tech scmos end version version 2001a description "SCMOS: Submit as technology.lambda.vendor: SCN4ME_SUBM.20.TSMC [to process: TSMC35] has HV fets!: use ext2spice -jhnfet:0/Gnd -jhpfet:1/6/Vdd" end planes well,w select,s cap,c active,a metal1,m1 metal2,m2 metal3,m3 metal4,m4 oxide,ox comment xp contact via1,v1 via2,v2 via3,v3 end types well nwell,nw well pwell,pw well hvnwell,hnwell,hnw well hvpwell,hpwell,hpw select nselect,ns select pselect,ps cap electrode,poly2,el,p2 metal1 electrodecontact,poly2contact,poly2c,p2c,elc cap electrodecap,ecap,poly2cap,p2cap,pcap contact genericpoly2contact,gc2 active ntransistor,nfet active ptransistor,pfet active diffusion,diff active hdiffusion,hdiff active transistor,fet active htransistor,hfet active ndiffusion,ndif,green active pdiffusion,pdif,brown active ndcontact,ndc active pdcontact,pdc active psubstratepdiff,pohmicdiff,pod,ppdiff,ppd,psd active nsubstratendiff,nohmicdiff,nod,nndiff,nnd,nsd active psubstratepcontact,pohmiccontact,poc,pwcontact,pwc,psc active nsubstratencontact,nohmiccontact,noc,nwcontact,nwc,nsc active hvntransistor,hvnfet,hnfet active hvptransistor,hvpfet,hpfet active hvndiffusion,hvndif,hndiff active hvpdiffusion,hvpdif,hpdiff active hvndcontact,hvndc,hndc active hvpdcontact,hvpdc,hpdc active hvpsubstratepdiff,hpohmicdiff,hpod,hppdiff,hppd,hpsd active hvnsubstratendiff,hnohmicdiff,hnod,hnndiff,hnnd,hnsd active hvpsubstratepcontact,hpohmiccontact,hpoc,hppcontact,hppc,hpwcontact,hpwc,hpsc active hvnsubstratencontact,hnohmiccontact,hnoc,hnncontact,hnnc,hnwcontact,hnwc,hnsc active polysilicon,red,poly,p active polycontact,pcontact,polycut,pc contact genericcontact,gcontact,gc metal1 metal1,m1,blue metal1 m2contact,m2cut,m2c,via1,v1 metal1 pm12contact,pm12c metal1 pdm12contact,pdm12c metal1 psm12contact,psm12c,pom12c,pwm12c metal1 ndm12contact,ndm12c metal1 nsm12contact,nsm12c,nom12c,nwm12c metal1 hpdm12contact,hpdm12c metal1 hpsm12contact,hpsm12c,hpom12c,hpwm12c metal1 hndm12contact,hndm12c metal1 hnsm12contact,hnsm12c,hnom12c,hnwm12c metal2 metal2,m2,purple via1 gv1 metal2 m3contact,m3cut,m3c,via2,v2 metal2 m123contact,m123c metal3 metal3,m3,cyan via2 gv2 metal3 m234contact,m234c metal3 m4contact,m4cut,m4c,via3,v3 metal4 metal4,m4,yellow via3 gv3 metal4 pad oxide glass oxide thickoxide,to xp xp comment comment comment bb end contact pc poly metal1 ndc ndiff metal1 pdc pdiff metal1 nsc nsd metal1 psc psd metal1 m2c metal1 metal2 m3c metal2 metal3 m4c metal3 metal4 pm12c poly metal1 metal2 pdm12c pdiff metal1 metal2 psm12c psd metal1 metal2 ndm12c ndiff metal1 metal2 nsm12c nsd metal1 metal2 hpdm12c hpdiff metal1 metal2 hpsm12c hpsd metal1 metal2 hndm12c hndiff metal1 metal2 hnsm12c hnsd metal1 metal2 m123c metal1 metal2 metal3 m234c metal2 metal3 metal4 hndc hndif metal1 hpdc hpdif metal1 hnsc hnsd metal1 hpsc hpsd metal1 end styles styletype mos nwell 12 pwell 13 nselect 43 pselect 44 diff 25 hdiff 15 tran 2 tran 4 htran 2 htran 4 ndiff 2 pdiff 4 nsd 3 psd 5 nfet 6 nfet 7 pfet 8 pfet 9 ndc 2 ndc 20 ndc 32 pdc 4 pdc 20 pdc 32 nsc 3 nsc 20 nsc 32 psc 5 psc 20 psc 32 poly 1 pcontact 1 pcontact 20 pcontact 32 gc 32 metal1 20 gv1 55 m2contact 20 m2contact 21 m2contact 55 pm12contact 1 pm12contact 20 pm12contact 21 pm12contact 32 pm12contact 55 ndm12c 2 ndm12c 20 ndm12c 21 ndm12c 32 ndm12c 55 hndm12c 2 hndm12c 11 hndm12c 20 hndm12c 21 hndm12c 32 hndm12c 55 nsm12c 3 nsm12c 20 nsm12c 21 nsm12c 32 nsm12c 55 hnsm12c 3 hnsm12c 11 hnsm12c 20 hnsm12c 21 hnsm12c 32 hnsm12c 55 pdm12c 4 pdm12c 20 pdm12c 21 pdm12c 32 pdm12c 55 hpdm12c 4 hpdm12c 18 hpdm12c 20 hpdm12c 21 hpdm12c 32 hpdm12c 55 psm12c 5 psm12c 20 psm12c 21 psm12c 32 psm12c 55 hpsm12c 5 hpsm12c 18 hpsm12c 20 hpsm12c 21 hpsm12c 32 hpsm12c 55 metal2 21 gv2 56 m3contact 21 m3contact 22 m3contact 56 m123c 20 m123c 21 m123c 22 m123c 55 m123c 56 metal3 22 gv3 57 m4contact 22 m4contact 23 m4contact 57 m234contact 21 m234contact 22 m234contact 23 m234contact 56 m234contact 57 metal4 23 pad 22 pad 23 pad 34 pad 38 glass 34 to 34 xp 25 xp 34 ecap 10 ecap 14 poly2 14 p2c 14 p2c 20 p2c 32 gc2 19 hnwell 18 hpwell 11 hndif 2 hndif 11 hpdif 4 hpdif 18 hpsd 5 hpsd 11 hnsd 3 hnsd 18 hnfet 6 hnfet 7 hnfet 30 hpfet 8 hpfet 9 hpfet 31 hndc 2 hndc 11 hndc 20 hndc 32 hpdc 4 hpdc 18 hpdc 20 hpdc 32 hpsc 5 hpsc 11 hpsc 20 hpsc 32 hnsc 3 hnsc 18 hnsc 20 hnsc 32 comment 45 bb 32 error_p 42 error_s 42 error_ps 42 magnet 54 rotate 57 fence 59 end compose compose nfet poly ndiff compose pfet poly pdiff paint diff nselect ndiff paint diff pselect pdiff compose tran poly diff paint tran nselect nfet paint tran pselect pfet paint psd ns ndiff paint nsd ps pdiff paint ndiff ps psd paint pdiff ns nsd paint pad m1 pad paint pad m2 pad paint pad m2c pad paint ndc nwell pdc paint nfet nwell pfet paint ndiff nwell pdiff paint psd nwell nsd paint psc nwell nsc paint pdc pwell ndc paint pfet pwell nfet paint pdiff pwell ndiff paint nsd pwell psd paint nsc pwell psc compose hnfet poly hndif compose hpfet poly hpdif paint hdiff nselect hndiff paint hdiff pselect hpdiff compose htran poly hdiff paint htran nselect hnfet paint htran pselect hpfet paint hndc nwell pdc paint hnfet nwell pfet paint hndif nwell pdiff paint hpsd nwell nsd paint hpsc nwell nsc paint hpdc pwell ndc paint hpfet pwell nfet paint hpdif pwell ndiff paint hnsd pwell psd paint hnsc pwell psc #ETO erase hndc to ndc #ETO erase hnfet to nfet #ETO erase hndif to ndiff #ETO erase hpsd to psd #ETO erase hpsc to psc #ETO erase hpdc to pdc #ETO erase hpfet to pfet #ETO erase hpdif to pdiff #ETO erase hnsd to nsd #ETO erase hnsc to nsc paint hndc hnwell hpdc paint hnfet hnwell hpfet paint hndif hnwell hpdif paint hpsd hnwell hnsd paint hpsc hnwell hnsc paint hpdc hpwell hndc paint hpfet hpwell hnfet paint hpdif hpwell hndif paint hnsd hpwell hpsd paint hnsc hpwell hpsc paint ndc hnwell hpdc paint nfet hnwell hpfet paint ndiff hnwell hpdif paint psd hnwell hnsd paint psc hnwell hnsc paint pdc hpwell hndc paint pfet hpwell hnfet paint pdiff hpwell hndif paint nsd hpwell hpsd paint nsc hpwell hpsc paint ndc to hndc paint nfet to hnfet paint ndiff to hndif paint psd to hpsd paint psc to hpsc paint pdc to hpdc paint pfet to hpfet paint pdiff to hpdif paint nsd to hnsd paint nsc to hnsc paint poly2 poly ecap erase ecap poly poly2 paint pad m3 pad paint pad m4 pad end connect nwell,hnwell,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a,nsd,hnsd nwell,hnwell,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a,nsd,hnsd pwell,hpwell,psc/a,psm12c/a,hpsc/a,hpsm12c/a,psd,hpsd pwell,hpwell,psc/a,psm12c/a,hpsc/a,hpsm12c/a,psd,hpsd hnwell,hnsc,hnsd hnwell,hnsc,hnsd hpwell,hpsc,hpsd hpwell,hpsc,hpsd hndif hndc hpdif hpdc m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1 m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1 m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 m4,m4c/m4,m234c/m4 m4,m4c/m4,m234c/m4 ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a,pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a,pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a poly,nfet,pfet,fet,hnfet,hpfet,hfet,pc/a,pm12c/a poly,nfet,pfet,fet,hnfet,hpfet,hfet,pc/a,pm12c/a poly2,ecap,p2c poly2,ecap,p2c gc2 poly2,ecap,metal1 gc poly,ndiff,hndif,pdiff,hpdif,nsd,psd,hnsd,hpsd,hndif,hpdif,m1,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1 gv1 m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2,m3c/m2,m123c/m2,m234c/m2 gv2 m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3,m4c/m3,m234c/m3 gv3 m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4 pad m1,m2,m3,m4 end cifoutput style lambda=0.20(p) scalefactor 20 10 layer CWN nwell,hnwell bloat-or pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,pfet,hpfet * 120 bloat-or nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a * 60 grow 60 shrink 60 labels nwell,hnwell calma 42 0 layer CWP pwell,hpwell bloat-or ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a,nfet,hnfet * 120 bloat-or psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a * 60 grow 60 shrink 60 and-not CWN labels pwell,hpwell calma 41 0 templayer TNS ns templayer TPS ps #we give priority to selects autogenerated around diffusions (vrs. ohmics) #XDP = (pdiff*40) Or ps #XDN = (ndiff*40) Or ns #FSP = ((pdiff*40,psc*40) Or XDP And-Not XDN Or ps shrink-grow #FSN = ((ndiff*40,nsc*40) Or XDN And-Not FDP Or ns shrink-grow #CSN = FSN #CSP = FSP #diffusion auto-nselect (will have priority) templayer XDN bloat-or ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a * 40 psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a 0 or TNS #diffusion auto-pselect (will have priority) templayer XDP bloat-or pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a * 40 nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 0 or TPS #final pselect templayer FSP bloat-or pdiff,pfet,psd,hpdif,hpfet,hpsd,pdc/a,pdm12c/a,psc/a,psm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a,pfet,hpfet * 40 ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a,nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a,nfet,hnfet 0 or XDP #give diff nselect priority and-not XDN or TPS shrink 20 grow 20 grow 20 shrink 20 #final nselect templayer FSN bloat-or ndiff,nfet,nsd,hndif,hnfet,hnsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,nfet,hnfet * 40 pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a,pfet,hpfet 0 or XDN #never conflict with final pselect and-not FSP #drawn select always goes or TNS shrink 20 grow 20 grow 20 shrink 20 layer CSN FSN calma 45 0 layer CSP FSP calma 44 0 layer CTA hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd grow 80 or to or hnwell,hpwell grow 40 shrink 40 labels hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,to calma 60 0 layer CAA diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a,pfet,pfet,fet,hpfet,hpfet,hfet labels diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a,pfet,pfet,fet,hpfet,hpfet,hfet calma 43 0 layer CCA ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1 squares 20 40 60 calma 48 0 layer CCA pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1 squares 20 40 60 calma 48 0 layer CPG poly,nfet,pfet,fet,hnfet,hpfet,hfet,pc/a,pm12c/a labels poly,nfet,pfet,fet,hnfet,hpfet,hfet,pc/a,pm12c/a calma 46 0 layer CCP pc/m1,pm12c/m1 squares 20 40 60 calma 47 0 layer CCE gc2 squares 0 40 60 calma 55 0 layer CCE p2c squares 20 40 60 calma 55 0 layer CCE gc2 squares 0 40 60 calma 55 0 layer CCC gc squares 0 40 60 calma 25 0 layer CV1 m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1 squares 20 40 60 calma 50 0 layer CV1 gv1 squares 0 40 60 calma 50 0 layer CV2 m3c/m2,m123c/m2,m234c/m2 squares 20 40 60 calma 61 0 layer CV2 gv2 squares 0 40 60 calma 61 0 layer CV3 m4c/m3,m234c/m3 squares 20 40 60 calma 30 0 layer CV3 gv3 squares 0 40 60 calma 30 0 templayer XPAD1 pad shrink 120 templayer XPAD2 XPAD1 shrink 120 layer CM4 pad labels pad calma 31 0 layer CV3 XPAD2 squares 40 40 200 calma 30 0 layer CM3 pad labels pad calma 62 0 layer CV2 XPAD2 squares 160 40 200 calma 61 0 layer CM2 pad labels pad calma 51 0 layer CV1 XPAD2 squares 40 40 200 calma 50 0 layer CM1 pad calma 49 0 layer CM1 m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1 labels m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1 calma 49 0 layer CM2 m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 labels m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 calma 51 0 layer CM3 m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 labels m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 calma 62 0 layer CM4 m4,m4c/m4,m234c/m4 labels m4,m4c/m4,m234c/m4 calma 31 0 layer COG pad shrink 500 labels pad calma 52 0 layer COG glass labels glass calma 52 0 layer CEL poly2,ecap,p2c labels poly2,ecap,p2c calma 56 0 layer CX comment labels comment calma 63 0 layer XP pad,xp labels pad,xp calma 26 0 style lambda=0.20(cp) scalefactor 20 10 layer CWN nwell,hnwell bloat-or pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,pfet,hpfet * 120 bloat-or nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a * 60 grow 60 shrink 60 labels nwell,hnwell calma 42 0 layer CWP