM1 calma CV1 50 * layer gv1 CV1 and-not COP and-not CM2 calma CV1 50 * layer gv2 CV2 and-not COP and-not CM2 calma CV2 61 * layer gv2 CV2 and-not COP and-not CM3 calma CV2 61 * layer m2c CV1 and-not CV2 and-not CCC and-not CCP and-not CCA and-not XP grow 35 and CM2 and CM1 grow 20 shrink 20 calma CV1 50 * layer m1 CM1 and-not CRM and-not CRF and-not XP labels CM1 calma CM1 49 * layer m2 CM2 and-not CRM and-not CRS and-not XP labels CM2 calma CM2 51 * layer m3c CV2 and-not CV1 and-not XP grow 35 and CM3 and CM2 grow 20 shrink 20 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT and-not XP labels CM3 calma CM3 62 * layer pad XP labels pad calma XP 26 * layer glass COG and-not COP and-not XP labels COG calma COG 52 * layer sb CSB and-not CWNR labels CSB calma CSB 29 * layer pres CPG and CSB calma CPG 46 * layer anres CAA and CSN and-not CWNR and-not CTA and CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer apres CAA and CSP and-not CWNR and-not CTA and CSB and-not CPG and CWN and-not CSN and-not CPS and-not CBA calma CAA 43 * layer comment CX labels CX calma CX 63 * calma CTA 60 * style lambda=0.35() scalefactor 35 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * ignore CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * calma CSN 45 * calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer ndc CAA and CSN and CCA and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 35 calma CCA 48 * layer ndc CAA and CSN and CCC and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 35 calma CCC 25 * layer nsc CAA and CSN and CCA and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 35 calma CCA 48 * layer nsc CAA and CSN and CCC and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 35 calma CCC 25 * layer pdc CAA and CSP and CCA and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 35 calma CCA 48 * layer pdc CAA and CSP and CCC and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 35 calma CCC 25 * layer psc CAA and CSP and CCA and-not CV1 and-not CTA and-not CPS and-not CWN and CM1 grow 35 calma CCA 48 * layer psc CAA and CSP and CCC and-not CV1 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 35 calma CCC 25 * layer ndc CAA and CSN and CCA and CV1 and CV2 and-not CWNR and-not CTA and-not CWN and CM1 grow 35 calma CCA 48 * layer ndc CAA and CSN and CCC and CV1 and CV2 and-not CWNR and-not CTA and-not CWN and CM1 grow 35 calma CCC 25 * layer nsc CAA and CSN and CCA and CV1 and CV2 and-not CWNR and-not CTA and CWN and CM1 grow 35 calma CCA 48 * layer nsc CAA and CSN and CCC and CV1 and CV2 and-not CWNR and-not CTA and CWN and CM1 grow 35 calma CCC 25 * layer pdc CAA and CSP and CCA and CV1 and CV2 and-not CTA and-not CPS and CWN and CM1 grow 35 calma CCA 48 * layer pdc CAA and CSP and CCC and CV1 and CV2 and-not CTA and-not CPS and CWN and CM1 grow 35 calma CCC 25 * layer psc CAA and CSP and CCA and CV1 and CV2 and-not CTA and-not CPS and-not CWN and CM1 grow 35 calma CCA 48 * layer psc CAA and CSP and CCC and CV1 and CV2 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 35 calma CCC 25 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer pc CCP and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 35 and CM1 calma CCP 47 * layer pc CCC and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 35 and CM1 calma CCC 25 * layer pc CCP and CV1 and CV2 and CPG and-not CPC and-not CEL and-not CAA grow 35 and CM1 calma CCP 47 * layer pc CCC and CV1 and CV2 and CPG and-not CPC and-not CEL and-not CAA grow 35 and CM1 calma CCC 25 * layer gc CCP and-not CPG and-not CPC calma CCP 47 * layer gc CCP and-not CM1 calma CCP 47 * layer gc CCA and-not COP and-not CAA and-not CBA calma CCA 48 * layer gc CCA and-not COP and-not CM1 calma CCA 48 * layer gc CCC and-not COP and-not CPG and-not CPC and-not CEL and-not CAA and-not CBA calma CCC 25 * layer gc CCC and-not COP and-not CM1 calma CCC 25 * layer gc CCE and-not CPC and-not CEL calma CCE 55 * layer gc CCE and-not CM1 calma CCE 55 * layer gv1 CV1 and-not COP and-not CM1 calma CV1 50 * layer gv1 CV1 and-not COP and-not CM2 calma CV1 50 * layer gv2 CV2 and-not COP and-not CM2 calma CV2 61 * layer gv2 CV2 and-not COP and-not CM3 calma CV2 61 * layer m2c CV1 and-not CV2 and-not CCC and-not CCP and-not CCA and-not XP grow 35 and CM2 and CM1 grow 20 shrink 20 calma CV1 50 * layer m1 CM1 and-not CRM and-not CRF and-not XP labels CM1 calma CM1 49 * layer m2 CM2 and-not CRM and-not CRS and-not XP labels CM2 calma CM2 51 * layer m3c CV2 and-not CV1 and-not XP grow 35 and CM3 and CM2 grow 20 shrink 20 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT and-not XP labels CM3 calma CM3 62 * layer pad XP labels pad calma XP 26 * layer glass COG and-not COP and-not XP labels COG calma COG 52 * layer sb CSB and-not CWNR labels CSB calma CSB 29 * layer pres CPG and CSB calma CPG 46 * layer anres CAA and CSN and-not CWNR and-not CTA and CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer apres CAA and CSP and-not CWNR and-not CTA and CSB and-not CPG and CWN and-not CSN and-not CPS and-not CBA calma CAA 43 * layer comment CX labels CX calma CX 63 * calma CTA 60 * style lambda=0.35(c) scalefactor 35 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * ignore CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * calma CSN 45 * calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer gc CCA and CPG and-not CEL calma CCA 48 * layer gc CCP and CPG and-not CEL calma CCP 47 * layer gc CCC and CPG and-not CEL calma CCC 25 * layer gc CCE and CPG and-not CEL calma CCE 55 * layer gc CCA and-not COP and-not CPC and-not CEL calma CCA 48 * layer gc CCP and-not COP and-not CPC and-not CEL calma CCP 47 * layer gc CCC and-not COP and-not CPC and-not CEL calma CCC 25 * layer gc CCE and-not COP and-not CPC and-not CEL calma CCE 55 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer m1 CM1 and-not CRM and-not CRF labels CM1 calma CM1 49 * layer gv1 CV1 calma CV1 50 * layer m2 CM2 and-not CRM and-not CRS labels CM2 calma CM2 51 * layer gv2 CV2 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT labels CM3 calma CM3 62 * layer xp XP calma XP 26 * layer glass COG and-not COP labels COG calma COG 52 * layer sb CSB and-not CWNR labels CSB calma CSB 29 * layer pres CPG and CSB calma CPG 46 * layer anres CAA and CSN and-not CWNR and-not CTA and CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer apres CAA and CSP and-not CWNR and-not CTA and CSB and-not CPG and CWN and-not CSN and-not CPS and-not CBA calma CAA 43 * layer comment CX labels CX calma CX 63 * calma CTA 60 * style lambda=0.35(cs) scalefactor 35 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * ignore CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer nselect CSN calma CSN 45 * layer pselect CSP calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer gc CCA and CPG and-not CEL calma CCA 48 * layer gc CCP and CPG and-not CEL calma CCP 47 * layer gc CCC and CPG and-not CEL calma CCC 25 * layer gc CCE and CPG and-not CEL calma CCE 55 * layer gc CCA and-not COP and-not CPC and-not CEL calma CCA 48 * layer gc CCP and-not COP and-not CPC and-not CEL calma CCP 47 * layer gc CCC and-not COP and-not CPC and-not CEL calma CCC 25 * layer gc CCE and-not COP and-not CPC and-not CEL calma CCE 55 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer m1 CM1 and-not CRM and-not CRF labels CM1 calma CM1 49 * layer gv1 CV1 calma CV1 50 * layer m2 CM2 and-not CRM and-not CRS labels CM2 calma CM2 51 * layer gv2 CV2 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT labels CM3 calma CM3 62 * layer xp XP calma XP 26 * layer glass COG and-not COP labels COG calma COG 52 * layer sb CSB and-not CWNR labels CSB calma CSB 29 * layer pres CPG and CSB calma CPG 46 * layer anres CAA and CSN and-not CWNR and-not CTA and CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer apres CAA and CSP and-not CWNR and-not CTA and CSB and-not CPG and CWN and-not CSN and-not CPS and-not CBA calma CAA 43 * layer comment CX labels CX calma CX 63 * calma CTA 60 * style lambda=0.35(cps) scalefactor 35 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer pwell CWP and-not CTA labels CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer nselect CSN calma CSN 45 * layer pselect CSP calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer gc CCA and CPG and-not CEL calma CCA 48 * layer gc CCP and CPG and-not CEL calma CCP 47 * layer gc CCC and CPG and-not CEL calma CCC 25 * layer gc CCE and CPG and-not CEL calma CCE 55 * layer gc CCA and-not COP and-not CPC and-not CEL calma CCA 48 * layer gc CCP and-not COP and-not CPC and-not CEL calma CCP 47 * layer gc CCC and-not COP and-not CPC and-not CEL calma CCC 25 * layer gc CCE and-not COP and-not CPC and-not CEL calma CCE 55 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer m1 CM1 and-not CRM and-not CRF labels CM1 calma CM1 49 * layer gv1 CV1 calma CV1 50 * layer m2 CM2 and-not CRM and-not CRS labels CM2 calma CM2 51 * layer gv2 CV2 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT labels CM3 calma CM3 62 * layer xp XP calma XP 26 * layer glass COG and-not COP labels COG calma COG 52 * layer sb CSB and-not CWNR labels CSB calma CSB 29 * layer pres CPG and CSB calma CPG 46 * layer anres CAA and CSN and-not CWNR and-not CTA and CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer apres CAA and CSP and-not CWNR and-not CTA and CSB and-not CPG and CWN and-not CSN and-not CPS and-not CBA calma CAA 43 * layer comment CX labels CX calma CX 63 * calma CTA 60 * style lambda=0.35(cp) scalefactor 35 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer pwell CWP and-not CTA labels CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * calma CSN 45 * calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer gc CCA and CPG and-not CEL calma CCA 48 * layer gc CCP and CPG and-not CEL calma CCP 47 * layer gc CCC and CPG and-not CEL calma CCC 25 * layer gc CCE and CPG and-not CEL calma CCE 55 * layer gc CCA and-not COP and-not CPC and-not CEL calma CCA 48 * layer gc CCP and-not COP and-not CPC and-not CEL calma CCP 47 * layer gc CCC and-not COP and-not CPC and-not CEL calma CCC 25 * layer gc CCE and-not COP and-not CPC and-not CEL calma CCE 55 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer m1 CM1 and-not CRM and-not CRF labels CM1 calma CM1 49 * layer gv1 CV1 calma CV1 50 * layer m2 CM2 and-not CRM and-not CRS labels CM2 calma CM2 51 * layer gv2 CV2 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT labels CM3 calma CM3 62 * layer xp XP calma XP 26 * layer glass COG and-not COP labels COG calma COG 52 * layer sb CSB and-not CWNR labels CSB calma CSB 29 * layer pres CPG and CSB calma CPG 46 * layer anres CAA and CSN and-not CWNR and-not CTA and CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer apres CAA and CSP and-not CWNR and-not CTA and CSB and-not CPG and CWN and-not CSN and-not CPS and-not CBA calma CAA 43 * layer comment CX labels CX calma CX 63 * calma CTA 60 * end mzrouter style irouter # layer hCost vCost jogCost hintCost layer metal3 1 2 2 1 layer metal2 2 1 2 1 layer metal1 2 3 2 1 layer poly 10 10 11 1 contact m3contact metal3 metal2 5 contact m2contact metal2 metal1 6 contact pcontact metal1 poly 7 notactive poly pcontact style garouter layer m2 32 64 256 1 layer m1 64 32 256 1 contact m2contact metal1 metal2 1024 end drc width nwell 10 \ "N-well width < 10 (Mosis #1.1)" width pwell 10 \ "P-well width < 10 (Mosis #1.1)" width diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a 3 \ "Diffusion width < 3 (Mosis #2.1)" width poly,pres,pc/a,nfet,pfet,fet 2 \ "Poly width < 2 (Mosis #3.1)" width nselect 2 \ "N-Select width < 2 (Mosis #4.4)" width pselect 2 \ "P-Select width < 2 (Mosis #4.4)" width pc/m1 4 \ "Poly contact width < 4 (Mosis #5.1)" width gc 2 \ "GC contact width < 2 (Mosis #6.1)" width ndc/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width nsc/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width pdc/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width psc/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 3 \ "Metal1 width < 3 (Mosis #7.1)" maxwidth m1t 4 bend_ok \ "Max Metal1tight width > 4 (Mosis #7.2)" width gv1 2 \ "GV1 via width < 2 (Mosis #8.1)" width m2c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width m2,m2t,m2c/m2,m3c/m2 3 \ "Metal2 width < 3 (Mosis #9.1)" maxwidth m2t 4 bend_ok \ "Max Metal2tight width > 4 (Mosis #9.2)" width gv2 2 \ "GV2 via width < 2 (Mosis #14.1)" width m3c/m2 4 \ "Metal3 contact width < 4 (Mosis #14.1)" width m3,m3c/m3,pad 6 \ "Metal3 width < 6 (Mosis #15.1)" width sb,pres,anres,apres 4 \ "Silicide-Block width < 4 (Mosis #20.1)" width pres 5 \ "Silicide-Block polyR width < 5 (Mosis #20.6)" width anres,apres 6 \ "Silicide-Block activeR width < 6 (Mosis #20.16)" spacing nwell nwell 6 touching_ok \ "N-well(at-same-potential) spacing < 6 (Mosis #1.3)" spacing pwell pwell 6 touching_ok \ "P-well(at-same-potential) spacing < 6 (Mosis #1.3)" spacing diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a 3 touching_ok \ "Diffusion spacing < 3 (Mosis #2.2)" spacing nwell ndiff,anres,nfet,ndc/a 5 touching_illegal \ "N-well spacing to N-Diffusion < 5 (Mosis #2.3)" spacing pwell pdiff,apres,pfet,pdc/a 5 touching_illegal \ "P-well spacing to P-Diffusion < 5 (Mosis #2.3)" spacing ndiff,anres,nfet,ndc/a pdiff,apres,pfet,pdc/a 10 touching_illegal \ "N-Diffusion spacing to P-Diffusion < 10 (Mosis #2.3+2.3)" edge4way ~(nwell)/well nwell 5 ~(pdiff,apres,pfet,pdc/a)/active nwell 5 \ "N-well overlap of P-Diffusion < 5 (Mosis #2.4)" active edge4way ~(pwell)/well pwell 5 ~(ndiff,anres,nfet,ndc/a)/active pwell 5 \ "P-well overlap of N-Diffusion < 5 (Mosis #2.4)" active edge4way ~(nwell)/well nwell 3 ~(nsd,nsc/a)/active nwell 3 \ "N-well overlap of N-Ohmic < 3 (Mosis #2.4)" active edge4way ~(pwell)/well pwell 3 ~(psd,psc/a)/active pwell 3 \ "P-well overlap of P-Ohmic < 3 (Mosis #2.4)" active spacing ndiff,anres,ndc/a nsd,nsc/a 8 touching_illegal \ "N-Diffusion spacing to N-Ohmic < 8 (Mosis #2.3+2.4)" spacing pdiff,apres,pdc/a psd,psc/a 8 touching_illegal \ "P-Diffusion spacing to P-Ohmic < 8 (Mosis #2.3+2.4)" spacing nwell psd,psc/a 3 touching_illegal \ "N-well spacing to P-Ohmic < 3 (Mosis #2.4)" spacing pwell nsd,nsc/a 3 touching_illegal \ "P-well spacing to N-Ohmic < 3 (Mosis #2.4)" spacing nsd,nsc/a psd,psc/a 6 touching_illegal \ "N-Ohmic spacing to P-Ohmic < 6 (Mosis #2.4+2.4)" spacing ndiff,anres,nfet,ndc/a,nfet psd,psc/a 4 touching_ok \ "N-Diffusion spacing to P-Ohmic < 4 (Mosis #2.5)" spacing pdiff,apres,pfet,pdc/a,pfet nsd,nsc/a 4 touching_ok \ "P-Diffusion spacing to N-Ohmic < 4 (Mosis #2.5)" spacing poly,pres,pc/a,nfet,pfet,fet poly,pres,pc/a,nfet,pfet,fet 2 touching_ok \ "Poly spacing < 2 (Mosis #3.2)" edge4way nfet,pfet,fet space/active,poly,pres,pc/a 2 poly,pres,pc/a 0 0 \ "Poly overhang of