pwell,hpwell bloat-or ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a,nfet,hnfet * 120 bloat-or psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a * 60 grow 60 shrink 60 and-not CWN labels pwell,hpwell calma 41 0 templayer TNS ns templayer TPS ps #we give priority to selects autogenerated around diffusions (vrs. ohmics) #XDP = (pdiff*40) Or ps #XDN = (ndiff*40) Or ns #FSP = ((pdiff*40,psc*40) Or XDP And-Not XDN Or ps shrink-grow #FSN = ((ndiff*40,nsc*40) Or XDN And-Not FDP Or ns shrink-grow #CSN = FSN #CSP = FSP #diffusion auto-nselect (will have priority) templayer XDN bloat-or ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a * 40 psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a 0 or TNS #diffusion auto-pselect (will have priority) templayer XDP bloat-or pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a * 40 nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 0 or TPS #final pselect templayer FSP bloat-or pdiff,pfet,psd,hpdif,hpfet,hpsd,pdc/a,pdm12c/a,psc/a,psm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a,pfet,hpfet * 40 ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a,nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a,nfet,hnfet 0 or XDP #give diff nselect priority and-not XDN or TPS shrink 20 grow 20 grow 20 shrink 20 #final nselect templayer FSN bloat-or ndiff,nfet,nsd,hndif,hnfet,hnsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,nfet,hnfet * 40 pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a,pfet,hpfet 0 or XDN #never conflict with final pselect and-not FSP #drawn select always goes or TNS shrink 20 grow 20 grow 20 shrink 20 layer CSN FSN calma 45 0 layer CSP FSP calma 44 0 layer CTA hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd grow 80 or to or hnwell,hpwell grow 40 shrink 40 labels hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,to calma 60 0 layer CAA diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a,pfet,pfet,fet,hpfet,hpfet,hfet labels diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a,pfet,pfet,fet,hpfet,hpfet,hfet calma 43 0 layer CCC ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1 squares 20 40 60 calma 25 0 layer CCC pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1 squares 20 40 60 calma 25 0 layer CPG poly,nfet,pfet,fet,hnfet,hpfet,hfet,pc/a,pm12c/a labels poly,nfet,pfet,fet,hnfet,hpfet,hfet,pc/a,pm12c/a calma 46 0 layer CCC pc/m1,pm12c/m1 squares 20 40 60 calma 25 0 layer CCC gc2 squares 0 40 60 calma 25 0 layer CCC p2c squares 20 40 60 calma 25 0 layer CCC gc2 squares 0 40 60 calma 25 0 layer CCC gc squares 0 40 60 calma 25 0 layer CV1 m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1 squares 20 40 60 calma 50 0 layer CV1 gv1 squares 0 40 60 calma 50 0 layer CV2 m3c/m2,m123c/m2,m234c/m2 squares 20 40 60 calma 61 0 layer CV2 gv2 squares 0 40 60 calma 61 0 layer CV3 m4c/m3,m234c/m3 squares 20 40 60 calma 30 0 layer CV3 gv3 squares 0 40 60 calma 30 0 templayer XPAD1 pad shrink 120 templayer XPAD2 XPAD1 shrink 120 layer CM4 pad labels pad calma 31 0 layer CV3 XPAD2 squares 40 40 200 calma 30 0 layer CM3 pad labels pad calma 62 0 layer CV2 XPAD2 squares 160 40 200 calma 61 0 layer CM2 pad labels pad calma 51 0 layer CV1 XPAD2 squares 40 40 200 calma 50 0 layer CM1 pad calma 49 0 layer CM1 m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1 labels m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1 calma 49 0 layer CM2 m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 labels m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 calma 51 0 layer CM3 m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 labels m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 calma 62 0 layer CM4 m4,m4c/m4,m234c/m4 labels m4,m4c/m4,m234c/m4 calma 31 0 layer COG pad shrink 500 labels pad calma 52 0 layer COG glass labels glass calma 52 0 layer CEL poly2,ecap,p2c labels poly2,ecap,p2c calma 56 0 layer CX comment labels comment calma 63 0 layer XP pad,xp labels pad,xp calma 26 0 style lambda=0.20(c) scalefactor 20 10 layer CWN nwell,hnwell bloat-or pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,pfet,hpfet * 120 bloat-or nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a * 60 grow 60 shrink 60 labels nwell,hnwell calma 42 0 templayer TNS ns templayer TPS ps #we give priority to selects autogenerated around diffusions (vrs. ohmics) #XDP = (pdiff*40) Or ps #XDN = (ndiff*40) Or ns #FSP = ((pdiff*40,psc*40) Or XDP And-Not XDN Or ps shrink-grow #FSN = ((ndiff*40,nsc*40) Or XDN And-Not FDP Or ns shrink-grow #CSN = FSN #CSP = FSP #diffusion auto-nselect (will have priority) templayer XDN bloat-or ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a * 40 psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a 0 or TNS #diffusion auto-pselect (will have priority) templayer XDP bloat-or pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a * 40 nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 0 or TPS #final pselect templayer FSP bloat-or pdiff,pfet,psd,hpdif,hpfet,hpsd,pdc/a,pdm12c/a,psc/a,psm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a,pfet,hpfet * 40 ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a,nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a,nfet,hnfet 0 or XDP #give diff nselect priority and-not XDN or TPS shrink 20 grow 20 grow 20 shrink 20 #final nselect templayer FSN bloat-or ndiff,nfet,nsd,hndif,hnfet,hnsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,nfet,hnfet * 40 pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a,pfet,hpfet 0 or XDN #never conflict with final pselect and-not FSP #drawn select always goes or TNS shrink 20 grow 20 grow 20 shrink 20 layer CSN FSN calma 45 0 layer CSP FSP calma 44 0 layer CTA hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd grow 80 or to or hnwell,hpwell grow 40 shrink 40 labels hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,to calma 60 0 layer CAA diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a,pfet,pfet,fet,hpfet,hpfet,hfet labels diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a,pfet,pfet,fet,hpfet,hpfet,hfet calma 43 0 layer CCC ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1 squares 20 40 60 calma 25 0 layer CCC pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1 squares 20 40 60 calma 25 0 layer CPG poly,nfet,pfet,fet,hnfet,hpfet,hfet,pc/a,pm12c/a labels poly,nfet,pfet,fet,hnfet,hpfet,hfet,pc/a,pm12c/a calma 46 0 layer CCC pc/m1,pm12c/m1 squares 20 40 60 calma 25 0 layer CCC gc2 squares 0 40 60 calma 25 0 layer CCC p2c squares 20 40 60 calma 25 0 layer CCC gc2 squares 0 40 60 calma 25 0 layer CCC gc squares 0 40 60 calma 25 0 layer CV1 m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1 squares 20 40 60 calma 50 0 layer CV1 gv1 squares 0 40 60 calma 50 0 layer CV2 m3c/m2,m123c/m2,m234c/m2 squares 20 40 60 calma 61 0 layer CV2 gv2 squares 0 40 60 calma 61 0 layer CV3 m4c/m3,m234c/m3 squares 20 40 60 calma 30 0 layer CV3 gv3 squares 0 40 60 calma 30 0 templayer XPAD1 pad shrink 120 templayer XPAD2 XPAD1 shrink 120 layer CM4 pad labels pad calma 31 0 layer CV3 XPAD2 squares 40 40 200 calma 30 0 layer CM3 pad labels pad calma 62 0 layer CV2 XPAD2 squares 160 40 200 calma 61 0 layer CM2 pad labels pad calma 51 0 layer CV1 XPAD2 squares 40 40 200 calma 50 0 layer CM1 pad calma 49 0 layer CM1 m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1 labels m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1 calma 49 0 layer CM2 m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 labels m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 calma 51 0 layer CM3 m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 labels m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 calma 62 0 layer CM4 m4,m4c/m4,m234c/m4 labels m4,m4c/m4,m234c/m4 calma 31 0 layer COG pad shrink 500 labels pad calma 52 0 layer COG glass labels glass calma 52 0 layer CEL poly2,ecap,p2c labels poly2,ecap,p2c calma 56 0 layer CX comment labels comment calma 63 0 layer XP pad,xp labels pad,xp calma 26 0 style lambda=0.20() scalefactor 20 10 layer CWN nwell,hnwell bloat-or pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,pfet,hpfet * 120 bloat-or nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a * 60 grow 60 shrink 60 labels nwell,hnwell calma 42 0 templayer TNS ns templayer TPS ps #we give priority to selects autogenerated around diffusions (vrs. ohmics) #XDP = (pdiff*40) Or ps #XDN = (ndiff*40) Or ns #FSP = ((pdiff*40,psc*40) Or XDP And-Not XDN Or ps shrink-grow #FSN = ((ndiff*40,nsc*40) Or XDN And-Not FDP Or ns shrink-grow #CSN = FSN #CSP = FSP #diffusion auto-nselect (will have priority) templayer XDN bloat-or ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a * 40 psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a 0 or TNS #diffusion auto-pselect (will have priority) templayer XDP bloat-or pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a * 40 nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 0 or TPS #final pselect templayer FSP bloat-or pdiff,pfet,psd,hpdif,hpfet,hpsd,pdc/a,pdm12c/a,psc/a,psm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a,pfet,hpfet * 40 ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a,nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a,nfet,hnfet 0 or XDP #give diff nselect priority and-not XDN or TPS shrink 20 grow 20 grow 20 shrink 20 #final nselect templayer FSN bloat-or ndiff,nfet,nsd,hndif,hnfet,hnsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,nfet,hnfet * 40 pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a,pfet,hpfet 0 or XDN #never conflict with final pselect and-not FSP #drawn select always goes or TNS shrink 20 grow 20 grow 20 shrink 20 layer CSN FSN calma 45 0 layer CSP FSP calma 44 0 layer CTA hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd grow 80 or to or hnwell,hpwell grow 40 shrink 40 labels hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,to calma 60 0 layer CAA diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a,pfet,pfet,fet,hpfet,hpfet,hfet labels diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a,pfet,pfet,fet,hpfet,hpfet,hfet calma 43 0 layer CCA ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1 squares 20 40 60 calma 48 0 layer CCA pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1 squares 20 40 60 calma 48 0 layer CPG poly,nfet,pfet,fet,hnfet,hpfet,hfet,pc/a,pm12c/a labels poly,nfet,pfet,fet,hnfet,hpfet,hfet,pc/a,pm12c/a calma 46 0 layer CCP pc/m1,pm12c/m1 squares 20 40 60 calma 47 0 layer CCE gc2 squares 0 40 60 calma 55 0 layer CCE p2c squares 20 40 60 calma 55 0 layer CCE gc2 squares 0 40 60 calma 55 0 layer CCC gc squares 0 40 60 calma 25 0 layer CV1 m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1 squares 20 40 60 calma 50 0 layer CV1 gv1 squares 0 40 60 calma 50 0 layer CV2 m3c/m2,m123c/m2,m234c/m2 squares 20 40 60 calma 61 0 layer CV2 gv2 squares 0 40 60 calma 61 0 layer CV3 m4c/m3,m234c/m3 squares 20 40 60 calma 30 0 layer CV3 gv3 squares 0 40 60 calma 30 0 templayer XPAD1 pad shrink 120 templayer XPAD2 XPAD1 shrink 120 layer CM4 pad labels pad calma 31 0 layer CV3 XPAD2 squares 40 40 200 calma 30 0 layer CM3 pad labels pad calma 62 0 layer CV2 XPAD2 squares 160 40 200 calma 61 0 layer CM2 pad labels pad calma 51 0 layer CV1 XPAD2 squares 40 40 200 calma 50 0 layer CM1 pad calma 49 0 layer CM1 m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1 labels m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1 calma 49 0 layer CM2 m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 labels m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 calma 51 0 layer CM3 m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 labels m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 calma 62 0 layer CM4 m4,m4c/m4,m234c/m4 labels m4,m4c/m4,m234c/m4 calma 31 0 layer COG pad shrink 500 labels pad calma 52 0 layer COG glass labels glass calma 52 0 layer CEL poly2,ecap,p2c labels poly2,ecap,p2c calma 56 0 layer CX comment labels comment calma 63 0 layer XP pad,xp labels pad,xp calma 26 0 end cifinput style lambda=0.20(p) scalefactor 20 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer hnwell CWN and-not CWNR and CTA and-not CRE labels CWN calma CWN 42 * layer hnwell CWN and-not CWNR and CTA and CRE and CAA calma CWN 42 * layer pwell CWP and-not CTA labels CWP calma CWP 41 * layer hpwell CWP and CTA labels CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer hdiff CAA and CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer htran CAA and CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * calma CSN 45 * calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hndif CAA and CSN and-not CWNR and CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpdif CAA and CSP and-not CWNR and CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hnfet CAA and CSN and-not CWNR and CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpfet CAA and CSP and-not CWNR and CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hnsd CAA and CSN and-not CWNR and CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpsd CAA and CSP and-not CWNR and CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hndc CAA and CSN and CCA and-not CV1 and-not CWNR and CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hndc CAA and CSN and CCC and-not CV1 and-not CWNR and CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hnsc CAA and CSN and CCA and-not CV1 and-not CWNR and CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hnsc CAA and CSN and CCC and-not CV1 and-not CWNR and CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hpdc CAA and CSP and CCA and-not CV1 and CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hpdc CAA and CSP and CCC and-not CV1 and CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hpsc CAA and CSP and CCA and-not CV1 and CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hpsc CAA and CSP and CCC and-not CV1 and CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer ndc CAA and CSN and CCA and-not CTA and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer ndc CAA and CSN and CCC and-not CTA and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nsc CAA and CSN and CCA and-not CTA and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer nsc CAA and CSN and CCC and-not CTA and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer pdc CAA and CSP and CCA and-not CTA and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer pdc CAA and CSP and CCC and-not CTA and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer psc CAA and CSP and CCA and-not CTA and-not CV1 and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer psc CAA and CSP and CCC and-not CTA and-not CV1 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hndc CAA and CSN and CCA and CV1 and CV2 and-not CV3 and-not CWNR and CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hndc CAA and CSN and CCC and CV1 and CV2 and-not CV3 and-not CWNR and CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hnsc CAA and CSN and CCA and CV1 and CV2 and-not CV3 and-not CWNR and CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hnsc CAA and CSN and CCC and CV1 and CV2 and-not CV3 and-not CWNR and CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hpdc CAA and CSP and CCA and CV1 and CV2 and-not CV3 and CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hpdc CAA and CSP and CCC and CV1 and CV2 and-not CV3 and CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hpsc CAA and CSP and CCA and CV1 and CV2 and-not CV3 and CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hpsc CAA and CSP and CCC and CV1 and CV2 and-not CV3 and CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer ndc CAA and CSN and CCA and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer ndc CAA and CSN and CCC and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nsc CAA and CSN and CCA and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer nsc CAA and CSN and CCC and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer pdc CAA and CSP and CCA and-not CTA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer pdc CAA and CSP and CCC and-not CTA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer psc CAA and CSP and CCA and-not CTA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer psc CAA and CSP and CCC and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer pc CCP and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCP 47 * layer pc CCC and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCC 25 * layer pc CCP and CV1 and CV2 and-not CV3 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCP 47 * layer pc CCC and CV1 and CV2 and-not CV3 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCC 25 * layer gc CCP and-not CPG and-not CPC calma CCP 47 * layer gc CCP and-not CM1 calma CCP 47 * layer gc CCA and-not COP and-not CAA and-not CBA calma CCA 48 * layer gc CCA and-not COP and-not CM1 calma CCA 48 * layer gc CCC and-not COP and-not CPG and-not CPC and-not CEL and-not CAA and-not CBA calma CCC 25 * layer gc CCC and-not COP and-not CM1 calma CCC 25 * layer gc2 CCE and-not CPC and-not CEL calma CCE 55 * layer gc2 CCE and-not CM1 calma CCE 55 * layer gv1 CV1 and-not COP and-not CM1 calma CV1 50 * layer gv1 CV1 and-not COP and-not CM2 calma CV1 50 * layer gv2 CV2 and-not COP and-not CM2 calma CV2 61 * layer gv2 CV2 and-not COP and-not CM3 calma CV2 61 * layer gv3 CV3 and-not COP and-not CM3 calma CV3 30 * layer gv3 CV3 and-not COP and-not CM4 calma CV3 30 * layer m2c CV1 and-not CV2 and-not CCC and-not CCP and-not CCA and-not XP grow 20 and CM2 and CM1 grow 10 shrink 10 calma CV1 50 * layer m2c CV1 and CV2 and CV3 and-not CCC and-not CCP and-not CCA and-not XP grow 20 and CM2 and CM1 grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and-not CV2 and CCP grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and-not CV2 and CCC grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and CV2 and CV3 and CCP grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and CV2 and CV3 and CCC grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer m1 CM1 and-not CRM and-not CRF and-not XP labels CM1 calma CM1 49 * layer m2 CM2 and-not CRM and-not CRS and-not XP labels CM2 calma CM2 51 * layer hndm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hndm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer hpdm12c CAA and CSP and CV1 and-not CV2 and CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hpdm12c CAA and CSP and CV1 and-not CV2 and CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hnsm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hnsm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hpsm12c CAA and CSP and CV1 and-not CV2 and CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hpsm12c CAA and CSP and CV1 and-not CV2 and CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CTA and-not CV2 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CTA and-not CV2 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CTA and-not CV2 and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CTA and-not CV2 and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CTA and-not CV2 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CTA and-not CV2 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CTA and-not CV2 and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CTA and-not CV2 and-not CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hndm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hndm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer hpdm12c CAA and CSP and CV1 and CV2 and CV3 and CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hpdm12c CAA and CSP and CV1 and CV2 and CV3 and CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hnsm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hnsm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hpsm12c CAA and CSP and CV1 and CV2 and CV3 and CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hpsm12c CAA and CSP and CV1 and CV2 and CV3 and CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CTA and CV2 and CV3 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CTA and CV2 and CV3 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CTA and CV2 and CV3 and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CTA and CV2 and CV3 and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CTA and CV2 and CV3 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CTA and CV2 and CV3 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CTA and CV2 and CV3 and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CTA and CV2 and CV3 and-not CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer m3c CV2 and-not CV3 and-not CV1 and-not XP grow 20 and CM3 and CM2 grow 10 shrink 10 calma CV2 61 * layer m123c CV2 and-not CV3 and CV1 and-not XP grow 20 and CM3 and CM2 and CM1 grow 10 shrink 10 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT and-not XP labels CM3 calma CM3 62 * layer m234c CV3 and CV2 and-not XP grow 20 and CM4 and CM3 and CM2 grow 20 shrink 20 calma CV3 30 * layer m4 CM4 and-not CRM and-not CRQ and-not XP labels CM4 calma CM4 31 * layer m4c CV3 and-not CV2 and-not XP grow 20 and CM4 and CM3 grow 20 shrink 20 calma CV3 30 * layer pad XP labels pad calma XP 26 * layer glass COG and-not COP and-not XP labels COG calma COG 52 * layer ecap CEL and CPG labels CEL calma CEL 56 * layer poly2 CEL and-not CPG labels CEL calma CEL 56 * layer elc CCE grow 20 and CM1 and CEL labels CM1 calma CCE 55 * layer elc CCC grow 20 and CM1 and CEL labels CM1 calma CCC 25 * layer comment CX labels CX calma CX 63 * calma CTA 60 * style lambda=0.20(s) scalefactor 20 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer hnwell CWN and-not CWNR and CTA and-not CRE labels CWN calma CWN 42 * layer hnwell CWN and-not CWNR and CTA and CRE and CAA calma CWN 42 * ignore CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer hdiff CAA and CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer htran CAA and CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer nselect CSN calma CSN 45 * layer pselect CSP calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hndif CAA and CSN and-not CWNR and CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpdif CAA and CSP and-not CWNR and CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hnfet CAA and CSN and-not CWNR and CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpfet CAA and CSP and-not CWNR and CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hnsd CAA and CSN and-not CWNR and CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpsd CAA and CSP and-not CWNR and CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hndc CAA and CSN and CCA and-not CV1 and-not CWNR and CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hndc CAA and CSN and CCC and-not CV1 and-not CWNR and CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hnsc CAA and CSN and CCA and-not CV1 and-not CWNR and CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hnsc CAA and CSN and CCC and-not CV1 and-not CWNR and CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hpdc CAA and CSP and CCA and-not CV1 and CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hpdc CAA and CSP and CCC and-not CV1 and CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hpsc CAA and CSP and CCA and-not CV1 and CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hpsc CAA and CSP and CCC and-not CV1 and CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer ndc CAA and CSN and CCA and-not CTA and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer ndc CAA and CSN and CCC and-not CTA and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nsc CAA and CSN and CCA and-not CTA and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer nsc CAA and CSN and CCC and-not CTA and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer pdc CAA and CSP and CCA and-not CTA and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer pdc CAA and CSP and CCC and-not CTA and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer psc CAA and CSP and CCA and-not CTA and-not CV1 and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer psc CAA and CSP and CCC and-not CTA and-not CV1 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hndc CAA and CSN and CCA and CV1 and CV2 and-not CV3 and-not CWNR and CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hndc CAA and CSN and CCC and CV1 and CV2 and-not CV3 and-not CWNR and CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hnsc CAA and CSN and CCA and CV1 and CV2 and-not CV3 and-not CWNR and CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hnsc CAA and CSN and CCC and CV1 and CV2 and-not CV3 and-not CWNR and CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hpdc CAA and CSP and CCA and CV1 and CV2 and-not CV3 and CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hpdc CAA and CSP and CCC and CV1 and CV2 and-not CV3 and CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hpsc CAA and CSP and CCA and CV1 and CV2 and-not CV3 and CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hpsc CAA and CSP and CCC and CV1 and CV2 and-not CV3 and CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer ndc CAA and CSN and CCA and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer ndc CAA and CSN and CCC and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nsc CAA and CSN and CCA and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer nsc CAA and CSN and CCC and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer pdc CAA and CSP and CCA and-not CTA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer pdc CAA and CSP and CCC and-not CTA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer psc CAA and CSP and CCA and-not CTA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer psc CAA and CSP and CCC and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer pc CCP and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCP 47 * layer pc CCC and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCC 25 * layer pc CCP and CV1 and CV2 and-not CV3 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCP 47 * layer pc CCC and CV1 and CV2 and-not CV3 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCC 25 * layer gc CCP and-not CPG and-not CPC calma CCP 47 * layer gc CCP and-not CM1 calma CCP 47 * layer gc CCA and-not COP and-not CAA and-not CBA calma CCA 48 * layer gc CCA and-not COP and-not CM1 calma CCA 48 * layer gc CCC and-not COP and-not CPG and-not CPC and-not CEL and-not CAA and-not CBA calma CCC 25 * layer gc CCC and-not COP and-not CM1 calma CCC 25 * layer gc2 CCE and-not CPC and-not CEL calma CCE 55 * layer gc2 CCE and-not CM1 calma CCE 55 * layer gv1 CV1 and-not COP and-not CM1 calma CV1 50 * layer gv1 CV1 and-not COP and-not CM2 calma CV1 50 * layer gv2 CV2 and-not COP and-not CM2 calma CV2 61 * layer gv2 CV2 and-not COP and-not CM3 calma CV2 61 * layer gv3 CV3 and-not COP and-not CM3 calma CV3 30 * layer gv3 CV3 and-not COP and-not CM4 calma CV3 30 * layer m2c CV1 and-not CV2 and-not CCC and-not CCP and-not CCA and-not XP grow 20 and CM2 and CM1 grow 10 shrink 10 calma CV1 50 * layer m2c CV1 and CV2 and CV3 and-not CCC and-not CCP and-not CCA and-not XP grow 20 and CM2 and CM1 grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and-not CV2 and CCP grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and-not CV2 and CCC grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and CV2 and CV3 and CCP grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and CV2 and CV3 and CCC grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer m1 CM1 and-not CRM and-not CRF and-not XP labels CM1 calma CM1 49 * layer m2 CM2 and-not CRM and-not CRS and-not XP labels CM2 calma CM2 51 * layer hndm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hndm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer hpdm12c CAA and CSP and CV1 and-not CV2 and CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hpdm12c CAA and CSP and CV1 and-not CV2 and CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hnsm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hnsm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hpsm12c CAA and CSP and CV1 and-not CV2 and CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hpsm12c CAA and CSP and CV1 and-not CV2 and CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CTA and-not CV2 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CTA and-not CV2 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CTA and-not CV2 and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CTA and-not CV2 and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CTA and-not CV2 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CTA and-not CV2 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CTA and-not CV2 and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CTA and-not CV2 and-not CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hndm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hndm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer hpdm12c CAA and CSP and CV1 and CV2 and CV3 and CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hpdm12c CAA and CSP and CV1 and CV2 and CV3 and CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hnsm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hnsm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hpsm12c CAA and CSP and CV1 and CV2 and CV3 and CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hpsm12c CAA and CSP and CV1 and CV2 and CV3 and CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CTA and CV2 and CV3 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CTA and CV2 and CV3 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CTA and CV2 and CV3 and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CTA and CV2 and CV3 and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CTA and CV2 and CV3 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CTA and CV2 and CV3 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CTA and CV2 and CV3 and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CTA and CV2 and CV3 and-not CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer m3c CV2 and-not CV3 and-not CV1 and-not XP grow 20 and CM3 and CM2 grow 10 shrink 10 calma CV2 61 * layer m123c CV2 and-not CV3 and CV1 and-not XP grow 20 and CM3 and CM2 and CM1 grow 10 shrink 10 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT and-not XP labels CM3 calma CM3 62 * layer m234c CV3 and CV2 and-not XP grow 20 and CM4 and CM3 and CM2 grow 20 shrink 20 calma CV3 30 * layer m4 CM4 and-not CRM and-not CRQ and-not XP labels CM4 calma CM4 31 * layer m4c CV3 and-not CV2 and-not XP grow 20 and CM4 and CM3 grow 20 shrink 20 calma CV3 30 * layer pad XP labels pad calma XP 26 * layer glass COG and-not COP and-not XP labels COG calma COG 52 * layer ecap CEL and CPG labels CEL calma CEL 56 * layer poly2 CEL and-not CPG labels CEL calma CEL 56 * layer elc CCE grow 20 and CM1 and CEL labels CM1 calma CCE 55 * layer elc CCC grow 20 and CM1 and CEL labels CM1 calma CCC 25 * layer comment CX labels CX calma CX 63 * calma CTA 60 * style lambda=0.20(ps) scalefactor 20 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer hnwell CWN and-not CWNR and CTA and-not CRE labels CWN calma CWN 42 * layer hnwell CWN and-not CWNR and CTA and CRE and CAA calma CWN 42 * layer pwell CWP and-not CTA labels CWP calma CWP 41 * layer hpwell CWP and CTA labels CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer hdiff CAA and CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer htran CAA and CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer nselect CSN calma CSN 45 * layer pselect CSP calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hndif CAA and CSN and-not CWNR and CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpdif CAA and CSP and-not CWNR and CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hnfet CAA and CSN and-not CWNR and CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpfet CAA and CSP and-not CWNR and CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hnsd CAA and CSN and-not CWNR and CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpsd CAA and CSP and-not CWNR and CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hndc CAA and CSN and CCA and-not CV1 and-not CWNR and CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hndc CAA and CSN and CCC and-not CV1 and-not CWNR and CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hnsc CAA and CSN and CCA and-not CV1 and-not CWNR and CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hnsc CAA and CSN and CCC and-not CV1 and-not CWNR and CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hpdc CAA and CSP and CCA and-not CV1 and CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hpdc CAA and CSP and CCC and-not CV1 and CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hpsc CAA and CSP and CCA and-not CV1 and CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hpsc CAA and CSP and CCC and-not CV1 and CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer ndc CAA and CSN and CCA and-not CTA and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer ndc CAA and CSN and CCC and-not CTA and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nsc CAA and CSN and CCA and-not CTA and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer nsc CAA and CSN and CCC and-not CTA and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer pdc CAA and CSP and CCA and-not CTA and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer pdc CAA and CSP and CCC and-not CTA and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer psc CAA and CSP and CCA and-not CTA and-not CV1 and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer psc CAA and CSP and CCC and-not CTA and-not CV1 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hndc CAA and CSN and CCA and CV1 and CV2 and-not CV3 and-not CWNR and CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hndc CAA and CSN and CCC and CV1 and CV2 and-not CV3 and-not CWNR and CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hnsc CAA and CSN and CCA and CV1 and CV2 and-not CV3 and-not CWNR and CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hnsc CAA and CSN and CCC and CV1 and CV2 and-not CV3 and-not CWNR and CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hpdc CAA and CSP and CCA and CV1 and CV2 and-not CV3 and CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hpdc CAA and CSP and CCC and CV1 and CV2 and-not CV3 and CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hpsc CAA and CSP and CCA and CV1 and CV2 and-not CV3 and CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hpsc CAA and CSP and CCC and CV1 and CV2 and-not CV3 and CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer ndc CAA and CSN and CCA and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer ndc CAA and CSN and CCC and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nsc CAA and CSN and CCA and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer nsc CAA and CSN and CCC and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer pdc CAA and CSP and CCA and-not CTA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer pdc CAA and CSP and CCC and-not CTA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer psc CAA and CSP and CCA and-not CTA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer psc CAA and CSP and CCC and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer pc CCP and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCP 47 * layer pc CCC and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCC 25 * layer pc CCP and CV1 and CV2 and-not CV3 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCP 47 * layer pc CCC and CV1 and CV2 and-not CV3 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCC 25 * layer gc CCP and-not CPG and-not CPC calma CCP 47 * layer gc CCP and-not CM1 calma CCP 47 * layer gc CCA and-not COP and-not CAA and-not CBA calma CCA 48 * layer gc CCA and-not COP and-not CM1 calma CCA 48 * layer gc CCC and-not COP and-not CPG and-not CPC and-not CEL and-not CAA and-not CBA calma CCC 25 * layer gc CCC and-not COP and-not CM1 calma CCC 25 * layer gc2 CCE and-not