Transistor < 2 (Mosis #3.3)" active edge4way nfet,pfet,fet space/active,ndiff,anres,ndc/a,pdiff,apres,pdc/a 3 ndiff,anres,ndc/a,pdiff,apres,pdc/a,nfet,pfet,fet 0 0 \ "N-Diffusion,P-Diffusion overhang of Transistor < 3 (Mosis #3.4)" active edge4way poly,pc/a ~(poly,pres,pc/a,nfet,pfet,fet)/active 1 space space 1 \ "Poly spacing to Diffusion < 1 (Mosis #3.5)" edge4way nfet ~(nfet)/active 3 ~(pselect)/select ~(nfet)/active 3 \ "N-Transistor space to P-Select < 3 (Mosis #4.1)" select edge4way pfet ~(pfet)/active 3 ~(nselect)/select ~(pfet)/active 3 \ "P-Transistor space to N-Select < 3 (Mosis #4.1)" select edge4way nfet ~(nfet)/active 3 ~(psd,psc/a)/active ~(nfet)/active 2 \ "N-Transistor space to P-Ohmic < 3 (Mosis #4.1)" active edge4way pfet ~(pfet)/active 3 ~(nsd,nsc/a)/active ~(pfet)/active 2 \ "P-Transistor space to N-Ohmic < 3 (Mosis #4.1)" active #PEZ edge4way psd,psc/a space ~(nfet)/active space \ #PEZ "P-Ohmic space to N-Transistor < (Mosis #4.1)" active #PEZ edge4way nsd,nsc/a space ~(pfet)/active space \ #PEZ "N-Ohmic space to P-Transistor < (Mosis #4.1)" active edge4way ~(nselect,pselect)/select nselect,pselect 2 ~(diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a)/active nselect,pselect 2 \ "N-Select,P-Select overlap of Diffusion < 2 (Mosis #4.2_)" active edge4way space nselect,pselect 2 ~(ndiff,anres,nfet,ndc/a)/active nselect 2 \ "N-Select space to N-Diffusion < 2 (Mosis #4.2a)" active edge4way nselect,pselect space 2 ~(ndiff,anres,nfet,ndc/a)/active nselect 2 \ "N-Select space to N-Diffusion < 2 (Mosis #4.2b)" active edge4way nselect,pselect space 2 ~(ndiff,anres,nfet,ndc/a)/active space,nselect,pselect 2 \ "N-Select space to N-Diffusion < 2 (Mosis #4.2c)" active edge4way space nselect,pselect 2 ~(pdiff,apres,pfet,pdc/a)/active pselect 2 \ "P-Select space to P-Diffusion < 2 (Mosis #4.2aa)" active edge4way nselect,pselect space 2 ~(pdiff,apres,pfet,pdc/a)/active pselect 2 \ "P-Select space to P-Diffusion < 2 (Mosis #4.2bb)" active edge4way nselect,pselect space 2 ~(pdiff,apres,pfet,pdc/a)/active space,nselect,pselect 2 \ "P-Select space to P-Diffusion < 2 (Mosis #4.2cc)" active area nsd,psd,nsc/a,psc/a 16 3 \ "Ohmic-Diffusion area < 16 (Mosis #+++)" edge4way diff space 2 nselect space 2 \ "N-Select must overlap Diffusion by 2 (Mosis #4.2)" select edge4way diff space 2 pselect space 2 \ "P-Select must overlap Diffusion by 2 (Mosis #4.2)" select edge4way ndiff,anres,nfet,ndc/a space 2 ~(pselect)/select space 2 \ "P-Select space to N-Diffusion < 2 (Mosis #4.2e)" select edge4way pdiff,apres,pfet,pdc/a space 2 ~(nselect)/select space 2 \ "N-Select space to P-Diffusion < 2 (Mosis #4.2e)" select edge4way ~(pdiff,apres,pfet,pdc/a,psd,psc/a)/active pdiff,apres,pfet,pdc/a,psd,psc/a 1 ~(nselect)/select 0 0 \ "N-Select cannot touch P-Diffusion,P-Ohmic (Mosis #4.2f)" select edge4way ~(ndiff,anres,nfet,ndc/a,nsd,nsc/a)/active ndiff,anres,nfet,ndc/a,nsd,nsc/a 1 ~(pselect)/select 0 0 \ "P-Select cannot touch N-Diffusion,N-Ohmic (Mosis #4.2f)" select spacing nselect nselect 2 touching_ok \ "N-Select spacing < 2 (Mosis #4.4)" spacing pselect pselect 2 touching_ok \ "P-Select spacing < 2 (Mosis #4.4)" edge4way ndiff,anres,ndc/a psd,psc/a 2 ~(ndiff,anres,ndc/a)/active 0 0 \ "P-Ohmic(that touches N-Diffusion) width < 2 (Mosis #4.4)" edge4way pdiff,apres,pdc/a nsd,nsc/a 2 ~(pdiff,apres,pdc/a)/active 0 0 \ "N-Ohmic(that touches P-Diffusion) width < 2 (Mosis #4.4)" edge4way gc ~(gc)/contact 1 poly,pres,pc/a,diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a ~(gc)/contact 1 \ "Poly,Diffusion overlap of GC contact < 1 (Mosis #5.2)" active edge4way gc space 1 poly,pres,pc/a,diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a space 1 \ "one of: Poly,Diffusion must overlap GC contact by 1 (Mosis #5.2a,6.2a)" active edge4way ~(poly,pres,pc/a,diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a)/active poly,pres,pc/a,diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a 1 ~(gc)/contact 0 0 \ "Edge to one of: Poly,Diffusion cannot touch GC contact (Mosis #5.2a,6.2a)" contact spacing gc gc 2 touching_ok \ "Generic contact spacing < 2 (Mosis #5.3)" edge4way ~(gc)/contact gc 1 ~(ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1)/metal1 0 0 \ "GC contact cannot touch Metal1 contacts (Mosis #0)" metal1 spacing gv1 m2c/m2 2 touching_illegal \ "GV1 via spacing to Metal2 contacts < 2 (Mosis #14.2)" spacing poly,pres,pc/a pc/a 3 touching_ok \ "Poly spacing to Poly contact < 3 (Mosis #5.4b)" edge4way gc ~(gc)/contact 1 diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a,poly,pres,pc/a ~(gc)/contact 1 \ "Diffusion,Poly overlap of GC contact < 1 (Mosis #6.2)" active spacing gc pc/a,ndc/a,pdc/a,psc/a,nsc/a 1 touching_illegal \ "Generic contact spacing to Poly contact,Diffusion contact < 1 (Mosis #5.3)" spacing nfet,pfet ndc/a,pdc/a,psc/a,nsc/a 1 touching_illegal \ "N-Transistor,P-Transistor spacing to Diffusion contact < 1 (Mosis #6.4)" spacing