CPC and-not CEL calma CCE 55 * layer gc2 CCE and-not CM1 calma CCE 55 * layer gv1 CV1 and-not COP and-not CM1 calma CV1 50 * layer gv1 CV1 and-not COP and-not CM2 calma CV1 50 * layer gv2 CV2 and-not COP and-not CM2 calma CV2 61 * layer gv2 CV2 and-not COP and-not CM3 calma CV2 61 * layer gv3 CV3 and-not COP and-not CM3 calma CV3 30 * layer gv3 CV3 and-not COP and-not CM4 calma CV3 30 * layer m2c CV1 and-not CV2 and-not CCC and-not CCP and-not CCA and-not XP grow 20 and CM2 and CM1 grow 10 shrink 10 calma CV1 50 * layer m2c CV1 and CV2 and CV3 and-not CCC and-not CCP and-not CCA and-not XP grow 20 and CM2 and CM1 grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and-not CV2 and CCP grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and-not CV2 and CCC grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and CV2 and CV3 and CCP grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and CV2 and CV3 and CCC grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer m1 CM1 and-not CRM and-not CRF and-not XP labels CM1 calma CM1 49 * layer m2 CM2 and-not CRM and-not CRS and-not XP labels CM2 calma CM2 51 * layer hndm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hndm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer hpdm12c CAA and CSP and CV1 and-not CV2 and CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hpdm12c CAA and CSP and CV1 and-not CV2 and CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hnsm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hnsm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hpsm12c CAA and CSP and CV1 and-not CV2 and CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hpsm12c CAA and CSP and CV1 and-not CV2 and CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CTA and-not CV2 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CTA and-not CV2 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CTA and-not CV2 and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CTA and-not CV2 and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CTA and-not CV2 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CTA and-not CV2 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CTA and-not CV2 and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CTA and-not CV2 and-not CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hndm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hndm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer hpdm12c CAA and CSP and CV1 and CV2 and CV3 and CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hpdm12c CAA and CSP and CV1 and CV2 and CV3 and CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hnsm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hnsm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hpsm12c CAA and CSP and CV1 and CV2 and CV3 and CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hpsm12c CAA and CSP and CV1 and CV2 and CV3 and CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CTA and CV2 and CV3 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CTA and CV2 and CV3 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CTA and CV2 and CV3 and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CTA and CV2 and CV3 and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CTA and CV2 and CV3 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CTA and CV2 and CV3 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CTA and CV2 and CV3 and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CTA and CV2 and CV3 and-not CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer m3c CV2 and-not CV3 and-not CV1 and-not XP grow 20 and CM3 and CM2 grow 10 shrink 10 calma CV2 61 * layer m123c CV2 and-not CV3 and CV1 and-not XP grow 20 and CM3 and CM2 and CM1 grow 10 shrink 10 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT and-not XP labels CM3 calma CM3 62 * layer m234c CV3 and CV2 and-not XP grow 20 and CM4 and CM3 and CM2 grow 20 shrink 20 calma CV3 30 * layer m4 CM4 and-not CRM and-not CRQ and-not XP labels CM4 calma CM4 31 * layer m4c CV3 and-not CV2 and-not XP grow 20 and CM4 and CM3 grow 20 shrink 20 calma CV3 30 * layer pad XP labels pad calma XP 26 * layer glass COG and-not COP and-not XP labels COG calma COG 52 * layer ecap CEL and CPG labels CEL calma CEL 56 * layer poly2 CEL and-not CPG labels CEL calma CEL 56 * layer elc CCE grow 20 and CM1 and CEL labels CM1 calma CCE 55 * layer elc CCC grow 20 and CM1 and CEL labels CM1 calma CCC 25 * layer comment CX labels CX calma CX 63 * calma CTA 60 * style lambda=0.20() scalefactor 20 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer hnwell CWN and-not CWNR and CTA and-not CRE labels CWN calma CWN 42 * layer hnwell CWN and-not CWNR and CTA and CRE and CAA calma CWN 42 * ignore CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer hdiff CAA and CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer htran CAA and CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * calma CSN 45 * calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hndif CAA and CSN and-not CWNR and CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpdif CAA and CSP and-not CWNR and CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hnfet CAA and CSN and-not CWNR and CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpfet CAA and CSP and-not CWNR and CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hnsd CAA and CSN and-not CWNR and CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpsd CAA and CSP and-not CWNR and CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hndc CAA and CSN and CCA and-not CV1 and-not CWNR and CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hndc CAA and CSN and CCC and-not CV1 and-not CWNR and CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hnsc CAA and CSN and CCA and-not CV1 and-not CWNR and CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hnsc CAA and CSN and CCC and-not CV1 and-not CWNR and CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hpdc CAA and CSP and CCA and-not CV1 and CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hpdc CAA and CSP and CCC and-not CV1 and CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hpsc CAA and CSP and CCA and-not CV1 and CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hpsc CAA and CSP and CCC and-not CV1 and CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer ndc CAA and CSN and CCA and-not CTA and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer ndc CAA and CSN and CCC and-not CTA and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nsc CAA and CSN and CCA and-not CTA and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer nsc CAA and CSN and CCC and-not CTA and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer pdc CAA and CSP and CCA and-not CTA and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer pdc CAA and CSP and CCC and-not CTA and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer psc CAA and CSP and CCA and-not CTA and-not CV1 and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer psc CAA and CSP and CCC and-not CTA and-not CV1 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hndc CAA and CSN and CCA and CV1 and CV2 and-not CV3 and-not CWNR and CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hndc CAA and CSN and CCC and CV1 and CV2 and-not CV3 and-not CWNR and CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hnsc CAA and CSN and CCA and CV1 and CV2 and-not CV3 and-not CWNR and CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hnsc CAA and CSN and CCC and CV1 and CV2 and-not CV3 and-not CWNR and CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hpdc CAA and CSP and CCA and CV1 and CV2 and-not CV3 and CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hpdc CAA and CSP and CCC and CV1 and CV2 and-not CV3 and CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer hpsc CAA and CSP and CCA and CV1 and CV2 and-not CV3 and CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer hpsc CAA and CSP and CCC and CV1 and CV2 and-not CV3 and CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer ndc CAA and CSN and CCA and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer ndc CAA and CSN and CCC and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nsc CAA and CSN and CCA and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer nsc CAA and CSN and CCC and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer pdc CAA and CSP and CCA and-not CTA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer pdc CAA and CSP and CCC and-not CTA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer psc CAA and CSP and CCA and-not CTA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer psc CAA and CSP and CCC and-not CTA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer pc CCP and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCP 47 * layer pc CCC and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCC 25 * layer pc CCP and CV1 and CV2 and-not CV3 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCP 47 * layer pc CCC and CV1 and CV2 and-not CV3 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCC 25 * layer gc CCP and-not CPG and-not CPC calma CCP 47 * layer gc CCP and-not CM1 calma CCP 47 * layer gc CCA and-not COP and-not CAA and-not CBA calma CCA 48 * layer gc CCA and-not COP and-not CM1 calma CCA 48 * layer gc CCC and-not COP and-not CPG and-not CPC and-not CEL and-not CAA and-not CBA calma CCC 25 * layer gc CCC and-not COP and-not CM1 calma CCC 25 * layer gc2 CCE and-not CPC and-not CEL calma CCE 55 * layer gc2 CCE and-not CM1 calma CCE 55 * layer gv1 CV1 and-not COP and-not CM1 calma CV1 50 * layer gv1 CV1 and-not COP and-not CM2 calma CV1 50 * layer gv2 CV2 and-not COP and-not CM2 calma CV2 61 * layer gv2 CV2 and-not COP and-not CM3 calma CV2 61 * layer gv3 CV3 and-not COP and-not CM3 calma CV3 30 * layer gv3 CV3 and-not COP and-not CM4 calma CV3 30 * layer m2c CV1 and-not CV2 and-not CCC and-not CCP and-not CCA and-not XP grow 20 and CM2 and CM1 grow 10 shrink 10 calma CV1 50 * layer m2c CV1 and CV2 and CV3 and-not CCC and-not CCP and-not CCA and-not XP grow 20 and CM2 and CM1 grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and-not CV2 and CCP grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and-not CV2 and CCC grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and CV2 and CV3 and CCP grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and CV2 and CV3 and CCC grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer m1 CM1 and-not CRM and-not CRF and-not XP labels CM1 calma CM1 49 * layer m2 CM2 and-not CRM and-not CRS and-not XP labels CM2 calma CM2 51 * layer hndm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hndm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer hpdm12c CAA and CSP and CV1 and-not CV2 and CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hpdm12c CAA and CSP and CV1 and-not CV2 and CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hnsm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hnsm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hpsm12c CAA and CSP and CV1 and-not CV2 and CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hpsm12c CAA and CSP and CV1 and-not CV2 and CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CTA and-not CV2 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CTA and-not CV2 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CTA and-not CV2 and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CTA and-not CV2 and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CTA and-not CV2 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CTA and-not CV2 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CTA and-not CV2 and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CTA and-not CV2 and-not CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hndm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hndm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer hpdm12c CAA and CSP and CV1 and CV2 and CV3 and CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hpdm12c CAA and