nfet,pfet gc 2 touching_illegal \ "N-Transistor,P-Transistor spacing to Generic contact < 2 (Mosis #6.4)" spacing diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a pc/a 1 touching_illegal \ "Diffusion spacing to Poly contact < 1 (Mosis #6.5.b)" spacing diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a,nfet,pfet ndc/a,pdc/a,psc/a,nsc/a 4 touching_ok \ "Diffusion spacing to Diffusion contact < 4 (Mosis #6.5.b)" spacing pc/a ndc/a,pdc/a,psc/a,nsc/a 2 touching_illegal \ "pc/a spacing to ndc/a,pdc/a,psc/a,nsc/a < 2 (Mosis #6.7)" spacing m1,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 m1,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 3 touching_ok \ "Metal1 spacing < 3 (Mosis #7.2)" spacing m1t m1t 2 touching_ok \ "Metal1tight spacing < 2 (Mosis #7.2.b)" spacing m1t m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 2 touching_ok \ "Metal1tight spacing to Metal1 < 2 (Mosis #7.2.b)" edge4way gc space 1 m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 space 1 \ "Metal1 must overlap GC contact by 1 (Mosis #7.3,7.4)" metal1 edge4way ~(m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1)/metal1 m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 1 ~(gc)/contact 0 0 \ "Metal1(edge) cannot touch GC contact (Mosis #7.3+7.4)" contact spacing gv1 gv1 3 touching_ok \ "GV1 via spacing < 3 (Mosis #8.2)" edge4way gv1 ~(gv1)/via1 1 m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 ~(gv1)/via1 1 \ "Metal1 overlap of GV1 via < 1 (Mosis #8.3)" metal1 edge4way gv1 space 1 m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 space 1 \ "Metal1 must overlap GV1 via by 1 (Mosis #8.3)" metal1 edge4way ~(m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1)/metal1 m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 1 ~(gv1)/via1 0 0 \ "Metal1(edge) cannot touch GV1 via (Mosis #8.3)" via1 spacing gc gv1 2 touching_illegal \ "GC contact spacing to GV1 via < 2 (Mosis #8.4)" spacing gc m2c/m2 1 touching_illegal \ " spacing to Metal2 contacts < 1 (Mosis #14.2)" spacing gc m2c/m2 1 touching_illegal \ "GC contact spacing to Metal2 contacts < 1 (Mosis #8.4)" spacing m2,m2c/m2,m3c/m2 m2,m2c/m2,m3c/m2 4 touching_ok \ "Metal2 spacing < 4 (Mosis #9.2)" spacing m2t m2t 3 touching_ok \ "Metal2tight spacing < 3 (Mosis #9.2.b)" spacing m2t m2,m2t,m2c/m2,m3c/m2 3 touching_ok \ "Metal2tight spacing to Metal2 < 3 (Mosis #9.2.b)" edge4way gv1 space 1 m2,m2t,m2c/m2,m3c/m2 space 1 \ "Metal2 must overlap GV1 via by 1 (Mosis #9.3)" metal2 edge4way ~(m2,m2t,m2c/m2,m3c/m2)/metal2 m2,m2t,m2c/m2,m3c/m2 1 ~(gv1)/via1 0 0 \ "Metal2(edge) cannot touch GV1 via (Mosis #9.3)" via1 width glass 10 \ "COG width < 10 (Mosis #10.2)" edge4way ~(pad)/metal3 pad 17 ~(glass)/oxide pad 17 \ "pad overlap of COG < 17 (Mosis #10.3)" oxide spacing gv2 gv2 3 touching_ok \ "GV2 via spacing < 3 (Mosis #14.2)" spacing gv2 m3c/m2 2 touching_illegal \ "GV2 via spacing to Metal3 contact < 2 (Mosis #14.2)" edge4way gv2 space 1 m2,m2t,m2c/m2,m3c/m2 space 1 \ "Metal2 must overlap GV2 via by 1 (Mosis #14.3)" metal2 edge4way ~(m2,m2t,m2c/m2,m3c/m2)/metal2 m2,m2t,m2c/m2,m3c/m2 1 ~(gv2)/via2 0 0 \ "Metal2(edge) cannot touch GV2 via (Mosis #14.3)" via2 spacing gv1 gv2 2 touching_illegal \ "GV1 via spacing to GV2 via < 2 (Mosis #14.4)" spacing gv1 m3c/m2 1 touching_illegal \ "GV1 via spacing to Metal3 contact < 1 (Mosis #14.4)" spacing m3,m3c/m3,pad m3,m3c/m3,pad 4 touching_ok \ "Metal3 spacing < 4 (Mosis #15.2)" edge4way m3c/m2 ~(m3c/m2)/metal2 1 m3,m3c/m3,pad ~(m3c/m2)/metal2 1 \ "Metal3 overlap of Metal3 contact < 1 (Mosis #15.3)" metal3 edge4way gv2 space 2 m3,m3c/m3,pad space 2 \ "Metal3 must overlap GV2 via by 2 (Mosis #15.3)" metal3 edge4way ~(m3,m3c/m3,pad)/metal3 m3,m3c/m3,pad 1 ~(gv2)/via2 0 0 \ "Metal3(edge) cannot touch GV2 via (Mosis #15.3)" via2 spacing sb,pres,anres,apres sb,pres,anres,apres 4 touching_ok \ "Silicide-Block spacing < 4 (Mosis #20.2)" spacing sb,pres,anres,apres,pres,anres,apres pc/a,ndc/a,pdc/a,psc/a,nsc/a 1 touching_illegal \ "Silicide-Block spacing to Diffusion contact,Poly contact < 1 (Mosis #20.3)" spacing sb,pres,anres,apres,pres,anres,apres gc 2 touching_illegal \ "Silicide-Block spacing to GC contact < 2 (Mosis #20.3)" edge4way sb,pres,anres,apres space 2 ~(diff,ndiff,anres,nfet,nsd,pdiff,apres,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a)/active 0 2 \ "Silicide-Block space to Diffusion < 2 (Mosis #20.4)" active spacing sb,pres,anres,apres,pres poly,pres,pc/a 2 touching_ok \ "Silicide-Block spacing to other Poly < 2 (Mosis #20.5)" edge4way sb,pres,anres,apres space 2 ~(poly,pres,pc/a)/contact sb,pres,anres,apres 2 \ "Silicide-Block space to Poly < 2 (Mosis #20.5x)" contact spacing nwell pres 4 touching_illegal \ "N-well spacing to Silicide-Block polyR < 4 (Mosis #20.11)" spacing pres pres 7 touching_ok \ "Silicide-Block polyR spacing < 7 (Mosis #20.13)" edge4way pres,anres,apres space/active,sb 2 sb sb 2 \ "Silicide-Block overlap