CSP and CV1 and CV2 and CV3 and CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hnsm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hnsm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer hpsm12c CAA and CSP and CV1 and CV2 and CV3 and CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer hpsm12c CAA and CSP and CV1 and CV2 and CV3 and CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CTA and CV2 and CV3 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CTA and CV2 and CV3 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CTA and CV2 and CV3 and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CTA and CV2 and CV3 and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CTA and CV2 and CV3 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CTA and CV2 and CV3 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CTA and CV2 and CV3 and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CTA and CV2 and CV3 and-not CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer m3c CV2 and-not CV3 and-not CV1 and-not XP grow 20 and CM3 and CM2 grow 10 shrink 10 calma CV2 61 * layer m123c CV2 and-not CV3 and CV1 and-not XP grow 20 and CM3 and CM2 and CM1 grow 10 shrink 10 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT and-not XP labels CM3 calma CM3 62 * layer m234c CV3 and CV2 and-not XP grow 20 and CM4 and CM3 and CM2 grow 20 shrink 20 calma CV3 30 * layer m4 CM4 and-not CRM and-not CRQ and-not XP labels CM4 calma CM4 31 * layer m4c CV3 and-not CV2 and-not XP grow 20 and CM4 and CM3 grow 20 shrink 20 calma CV3 30 * layer pad XP labels pad calma XP 26 * layer glass COG and-not COP and-not XP labels COG calma COG 52 * layer ecap CEL and CPG labels CEL calma CEL 56 * layer poly2 CEL and-not CPG labels CEL calma CEL 56 * layer elc CCE grow 20 and CM1 and CEL labels CM1 calma CCE 55 * layer elc CCC grow 20 and CM1 and CEL labels CM1 calma CCC 25 * layer comment CX labels CX calma CX 63 * calma CTA 60 * style lambda=0.20(c) scalefactor 20 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer hnwell CWN and-not CWNR and CTA and-not CRE labels CWN calma CWN 42 * layer hnwell CWN and-not CWNR and CTA and CRE and CAA calma CWN 42 * ignore CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer hdiff CAA and CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer htran CAA and CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * calma CSN 45 * calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hndif CAA and CSN and-not CWNR and CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpdif CAA and CSP and-not CWNR and CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hnfet CAA and CSN and-not CWNR and CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpfet CAA and CSP and-not CWNR and CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hnsd CAA and CSN and-not CWNR and CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpsd CAA and CSP and-not CWNR and CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer gc2 CCA and CEL calma CCA 48 * layer gc2 CCP and CEL calma CCP 47 * layer gc2 CCC and CEL calma CCC 25 * layer gc2 CCE and CEL calma CCE 55 * layer gc2 CCA and CPC and-not CPG calma CCA 48 * layer gc2 CCP and CPC and-not CPG calma CCP 47 * layer gc2 CCC and CPC and-not CPG calma CCC 25 * layer gc2 CCE and CPC and-not CPG calma CCE 55 * layer gc CCA and CPG and-not CEL calma CCA 48 * layer gc CCP and CPG and-not CEL calma CCP 47 * layer gc CCC and CPG and-not CEL calma CCC 25 * layer gc CCE and CPG and-not CEL calma CCE 55 * layer gc CCA and-not COP and-not CPC and-not CEL calma CCA 48 * layer gc CCP and-not COP and-not CPC and-not CEL calma CCP 47 * layer gc CCC and-not COP and-not CPC and-not CEL calma CCC 25 * layer gc CCE and-not COP and-not CPC and-not CEL calma CCE 55 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer m1 CM1 and-not CRM and-not CRF labels CM1 calma CM1 49 * layer gv1 CV1 calma CV1 50 * layer m2 CM2 and-not CRM and-not CRS labels CM2 calma CM2 51 * layer gv2 CV2 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT labels CM3 calma CM3 62 * layer gv3 CV3 calma CV3 30 * layer m4 CM4 and-not CRM and-not CRQ labels CM4 calma CM4 31 * layer to CTA labels CTA calma CTA 60 * layer xp XP calma XP 26 * layer glass COG and-not COP labels COG calma COG 52 * layer ecap CEL and CPG labels CEL calma CEL 56 * layer poly2 CEL and-not CPG labels CEL calma CEL 56 * layer comment CX labels CX calma CX 63 * calma CTA 60 * style lambda=0.20(cs) scalefactor 20 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer hnwell CWN and-not CWNR and CTA and-not CRE labels CWN calma CWN 42 * layer hnwell CWN and-not CWNR and CTA and CRE and CAA calma CWN 42 * ignore CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer hdiff CAA and CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer htran CAA and CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer nselect CSN calma CSN 45 * layer pselect CSP calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hndif CAA and CSN and-not CWNR and CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpdif CAA and CSP and-not CWNR and CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hnfet CAA and CSN and-not CWNR and CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpfet CAA and CSP and-not CWNR and CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hnsd CAA and CSN and-not CWNR and CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpsd CAA and CSP and-not CWNR and CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer gc2 CCA and CEL calma CCA 48 * layer gc2 CCP and CEL calma CCP 47 * layer gc2 CCC and CEL calma CCC 25 * layer gc2 CCE and CEL calma CCE 55 * layer gc2 CCA and CPC and-not CPG calma CCA 48 * layer gc2 CCP and CPC and-not CPG calma CCP 47 * layer gc2 CCC and CPC and-not CPG calma CCC 25 * layer gc2 CCE and CPC and-not CPG calma CCE 55 * layer gc CCA and CPG and-not CEL calma CCA 48 * layer gc CCP and CPG and-not CEL calma CCP 47 * layer gc CCC and CPG and-not CEL calma CCC 25 * layer gc CCE and CPG and-not CEL calma CCE 55 * layer gc CCA and-not COP and-not CPC and-not CEL calma CCA 48 * layer gc CCP and-not COP and-not CPC and-not CEL calma CCP 47 * layer gc CCC and-not COP and-not CPC and-not CEL calma CCC 25 * layer gc CCE and-not COP and-not CPC and-not CEL calma CCE 55 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer m1 CM1 and-not CRM and-not CRF labels CM1 calma CM1 49 * layer gv1 CV1 calma CV1 50 * layer m2 CM2 and-not CRM and-not CRS labels CM2 calma CM2 51 * layer gv2 CV2 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT labels CM3 calma CM3 62 * layer gv3 CV3 calma CV3 30 * layer m4 CM4 and-not CRM and-not CRQ labels CM4 calma CM4 31 * layer to CTA labels CTA calma CTA 60 * layer xp XP calma XP 26 * layer glass COG and-not COP labels COG calma COG 52 * layer ecap CEL and CPG labels CEL calma CEL 56 * layer poly2 CEL and-not CPG labels CEL calma CEL 56 * layer comment CX labels CX calma CX 63 * calma CTA 60 * style lambda=0.20(cps) scalefactor 20 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer hnwell CWN and-not CWNR and CTA and-not CRE labels CWN calma CWN 42 * layer hnwell CWN and-not CWNR and CTA and CRE and CAA calma CWN 42 * layer pwell CWP and-not CTA labels CWP calma CWP 41 * layer hpwell CWP and CTA labels CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer hdiff CAA and CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer htran CAA and CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer nselect CSN calma CSN 45 * layer pselect CSP calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hndif CAA and CSN and-not CWNR and CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpdif CAA and CSP and-not CWNR and CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hnfet CAA and CSN and-not CWNR and CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpfet CAA and CSP and-not CWNR and CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hnsd CAA and CSN and-not CWNR and CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpsd CAA and CSP and-not CWNR and CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer gc2 CCA and CEL calma CCA 48 * layer gc2 CCP and CEL calma CCP 47 * layer gc2 CCC and CEL calma CCC 25 * layer gc2 CCE and CEL calma CCE 55 * layer gc2 CCA and CPC and-not CPG calma CCA 48 * layer gc2 CCP and CPC and-not CPG calma CCP 47 * layer gc2 CCC and CPC and-not CPG calma CCC 25 * layer gc2 CCE and CPC and-not CPG calma CCE 55 * layer gc CCA and CPG and-not CEL calma CCA 48 * layer gc CCP and CPG and-not CEL calma CCP 47 * layer gc CCC and CPG and-not CEL calma CCC 25 * layer gc CCE and CPG and-not CEL calma CCE 55 * layer gc CCA and-not COP and-not CPC and-not CEL calma CCA 48 * layer gc CCP and-not COP and-not CPC and-not CEL calma CCP 47 * layer gc CCC and-not COP and-not CPC and-not CEL calma CCC 25 * layer gc CCE and-not COP and-not CPC and-not CEL calma CCE 55 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer m1 CM1 and-not CRM and-not CRF labels CM1 calma CM1 49 * layer gv1 CV1 calma CV1 50 * layer m2 CM2 and-not CRM and-not CRS labels CM2 calma CM2 51 * layer gv2 CV2 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT labels CM3 calma CM3 62 * layer gv3 CV3 calma CV3 30 * layer m4 CM4 and-not CRM and-not CRQ labels CM4 calma CM4 31 * layer to CTA labels CTA calma CTA 60 * layer xp XP calma XP 26 * layer glass COG and-not COP labels COG calma COG 52 * layer ecap CEL and CPG labels CEL calma CEL 56 * layer poly2 CEL and-not CPG labels CEL calma CEL 56 * layer comment CX labels CX calma CX 63 * calma CTA 60 * style lambda=0.20(cp) scalefactor 20 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer hnwell CWN and-not CWNR and CTA and-not CRE labels CWN calma CWN 42 * layer hnwell CWN and-not CWNR and CTA and CRE and CAA calma CWN 42 * layer pwell CWP and-not CTA labels CWP calma CWP 41 * layer hpwell CWP and CTA labels CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer hdiff CAA and CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer htran CAA and CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * calma CSN 45 * calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hndif CAA and CSN and-not CWNR and CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpdif CAA and CSP and-not CWNR and CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hnfet CAA and CSN and-not CWNR and CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpfet CAA and CSP and-not CWNR and CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer hnsd CAA and CSN and-not CWNR and CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer hpsd CAA and CSP and-not CWNR and CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer gc2 CCA and CEL calma CCA 48 * layer gc2 CCP and CEL calma CCP 47 * layer gc2 CCC and CEL calma CCC 25 * layer gc2 CCE and CEL calma CCE 55 * layer gc2 CCA and CPC and-not CPG calma CCA 48 * layer gc2 CCP and CPC and-not CPG calma CCP 47 * layer gc2 CCC and CPC and-not CPG calma CCC 25 * layer gc2 CCE and CPC and-not CPG calma CCE 55 * layer gc CCA and CPG and-not CEL calma CCA 48 * layer gc CCP and CPG and-not CEL calma CCP 47 * layer gc CCC and CPG and-not CEL calma CCC 25 * layer gc CCE and CPG and-not CEL calma CCE 55 * layer gc CCA and-not COP and-not CPC and-not CEL calma CCA 48 * layer gc CCP and-not COP and-not CPC and-not CEL calma CCP 47 * layer gc CCC and-not COP and-not CPC and-not CEL calma CCC 25 * layer gc CCE and-not COP and-not CPC and-not CEL calma CCE 55 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer m1 CM1 and-not CRM and-not CRF labels CM1 calma CM1 49 * layer gv1 CV1 calma CV1 50 * layer m2 CM2 and-not CRM and-not CRS labels CM2 calma CM2 51 * layer gv2 CV2 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT labels CM3 calma CM3 62 * layer gv3 CV3 calma CV3 30 * layer m4 CM4 and-not CRM and-not CRQ labels CM4 calma CM4 31 * layer to CTA labels CTA calma CTA 60 * layer xp XP calma XP 26 * layer glass COG and-not COP labels COG calma COG 52 * layer ecap CEL and CPG labels CEL calma CEL 56 * layer poly2 CEL and-not CPG labels CEL calma CEL 56 * layer comment CX labels CX calma CX 63 * calma CTA 60 * end mzrouter style irouter # layer hCost vCost jogCost hintCost layer metal4 2 1 2 1 layer metal3 1 2 2 1 layer metal2 2 1 2 1 layer metal1 2 3 2 1 layer poly 10 10 11 1 contact m4contact metal4 metal3 4 contact m3contact metal3 metal2 5 contact m2contact metal2 metal1 6 contact pcontact metal1 poly 7 notactive poly pcontact style garouter layer m2 32 64 256 1 layer m1 64 32 256 1 contact m2contact metal1 metal2 1024 end drc width nwell,hnwell 12 \ "N-well width < 12 (Mosis #1.1)" width pwell,hpwell 12 \ "P-well width < 12 (Mosis #1.1)" width diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a 3 \ "Diffusion width < 3 (Mosis #2.1)" edge4way nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a 3 ~(nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a)/active pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a 3 \ "P-Diffusion width in N-Ohmic < 3 (Mosis #2.1)" active edge4way psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a 3 ~(psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a)/active ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a 3 \ "N-Diffusion width in P-Ohmic < 3 (Mosis #2.1)" active edge4way pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 3 ~(pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a)/active nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 3 \ "N-Ohmic width in P-Diffusion < 3 (Mosis #2.1)" active edge4way ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a 3 ~(ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a)/active psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a 3 \ "P-Ohmic width in N-Diffusion < 3 (Mosis #2.1)" active width poly,pc/a,pm12c/a,nfet,pfet,fet,hnfet,hpfet,hfet 2 \ "Poly width < 2 (Mosis #3.1)" width nselect 3 \ "N-Select width < 3 (Mosis #4.4)" width pselect 3 \ "P-Select width < 3 (Mosis #4.4)" width ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a,nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 3 \ "N-Diffusion,N-Ohmic width < 3 (Mosis #4.4)" width pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a 3 \ "P-Diffusion,P-Ohmic width < 3 (Mosis #4.4)" width pc/m1 4 \ "Poly contact width < 4 (Mosis #5.1)" width pm12c/m1 4 \ "Poly contact width < 4 (Mosis #5.1)" width gc 2 \ "GC contact width < 2 (Mosis #6.1)" width ndc/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width ndm12c/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width nsc/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width nsm12c/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width hndc/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width hndm12c/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width hnsc/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width hnsm12c/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width pdc/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width pdm12c/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width psc/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width psm12c/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width hpdc/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width hpdm12c/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width hpsc/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width hpsm12c/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,m123c/m1 3 \ "Metal1 width < 3 (Mosis #7.1)" width gv1 2 \ "GV1 via width < 2 (Mosis #8.1)" width m2c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width pdm12c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width ndm12c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width psm12c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width nsm12c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width pm12c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width m123c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width hpdm12c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width hndm12c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width hpsm12c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width hnsm12c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m234c/m2 3 \ "Metal2 width < 3 (Mosis #9.1)" width ecap 8 \ "Ecap width < 8 (Mosis #11.1)" width poly2,ecap 5 \ "Poly2 width < 5 (Mosis #11.1)" width gc2 2 \ "Generic contact2 width < 2 (Mosis #13.1)" width p2c 4 \ "Poly2 contact width < 4 (Mosis #13.1)" width gv2 2 \ "GV2 via width < 2 (Mosis #14.1)" width m3c/m2 4 \ "Metal3 contact width < 4 (Mosis #14.1)" width m123c/m2 4 \ "Metal3 contact width < 4 (Mosis #14.1)" width m234c/m2 4 \ "Metal3 contact width < 4 (Mosis #14.1)" width m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3 3 \ "Metal3 width < 3 (Mosis #15.1)" width gv3 2 \ "GV3 via width < 2 (Mosis #21.3)" width m4c/m3 4 \ "Metal4 contact width < 4 (Mosis #21.3)" width m234c/m3 4 \ "Metal4 contact width < 4 (Mosis #21.3)" width m4,m4c/m4,m234c/m4,pad 3 \ "Metal4 width < 3 (Mosis #22.1)" width hnfet,hpfet 3 \ "HV Transistor width < 3 (Mosis #24.5)" width to 4 \ "Thick Oxide width < 4 (Mosis #24.5)" spacing nwell,hnwell nwell,hnwell 6 touching_ok \ "N-well(at-same-potential) spacing < 6 (Mosis #1.3)" spacing pwell,hpwell pwell,hpwell 6 touching_ok \ "P-well(at-same-potential) spacing < 6 (Mosis #1.3)" spacing diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a 3 touching_ok \ "Diffusion spacing < 3 (Mosis #2.2)" spacing nwell,hnwell ndiff,nfet,hndif,hnfet,ndc/a,ndm12c/a,hndc/a,hndm12c/a 6 touching_illegal \ "N-well spacing to N-Diffusion < 6 (Mosis #2.3)" spacing pwell,hpwell pdiff,pfet,hpdif,hpfet,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a 6 touching_illegal \ "P-well spacing to P-Diffusion < 6 (Mosis #2.3)" spacing ndiff,nfet,hndif,hnfet,ndc/a,ndm12c/a,hndc/a,hndm12c/a pdiff,pfet,hpdif,hpfet,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a 12 touching_illegal \ "N-Diffusion spacing to P-Diffusion < 12 (Mosis #2.3+2.3)" edge4way ~(nwell,hnwell)/well nwell,hnwell 6 ~(pdiff,pfet,hpdif,hpfet,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a)/active nwell,hnwell 6 \ "N-well overlap of P-Diffusion < 6 (Mosis #2.4)" active edge4way ~(pwell,hpwell)/well pwell,hpwell 6 ~(ndiff,nfet,hndif,hnfet,ndc/a,ndm12c/a,hndc/a,hndm12c/a)/active pwell,hpwell 6 \ "P-well overlap of N-Diffusion < 6 (Mosis #2.4)" active edge4way ~(nwell,hnwell)/well nwell,hnwell 3 ~(nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a)/active nwell,hnwell 3 \ "N-well overlap of N-Ohmic < 3 (Mosis #2.4)" active edge4way ~(pwell,hpwell)/well pwell,hpwell 3 ~(psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a)/active pwell,hpwell 3 \ "P-well overlap of P-Ohmic < 3 (Mosis #2.4)" active spacing ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 9 touching_illegal \ "N-Diffusion spacing to N-Ohmic < 9 (Mosis #2.3+2.4)" spacing pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a 9 touching_illegal \ "P-Diffusion spacing to P-Ohmic < 9 (Mosis #2.3+2.4)" spacing nwell,hnwell psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a 3 touching_illegal \ "N-well spacing to P-Ohmic < 3 (Mosis #2.4)" spacing pwell,hpwell nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 3 touching_illegal \ "P-well spacing to N-Ohmic < 3 (Mosis #2.4)" spacing nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a 6 touching_illegal \ "N-Ohmic spacing to P-Ohmic < 6 (Mosis #2.4+2.4)" spacing ndiff,nfet,hndif,hnfet,ndc/a,ndm12c/a,hndc/a,hndm12c/a,nfet,hnfet psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a 4 touching_ok \ "N-Diffusion spacing to P-Ohmic < 4 (Mosis #2.5)" spacing pdiff,pfet,hpdif,hpfet,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,pfet,hpfet nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 4 touching_ok \ "P-Diffusion spacing to N-Ohmic < 4 (Mosis #2.5)" spacing poly,pc/a,pm12c/a,nfet,pfet,fet,hnfet,hpfet,hfet poly,pc/a,pm12c/a,nfet,pfet,fet,hnfet,hpfet,hfet 3 touching_ok \ "Poly spacing < 3 (Mosis #3.2)" edge4way nfet,pfet,fet,hnfet,hpfet,hfet space/active,poly,pc/a,pm12c/a 2 poly,pc/a,pm12c/a 0 0 \ "Poly overhang of Transistor < 2 (Mosis #3.3)" active edge4way nfet,pfet,fet,hnfet,hpfet,hfet space/active,ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a,pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a 3 ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a,pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,nfet,pfet,fet,hnfet,hpfet,hfet 0 0 \ "N-Diffusion,P-Diffusion overhang of Transistor < 3 (Mosis #3.4)" active edge4way poly,pc/a,pm12c/a ~(poly,pc/a,pm12c/a,nfet,pfet,fet,hnfet,hpfet,hfet)/active 1 space space 1 \ "Poly spacing to Diffusion < 1 (Mosis #3.5)" edge4way nfet,hnfet ~(nfet,hnfet)/active 2 ~(pselect)/select ~(nfet,hnfet)/active 2 \ "N-Transistor space to P-Select < 2 (Mosis #4.1)" select edge4way pfet,hpfet ~(pfet,hpfet)/active 2 ~(nselect)/select ~(pfet,hpfet)/active 2 \ "P-Transistor space to N-Select < 2 (Mosis #4.1)" select edge4way nfet,hnfet ~(nfet,hnfet)/active 3 ~(psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a)/active ~(nfet,hnfet)/active 2 \ "N-Transistor space to P-Ohmic < 3 (Mosis #4.1)" active edge4way pfet,hpfet ~(pfet,hpfet)/active 3 ~(nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a)/active ~(pfet,hpfet)/active 2 \ "P-Transistor space to N-Ohmic < 3 (Mosis #4.1)" active #PEZ edge4way psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a space ~(nfet,hnfet)/active space \ #PEZ "P-Ohmic space to N-Transistor < (Mosis #4.1)" active #PEZ edge4way nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a space ~(pfet,hpfet)/active space \ #PEZ "N-Ohmic space to P-Transistor < (Mosis #4.1)" active edge4way ~(nselect,pselect)/select nselect,pselect 2 ~(diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a)/active nselect,pselect 2 \ "N-Select,P-Select overlap of Diffusion < 2 (Mosis #4.2_)" active edge4way space nselect,pselect 2 ~(ndiff,nfet,hndif,hnfet,ndc/a,ndm12c/a,hndc/a,hndm12c/a)/active nselect 2 \ "N-Select space to N-Diffusion < 2 (Mosis #4.2a)" active edge4way nselect,pselect space 2 ~(ndiff,nfet,hndif,hnfet,ndc/a,ndm12c/a,hndc/a,hndm12c/a)/active nselect 2 \ "N-Select space to N-Diffusion < 2 (Mosis #4.2b)" active edge4way nselect,pselect space 2 ~(ndiff,nfet,hndif,hnfet,ndc/a,ndm12c/a,hndc/a,hndm12c/a)/active space,nselect,pselect 2 \ "N-Select space to N-Diffusion < 2 (Mosis #4.2c)" active edge4way space nselect,pselect 2 ~(pdiff,pfet,hpdif,hpfet,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a)/active pselect 2 \ "P-Select space to P-Diffusion < 2 (Mosis #4.2aa)" active edge4way nselect,pselect space 2 ~(pdiff,pfet,hpdif,hpfet,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a)/active pselect 2 \ "P-Select space to P-Diffusion < 2 (Mosis #4.2bb)" active edge4way nselect,pselect space 2 ~(pdiff,pfet,hpdif,hpfet,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a)/active space,nselect,pselect 2 \ "P-Select space to P-Diffusion < 2 (Mosis #4.2cc)" active edge4way diff,hdiff space 2 nselect space 2 \ "N-Select must overlap Diffusion by 2 (Mosis #4.2)" select edge4way diff,hdiff space 2 pselect space 2 \ "P-Select must overlap Diffusion by 2 (Mosis #4.2)" select edge4way ndiff,nfet,hndif,hnfet,ndc/a,ndm12c/a,hndc/a,hndm12c/a space 2 ~(pselect)/select space 2 \ "P-Select space to N-Diffusion < 2 (Mosis #4.2e)" select edge4way pdiff,pfet,hpdif,hpfet,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a space 2 ~(nselect)/select space 2 \ "N-Select space to P-Diffusion < 2 (Mosis #4.2e)" select edge4way ~(pdiff,pfet,hpdif,hpfet,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a)/active pdiff,pfet,hpdif,hpfet,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a 1 ~(nselect)/select 0 0 \ "N-Select cannot touch P-Diffusion,P-Ohmic (Mosis #4.2f)" select edge4way ~(ndiff,nfet,hndif,hnfet,ndc/a,ndm12c/a,hndc/a,hndm12c/a,nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a)/active ndiff,nfet,hndif,hnfet,ndc/a,ndm12c/a,hndc/a,hndm12c/a,nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 1 ~(pselect)/select 0 0 \ "P-Select cannot