of Silicide-Block polyR/activeR < 2 (Mosis #20.15)" edge4way sb,pres,anres,apres diff,ndiff,nfet,nsd,pdiff,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a 3 diff,ndiff,nfet,nsd,pdiff,pfet,psd,ndc/a,nsc/a,pdc/a,psc/a 0 0 \ "Diffusion overhang of Silicide-Block < 3 (Mosis #20.17) edge4way ndc/a,nsc/a ~(ndc/a,nsc/a)/active 1 ~(ndc/a,nsc/a)/active (~(ndc/a,nsc/a),ndc/a,nsc/a)/active 1 \ "Contact not rectangular (Magic rule)" edge4way pdc/a,psc/a ~(pdc/a,psc/a)/active 1 ~(pdc/a,psc/a)/active (~(pdc/a,psc/a),pdc/a,psc/a)/active 1 \ "Contact not rectangular (Magic rule)" edge4way pc/a ~(pc/a)/active 1 ~(pc/a)/active (~(pc/a),pc/a)/active 1 \ "Contact not rectangular (Magic rule)" edge4way gc ~(gc)/contact 1 ~(gc)/contact (~(gc),gc)/contact 1 \ "Contact not rectangular (Magic rule)" edge4way gv1 ~(gv1)/via1 1 ~(gv1)/via1 (~(gv1),gv1)/via1 1 \ "Contact not rectangular (Magic rule)" edge4way m2c/m1 ~(m2c/m1)/metal1 1 ~(m2c/m1)/metal1 (~(m2c/m1),m2c/m1)/metal1 1 \ "Contact not rectangular (Magic rule)" edge4way gv2 ~(gv2)/via2 1 ~(gv2)/via2 (~(gv2),gv2)/via2 1 \ "Contact not rectangular (Magic rule)" edge4way m3c/m2 ~(m3c/m2)/metal2 1 ~(m3c/m2)/metal2 (~(m3c/m2),m3c/m2)/metal2 1 \ "Contact not rectangular (Magic rule)" exact_overlap gc,ndc/a,pdc/a,psc/a,nsc/a,gc,pc/a,gc edge4way pad ~(pad)/m3 1 ~(pad)/m3 (~(pad),pad)/m3 1 \ "Contact not rectangular (Magic rule)" exact_overlap ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1 exact_overlap m2c/m2 exact_overlap m3c/m3 exact_overlap gv1 exact_overlap gv2 # edge4way nfet,pfet,fet ~(nfet,pfet,fet)/active 1 ~(nfet,pfet,fet)/active nfet,pfet,fet 1 \ # "Transistor cannot bend in this process (Mosis #?.?)" #CC cifstyle lambda=0.35(p) #CC cifwidth CWN 350 \ #CC "generated CIF layer CWN width will be < 10 (';cif see CWN')" #CC cifspacing CWN CWN 210 touching_ok \ #CC "generated CIF layer CWN spacing will be < 6 (';cif see CWN')" #CC cifwidth CWP 350 \ #CC "generated CIF layer CWP width will be < 10 (';cif see CWP')" #CC cifspacing CWP CWP 210 touching_ok \ #CC "generated CIF layer CWP spacing will be < 6 (';cif see CWP')" #CC cifwidth CSN 70 \ #CC "generated CIF layer CSN width will be < 2 (';cif see CSN')" #CC cifspacing CSN CSN 70 touching_ok \ #CC "generated CIF layer CSN spacing will be < 2 (';cif see CSN')" #CC cifwidth CSP 70 \ #CC "generated CIF layer CSP width will be < 2 (';cif see CSP')" #CC cifspacing CSP CSP 70 touching_ok \ #CC "generated CIF layer CSP spacing will be < 2 (';cif see CSP')" stepsize 400 end extract style HP0.5um(hpcmos14tb)from:T11E cscale 1 lambda 35 step 100 sidehalo 8 planeorder well 0 planeorder select 1 planeorder active 2 planeorder metal1 3 planeorder metal2 4 planeorder metal3 5 planeorder oxide 6 planeorder xp 7 planeorder comment 8 planeorder contact 9 planeorder via1 10 planeorder via2 11 resist (ndiff,anres,ndc,nsd,nsc)/active 2800 resist (pdiff,apres,pdc,psd,psc)/active 2400 resist (nwell)/well 725000 resist (pwell)/well 1 resist (poly,pc,pc,nfet,pfet,fet)/active 2500 resist (pres)/active 2500 resist (m1,m1t,ndc,nsc,pdc,psc,pc,m2c,m2c)/metal1 70 resist (m2,m2t,m2c,m3c,m3c)/metal2 70 resist (m3,m3c,pad)/metal3 50 contact ndc 4 2000 contact pdc 4 1900 contact pc 4 1700 contact m2c 4 600 contact m3c 4 630 #nwell,cwell,pwell areacap (nwell)/well 10.780 #ndiff # MODEL HANDLES THIS: areacap (ndiff,ndc)/active 58.187 # MODEL HANDLES THIS: overlap (ndiff,ndc)/active ~space/w 58.187 # MODEL HANDLES THIS: perimc (ndiff,ndc)/active ~(ndiff,ndc,nfet,pfet,fet)/active 106.400 # MODEL HANDLES THIS: sideoverlap (ndiff,ndc)/active ~(ndiff,ndc,nfet,pfet,fet)/active ~space/w 106.400 #pdiff #poly sidewall (poly,pres,pc)/active ~(poly,pres,pc)/active ~(poly,pres,pc)/active (poly,pres,pc)/active 11.830 areacap (poly,pres,pc)/active 12.475 overlap (poly,pres,pc)/active ~space/w 12.475 perimc (poly,pres,pc)/active ~(poly,pres,pc)/active 11.203 sideoverlap (poly,pres,pc)/active ~(poly,pres,pc)/active ~space/w 11.203 #poly2 #metal1 sidewall (m1,m1t,ndc,pdc,pc,m2c)/metal1 ~(m1,m1t,ndc,pdc,pc,m2c)/metal1 ~(m1,m1t,ndc,pdc,pc,m2c)/metal1 (m1,m1t,ndc,pdc,pc,m2c)/metal1 22.380 areacap (m1,m1t,ndc,pdc,pc,m2c)/metal1 5.103 #metal1-sub blocked by ~space/a overlap (m1,m1t,ndc,pdc,pc,m2c)/metal1 ~space/w 5.103 ~space/a perimc (m1,m1t,ndc,pdc,pc,m2c)/metal1 ~(m1,m1t,ndc,pdc,pc,m2c)/metal1 5.999 sideoverlap (m1,m1t,ndc,pdc,pc,m2c)/metal1 ~(m1,m1t,ndc,pdc,pc,m2c)/metal1 ~space/w 5.999 ~space/a #metal1-diff blocked by overlap (m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 (ndiff,anres,ndc)/active 5.103 sideoverlap (m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 ~(m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 (ndiff,anres,ndc)/active 5.999 overlap (m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 (pdiff,apres,pdc)/active 5.103 sideoverlap (m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 ~(m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 (pdiff,apres,pdc)/active 5.999 #metal1-poly blocked by overlap (m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 (poly,pres,pc,nfet,pfet,fet)/active 5.166 sideoverlap (m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 ~(m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 (poly,pres,pc,nfet,pfet,fet)/active 6.058 sideoverlap (poly,pres,pc,nfet,pfet,fet)/active ~(poly,pres,pc,nfet,pfet,fet)/active (m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 6.058 #metal2 sidewall (m2,m2t,m2c,m3c)/metal2 ~(m2,m2t,m2c,m3c)/metal2 ~(m2,m2t,m2c,m3c)/metal2 (m2,m2t,m2c,m3c)/metal2 27.395 areacap (m2,m2t,m3c)/metal2 1.779 #metal2-sub blocked by overlap (m2,m2t,m3c)/metal2 ~space/w 1.779 ~space/a,~space/m1 perimc (m2,m2t,m2c,m3c)/metal2 ~(m2,m2t,m2c,m3c)/metal2 2.373 sideoverlap (m2,m2t,m2c,m3c)/metal2 ~(m2,m2t,m2c,m3c)/metal2 ~space/w 2.373 ~space/a,~space/m1 #metal2-*diff blocked by ~space/m1 overlap (m2,m2t,m3c)/metal2 (ndiff,anres,ndc)/active 1.779 ~space/m1 sideoverlap (m2,m2t,m2c,m3c)/metal2 ~(m2,m2t,m2c,m3c)/metal2 (ndiff,anres,ndc)/active 2.373 ~space/m1 overlap (m2,m2t,m2c,m3c)/metal2 (pdiff,apres,pdc)/active 1.779 ~space/m1 sideoverlap (m2,m2t,m2c,m3c)/metal2 ~(m2,m2t,m2c,m3c)/metal2 (pdiff,apres,pdc)/active 2.373 ~space/m1 #metal2-poly blocked by ~space/m1 overlap (m2,m2t,m3c)/metal2 (poly,pres,pc,nfet,pfet,fet)/active 1.786 ~space/m1 sideoverlap (m2,m2t,m2c,m3c)/metal2 ~(m2,m2t,m2c,m3c)/metal2 (poly,pres,pc,nfet,pfet,fet)/active 2.383 ~space/m1 sideoverlap (poly,pres,pc,nfet,pfet,fet)/active ~(poly,pres,pc,nfet,pfet,fet)/active (m2,m2t,m2c,m3c)/metal2 2.383 ~space/m1 #M2->M1 overlap (m2,m2t,m3c)/metal2 (m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 5.648 sideoverlap (m2,m2t,m2c,m3c)/metal2 ~(m2,m2t,m2c,m3c)/metal2 (m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 6.503 sideoverlap (m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 ~(m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 (m2,m2t,m2c,m3c)/metal2 6.503 #metal3 sidewall (m3,m3c,pad)/metal3 ~(m3,m3c,pad)/metal3 ~(m3,m3c,pad)/metal3 (m3,m3c,pad)/metal3 29.010 areacap (m3,pad)/metal3 1.077 #metal3-sub blocked by ~space/a,~space/m1,~space/m2 overlap (m3,pad)/metal3 ~space/w 1.077 ~space/a,~space/m1,~space/m2 perimc (m3,m3c,pad)/metal3 ~(m3,m3c,pad)/metal3 1.477 sideoverlap (m3,m3c,pad)/metal3 ~(m3,m3c,pad)/metal3 ~space/w 1.477 ~space/a,~space/m1,~space/m2 #metal3-*diff blocked by ~space/m1,~space/m2 overlap (m3,pad)/metal3 (ndiff,anres,ndc)/active 1.077 ~space/m1,~space/m2 sideoverlap (m3,m3c,pad)/metal3 ~(m3,m3c,pad)/metal3 (ndiff,anres,ndc)/active 1.477 ~space/m1,~space/m2 overlap (m3,pad)/metal3 (pdiff,apres,pdc)/active 1.077 ~space/m1,~space/m2 sideoverlap (m3,m3c,pad)/metal3 ~(m3,m3c,pad)/metal3 (pdiff,apres,pdc)/active 1.477 ~space/m1,~space/m2 #metal3-poly blocked by ~space/m1,~space/m2 overlap (m3,pad)/metal3 (poly,pres,pc,nfet,pfet,fet)/active 1.079 ~space/m1,~space/m2 sideoverlap (m3,m3c,pad)/metal3 ~(m3,m3c,pad)/metal3 (poly,pres,pc,nfet,pfet,fet)/active 1.481 ~space/m1,~space/m2 sideoverlap (poly,pres,pc,nfet,pfet,fet)/active ~(poly,pres,pc,nfet,pfet,fet)/active (m3,m3c,pad)/metal3 1.481 ~space/m1,~space/m2 #M3->M1 overlap (m3,pad)/metal3 (m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 1.840 ~space/m2 #metal3-metal1 blocked by ~space/m2 sideoverlap (m3,m3c,pad)/metal3 ~(m3,m3c,pad)/metal3 (m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 2.446 ~space/m2 sideoverlap (m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 ~(m1,m1t,ndc,nsc,pdc,psc,pc,m2c)/metal1 (m3,m3c,pad)/metal3 2.446 ~space/m2 #M3->M2 overlap (m3,pad)/metal3 (m2,m2t,m2c,m3c)/metal2 5.647 sideoverlap (m3,m3c,pad)/metal3 ~(m3,m3c,pad)/metal3 (m2,m2t,m2c,m3c)/metal2 6.489 sideoverlap (m2,m2t,m2c,m3c)/metal2 ~(m2,m2t,m2c,m3c)/metal2 (m3,m3c,pad)/metal3 6.489 #metal4 #metal5 #metal6 #metal7 #metali #fets fet pfet pdiff,pdc 2 pfet Vdd! nwell 92 425 fet pfet pdiff,pdc 1 pfet Vdd! nwell 92 425 fet nfet ndiff,ndc 2 nfet Gnd! pwell 101 444 fet nfet ndiff,ndc 1 nfet Gnd! pwell 101 444 fetresis pfet linear 15569 fetresis pfet saturation 15569 fetresis nfet linear 4785 fetresis nfet saturation 4785 fet pres poly,pc 2 presResistor Gnd! nwell,pwell 0 0 fet anres ndiff,ndc 2 anresResistor Gnd! nwell,pwell 0 0 fet apres pdiff,pdc 2 apresResistor Gnd! nwell,pwell 0 0 end wiring contact pdcontact 4 metal1 0 pdiff 0 contact ndcontact 4 metal1 0 ndiff 0 contact pcontact 4 metal1 0 poly 0 contact m2contact 4 metal1 0 metal2 0 contact m3contact 5 metal2 0 metal3 1 end router layer2 metal2 3 m2,m2t,m2c/m2,m3c/m2,m3c/m2 4 poly,pres,ndiff,anres,nsd,pdiff,apres,psd,m1,m1t 1 layer1 metal1 3 m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 3 contacts m2contact 4 gridspacing 8 end plowing fixed nfet,pfet,glass,pad covered nfet,pfet drag nfet,pfet end plot style colorversatec ndiff,anres,ndc/a yellow \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA ndiff,anres,ndc/a cyan \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 nsd,nsc/a yellow \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 nsd,nsc/a cyan \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 pdiff,apres,pdc/a yellow \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA pdiff,apres,pdc/a cyan \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 pdiff,apres,pdc/a magenta \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 psd,psc/a yellow \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 psd,psc/a cyan \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 psd,psc/a magenta \ 2A2A 0000 A2A2 0000 \ 2A2A 0000 A2A2 0000 \ 2A2A 0000 A2A2 0000 \ 2A2A 0000 A2A2 0000 poly,pres,pc/a magenta \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA nfet yellow \ 0505 8282 1414 0A0A \ 5050 2828 4141 A0A0 \ 0505 8282 1414 0A0A \ 5050 2828 4141 A0A0 nfet cyan \ 0000 0505 0000 1414 \ 0000 5050 0000 4141 \ 0000 0505 0000 1414 \ 0000 5050 0000 4141 nfet magenta \ 5050 2828 4141 A0A0 \ 0505 8282 1414 0A0A \ 5050 2828 4141 A0A0 \ 0505 8282 1414 0A0A pfet yellow \ 6363 A0A0 5050 2828 \ 3636 0A0A 0505 8282 \ 6363 A0A0 5050 2828 \ 3636 0A0A 0505 8282 pfet cyan \ 0000 5151 0000 5454 \ 0000 1515 0000 1515 \ 0000 5151 0000 5454 \ 0000 1515 0000 1515 pfet magenta \ 9494 0A0A 2525 8282 \ 4949 A0A0 5252 2828 \ 9494 0A0A 2525 8282 \ 4949 A0A0 5252 2828 m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 cyan \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 m2,m2t,m2c/m2,m3c/m2 cyan \ 0000 1111 0000 4444 \ 0000 1111 0000 4444 \ 0000 1111 0000 4444 \ 0000 1111 0000 4444 m2,m2t,m2c/m2,m3c/m2 magenta \ 0000 4444 0000 1111 \ 0000 4444 0000 1111 \ 0000 4444 0000 1111 \ 0000 4444 0000 1111 m2c/m1,gv1 black \ 0000 6666 6666 0000 \ 0000 9999 9999 0000 \ 0000 6666 6666 0000 \ 0000 9999 9999 0000 pad,glass black \ 0300 0700 0E00 1C00 \ 3800 7000 E000 C000 \ 00C0 00E0 0070 0038 \ 001C 000E 0007 0003 nwell yellow \ 0800 1000 2000 4000 \ 8000 0001 0002 0004 \ 0008 0010 0020 0040 \ 0080 0010 0200 0400 nwell cyan \ 1000 2000 4000 8000 \ 0001 0002 0004 0008 \ 0010 0020 0040 0080 \ 0100 0200 0400 0800 pwell yellow \ 1000 0400 0400 0100 \ 0100 0040 0040 0010 \ 0010 0004 0004 0001 \ 0001 4000 4000 1000 pwell cyan \ 0000 0800 0000 0200 \ 0000 0080 0000 0020 \ 0000 0008 0000 0002 \ 0000 8000 0000 2000 pwell magenta \ 0800 0000 0200 0000 \ 0080 0000 0020 0000 \ 0008 0000 0002 0000 \ 8000 0000 2000 0000 m3c/m2,gv2 black \ 0100 0000 0000 0000 \ 1010 0000 0000 0000 \ 0001 0000 0000 0000 \ 1010 0000 0000 0000 m3c/m2,gv2 cyan \ 0280 0000 0820 0000 \ 2008 0000 8002 0000 \ 8002 0000 2008 0000 \ 0820 0000 0280 0000 m3c/m2,gv2 magenta \ 0100 06C0 0440 1830 \ 1010 600C 4004 8003 \ 0001 C006 4004 3018 \ 1010 0C60 0440 0380 m3c/m2,gv2 black \ 0820 0820 0820 0FE0 \ E00F 2008 2008 2008 \ 2008 2008 2008 E00F \ 0000 0FE0 0820 0820 error_p,error_s,error_ps black \ 0000 3C3C 4646 4A4A \ 5252 6262 3C3C 0000 \ 0000 3C3C 4646 4A4A \ 5252 6262 3C3C 0000 magnet yellow \ AAAA 0000 5555 0000 \ AAAA 0000 5555 0000 \ AAAA 0000 5555 0000 \ AAAA 0000 5555 0000 fence magenta \ FFFF 0000 0000 0000 \ 0000 0000 0000 0000 \ FFFF 0000 0000 0000 \ 0000 0000 0000 0000 rotate cyan \ 0000 E0E0 E0E0 E0E0 \ 0000 0000 0000 0000 \ 0000 E0E0 E0E0 E0E0 \ 0000 0000 0000 0000 pc/a,ndc/a,pdc/a,psc/a,nsc/a,gc,gc,gc X style versatec pfet \ 07c0 0f80 1f00 3e00 \ 7c00 f800 f001 e003 \ c007 800f 001f 003e \ 00c7 00f8 01f0 03e0 nfet \ 1f00 0f80 07c0 03e0 \ 01f0 00f8 007c 003e \ 001f 800f c007 e003 \ f001 f800 7c00 3e00 gv1 \ c3c3 c3c3 0000 0000 \ 0000 0000 c3c3 c3c3 \ c3c3 c3c3 0000 0000 \ 0000 0000 c3c3 c3c3 pwell \ 2020 2020 2020 2020 \ 2020 2020 2020 2020 \ 0000 0000 0000 0000 \ 0000 0000 0000 0000 nwell \ 0808 0404 0202 0101 \ 0000 0000 0000 0000 \ 0808 0404 0202 0101 \ 0000 0000 0000 0000 poly,pres,pc/a,nfet,pfet \ 0808 0400 0202 0101 \ 8080 4000 2020 1010 \ 0808 0004 0202 0101 \ 8080 0040 2020 1010 m1,m1t,ndc/m1,nsc/m1,pdc/m1,psc/m1,pc/m1,m2c/m1 \ 8080 0000 0000 0000 \ 0808 0000 0000 0000 \ 8080 0000 0000 0000 \ 0808 0000 0000 0000 pad,glass \ 0000 0000 1c1c 3e3e \ 3636 3e3e 1c1c 0000 \ 0000 0000 1c1c 3e3e \ 3636 3e3e 1c1c 0000 nsd,nsc/a \ 0808 1414 2222 4141 \ 8080 4040 2020 1010 \ 0808 1414 2222 4141 \ 8080 4040 2020 1010 m2,m2t,m2c/m2,m3c/m2 \ 0000 1111 0000 0000 \ 0000 1111 0000 0000 \ 0000 1111 0000 0000 \ 0000 1111 0000 0000 pdiff,apres,pdc/a,pfet \ 0000 0808 5555 8080 \ 0000 8080 5555 0808 \ 0000 0808 5555 8080 \ 0000 8080 5555 0808 psd,psc/a \ 1414 2222 0000 2222 \ 4141 2222 0000 2222 \ 1414 2222 0000 2222 \ 4141 2222 0000 2222 ndiff,anres,ndc/a,nfet \ 0808 1010 2020 4040 \ 8080 4141 2222 1414 \ 0808 1010 2020 4040 \ 8080 4141 2222 1414 pc/a,ndc/a,pdc/a,psc/a,nsc/a,gc,gc,gc X style gremlin pfet 9 nfet 10 gv1 11 pwell 15 nwell 16 poly,pres,pc/a,nfet,pfet 19 pc/a,ndc/a,pdc/a,psc/a,nsc/a,gc,gc,gc 22 pad,glass 23 nsd,nsc/a 24 gv1 28 pdiff,apres,pdc/a,pfet 29 psd,psc/a 30 ndiff,anres,ndc/a,nfet 31 pc/a,ndc/a,pdc/a,psc/a,nsc/a,gc,gc,gc,gv1 X end