touch N-Diffusion,N-Ohmic (Mosis #4.2f)" select width nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a,psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a 2 \ "N-Ohmic,P-Ohmic width < 2 (Mosis #4.1)" spacing nselect nselect 3 touching_ok \ "N-Select spacing < 3 (Mosis #4.4)" spacing pselect pselect 3 touching_ok \ "P-Select spacing < 3 (Mosis #4.4)" edge4way ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a 2 ~(ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a)/active 0 0 \ "P-Ohmic(that touches N-Diffusion) width < 2 (Mosis #4.4)" edge4way pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 2 ~(pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a)/active 0 0 \ "N-Ohmic(that touches P-Diffusion) width < 2 (Mosis #4.4)" edge4way gc ~(gc)/contact 1 poly,pc/a,pm12c/a,diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a ~(gc)/contact 1 \ "Poly,Diffusion overlap of GC contact < 1 (Mosis #5.2)" active edge4way gc space 1 poly,pc/a,pm12c/a,diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a space 1 \ "one of: Poly,Diffusion must overlap GC contact by 1 (Mosis #5.2a,6.2a)" active edge4way ~(poly,pc/a,pm12c/a,diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a)/active poly,pc/a,pm12c/a,diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a 1 ~(gc)/contact 0 0 \ "Edge to one of: Poly,Diffusion cannot touch GC contact (Mosis #5.2a,6.2a)" contact spacing gc gc 3 touching_ok \ "Generic contact spacing < 3 (Mosis #5.3)" edge4way ~(gc)/contact gc 1 ~(ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c)/metal1 0 0 \ "GC contact cannot touch Metal1 contacts (Mosis #0)" metal1 spacing gv1 m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2 2 touching_illegal \ "GV1 via spacing to Metal2 contacts < 2 (Mosis #14.2)" #PSC spacing poly,pc/a,pm12c/a pc/a,pm12c/a 4 touching_ok \ #PSC "Poly spacing to Poly contact < 4 (Mosis #5.5.b)" edge4way gc ~(gc)/contact 1 diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a,poly,pc/a,pm12c/a ~(gc)/contact 1 \ "Diffusion,Poly overlap of GC contact < 1 (Mosis #6.2)" active spacing gc pc/a,pm12c/a,ndc/a,ndm12c/a,hndc/a,hndm12c/a,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psc/a,psm12c/a,hpsc/a,hpsm12c/a,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 2 touching_illegal \ "Generic contact spacing to Poly contact,Diffusion contact < 2 (Mosis #5.3)" spacing nsc/m1,nsm12c/m1,hnsc/m1,hnsm12c/m1 pdc/m1,pdm12c/m1,hpdc/m1,hpdm12c/m1 1 touching_illegal \ "nsc spacing to pdc < 1 (Mosis #6.3)" spacing psc/m1,psm12c/m1,hpsc/m1,hpsm12c/m1 ndc/m1,ndm12c/m1,hndc/m1,hndm12c/m1 1 touching_illegal \ "psc spacing to ndc < 1 (Mosis #6.3)" spacing pdm12c/m1 pdc/m1,m2c/m1,nsm12c/m1 1 touching_illegal \ "pdm12c spacing to pdc or m2c or nsm12c < 1 (Mosis #6.3)" spacing psm12c/m1 psc/m1,m2c/m1 1 touching_illegal \ "psm12c spacing to psc or m2c < 1 (Mosis #6.3)" spacing ndm12c/m1 ndc/m1,m2c/m1,nsm12c/m1 1 touching_illegal \ "ndm12c spacing to ndc or m2c or nsm12c < 1 (Mosis #6.3)" spacing nsm12c/m1 nsc/m1,m2c/m1 1 touching_illegal \ "nsm12c spacing to nsc or m2c < 1 (Mosis #6.3)" spacing pm12c/m1 pc/m1,m2c/m1 1 touching_illegal \ "pm12c spacing to pc or m2c < 1 (Mosis #6.3)" spacing m123c/m2 pdm12c/m2,psm12c/m2,ndm12c/m2,nsm12c/m2,pm12c/m2,m2c/m2,m3c/m2 1 touching_illegal \ "m123c spacing to *m12c or m2c or m3c < 1 (Mosis #6.3)" spacing m234c/m3 m3c/m3,m4c/m3,m123c/m3 1 touching_illegal \ "m234c spacing to m3c or m4c or m123c < 1 (Mosis #6.3)" spacing nfet,hnfet,pfet,hpfet ndc/a,ndm12c/a,hndc/a,hndm12c/a,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psc/a,psm12c/a,hpsc/a,hpsm12c/a,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 1 touching_illegal \ "N-Transistor,P-Transistor spacing to Diffusion contact < 1 (Mosis #6.4)" spacing nfet,hnfet,pfet,hpfet gc 2 touching_illegal \ "N-Transistor,P-Transistor spacing to Generic contact < 2 (Mosis #6.4)" spacing diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a pc/a,pm12c/a 1 touching_illegal \ "Diffusion spacing to Poly contact < 1 (Mosis #6.5.b)" spacing diff,ndiff,nfet,nsd,pdiff,pfet,psd,hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a,nfet,hnfet,pfet,hpfet ndc/a,ndm12c/a,hndc/a,hndm12c/a,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psc/a,psm12c/a,hpsc/a,hpsm12c/a,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 4 touching_ok \ "Diffusion spacing to Diffusion contact < 4 (Mosis #6.5.b)" spacing pc/a,pm12c/a ndc/a,ndm12c/a,hndc/a,hndm12c/a,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psc/a,psm12c/a,hpsc/a,hpsm12c/a,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 2 touching_illegal \ "pc/a,pm12c/a spacing to ndc/a,ndm12c/a,hndc/a,hndm12c/a,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psc/a,psm12c/a,hpsc/a,hpsm12c/a,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a < 2 (Mosis #6.7)" spacing m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,m123c/m1 m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,m123c/m1 3 touching_ok \ "Metal1 spacing < 3 (Mosis #7.2)" edge4way gc space 1 m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,m123c/m1 space 1 \ "Metal1 must overlap GC contact by 1 (Mosis #7.3,7.4)" metal1 edge4way ~(m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,m123c/m1)/metal1 m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,m123c/m1 1 ~(gc)/contact 0 0 \ "Metal1(edge) cannot touch GC contact (Mosis #7.3+7.4)" contact spacing gv1 gv1 3 touching_ok \ "GV1 via spacing < 3 (Mosis #8.2)" edge4way gv1 ~(gv1)/via1 1 m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,m123c/m1 ~(gv1)/via1 1 \ "Metal1 overlap of GV1 via < 1 (Mosis #8.3)" metal1 edge4way gv1 space 1 m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,m123c/m1 space 1 \ "Metal1 must overlap GV1 via by 1 (Mosis #8.3)" metal1 edge4way ~(m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,m123c/m1)/metal1 m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,m123c/m1 1 ~(gv1)/via1 0 0 \ "Metal1(edge) cannot touch GV1 via (Mosis #8.3)" via1 spacing m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m234c/m2 m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m234c/m2 3 touching_ok \ "Metal2 spacing < 3 (Mosis #9.2)" edge4way gv1 space 1 m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m234c/m2 space 1 \ "Metal2 must overlap GV1 via by 1 (Mosis #9.3)" metal2 edge4way ~(m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m234c/m2)/metal2 m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m234c/m2 1 ~(gv1)/via1 0 0 \ "Metal2(edge) cannot touch GV1 via (Mosis #9.3)" via1 width glass 10 \ "COG width < 10 (Mosis #10.2)" edge4way ~(pad)/metal4 pad 30 ~(glass)/oxide pad 30 \ "pad overlap of COG < 30 (Mosis #10.3)" oxide spacing ecap ecap 3 touching_ok \ "Ecap spacing < 3 (Mosis #11.2)" edge4way ecap ~(ecap)/cap 5 poly,pc/a,pm12c/a ~(ecap)/cap 5 \ "Poly overlap of Ecap < 5 (Mosis #11.3)" active edge4way ~(ecap)/cap ecap 1 poly,pc/a,pm12c/a 0 0 \ "Ecap must touch Poly (Mosis #11.3x)" active edge4way poly2 space 5 ~(poly,pc/a,pm12c/a)/active space 5 \ "Poly2 spacing to Poly < 5 (Mosis #11.3c)" active spacing ecap pc/a,pm12c/a 2 touching_illegal \ "Ecap spacing to Poly contact < 2 (Mosis #11.5)" spacing ecap gc 3 touching_illegal \ "Ecap spacing to Generic contact < 3 (Mosis #11.5)" spacing poly2,ecap poly2,ecap 3 touching_ok \ "Poly2 spacing < 3 (Mosis #11.2)" spacing poly2,ecap pc/a,pm12c/a,ndc/a,ndm12c/a,hndc/a,hndm12c/a,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psc/a,psm12c/a,hpsc/a,hpsm12c/a,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 2 touching_illegal \ "Poly2 spacing to Poly contact,Diffusion contact < 2 (Mosis #11.5)" spacing poly2,ecap gc,gc 3 touching_illegal \ "Poly2 spacing to GC contact < 3 (Mosis #11.5)" spacing gc2 gc2 3 touching_ok \ "Generic contact2 spacing < 3 (Mosis #13.2)" edge4way ~(ecap)/cap ecap 3 ~(gc2)/contact ecap 3 \ "Ecap overlap of Generic contact2 < 3 (Mosis #13.3)" contact edge4way ~(ecap)/cap ecap 2 ~(p2c)/metal1 ecap 2 \ "Ecap overlap of Poly2 contact < 2 (Mosis #13.3)" metal1 edge4way gc2 space 1 m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,m123c/m1 space 1 \ "Metal1 must overlap Generic contact2 by 1 (Mosis #13.4)" metal1 edge4way ~(m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,m123c/m1)/metal1 m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,m123c/m1 1 ~(gc2)/contact 0 0 \ "Metal1(edge) cannot touch Generic contact2 (Mosis #13.4)" contact edge4way ~(poly2,ecap)/cap poly2,ecap 1 ~(p2c)/metal1 poly2,ecap 1 \ "Poly2 overlap of Poly2 contact < 1 (Mosis #13.4)" metal1 spacing gv2 gv2 3 touching_ok \ "GV2 via spacing < 3 (Mosis #14.2)" spacing gv2 m3c/m2,m123c/m2,m234c/m2 2 touching_illegal \ "GV2 via spacing to Metal3 contact < 2 (Mosis #14.2)" edge4way gv2 space 1 m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m234c/m2 space 1 \ "Metal2 must overlap GV2 via by 1 (Mosis #14.3)" metal2 edge4way ~(m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m234c/m2)/metal2 m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m234c/m2 1 ~(gv2)/via2 0 0 \ "Metal2(edge) cannot touch GV2 via (Mosis #14.3)" via2 spacing m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3 m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3 3 touching_ok \ "Metal3 spacing < 3 (Mosis #15.2)" edge4way gv2 space 1 m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3 space 1 \ "Metal3 must overlap GV2 via by 1 (Mosis #15.3)" metal3 edge4way ~(m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3)/metal3 m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3 1 ~(gv2)/via2 0 0 \ "Metal3(edge) cannot touch GV2 via (Mosis #15.3)" via2 spacing gv3 gv3 3 touching_ok \ "GV3 via spacing < 3 (Mosis #21.2)" spacing gv3 m4c/m3,m234c/m3 2 touching_illegal \ "GV3 via spacing to Metal4 contact < 2 (Mosis #21.2)" edge4way gv3 space 1 m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3 space 1 \ "Metal3 must overlap GV3 via by 1 (Mosis #21.3)" metal3 edge4way ~(m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3)/metal3 m3,m3c/m3,m123c/m3,m234c/m3,m4c/m3 1 ~(gv3)/via3 0 0 \ "Metal3(edge) cannot touch GV3 via (Mosis #21.3)" via3 spacing m4,m4c/m4,m234c/m4,pad m4,m4c/m4,m234c/m4,pad 3 touching_ok \ "Metal4 spacing < 3 (Mosis #22.2)" edge4way gv3 space 1 m4,m4c/m4,m234c/m4,pad space 1 \ "Metal4 must overlap GV3 via by 1 (Mosis #22.3)" metal4 edge4way ~(m4,m4c/m4,m234c/m4,pad)/metal4 m4,m4c/m4,m234c/m4,pad 1 ~(gv3)/via3 0 0 \ "Metal4(edge) cannot touch GV3 via (Mosis #22.3)" via3 spacing to to 4 touching_ok \ "Thick Oxide spacing < 4 (Mosis #24.2)" spacing hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd diff,ndiff,nfet,nsd,pdiff,pfet,psd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a 8 touching_illegal \ "HVDiffusion spacing to Diffusion < 8 (Mosis #24.3)" spacing to diff,ndiff,nfet,nsd,pdiff,pfet,psd,ndc/a,ndm12c/a,nsc/a,nsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a 4 touching_illegal \ "Thick Oxide spacing to Diffusion < 4 (Mosis #24.4)" edge4way ~(to)/oxide to 4 ~(hdiff,htran,hfet,hndif,hnfet,hnsd,hpdif,hpfet,hpsd,hndc/a,hndm12c/a,hnsc/a,hnsm12c/a,hpdc/a,hpdm12c/a,hpsc/a,hpsm12c/a)/active to 4 \ "Thick Oxide overlap of HVDiffusion < 4 (Mosis #24.5)" active edge4way ndc/a,ndm12c/a,hndc/a,hndm12c/a,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a ~(ndc/a,ndm12c/a,hndc/a,hndm12c/a,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a)/active 1 ~(ndc/a,ndm12c/a,hndc/a,hndm12c/a,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a)/active (~(ndc/a,ndm12c/a,hndc/a,hndm12c/a,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a),ndc/a,ndm12c/a,hndc/a,hndm12c/a,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a)/active 1 \ "Contact not rectangular (Magic rule)" edge4way pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psc/a,psm12c/a,hpsc/a,hpsm12c/a ~(pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psc/a,psm12c/a,hpsc/a,hpsm12c/a)/active 1 ~(pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psc/a,psm12c/a,hpsc/a,hpsm12c/a)/active (~(pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psc/a,psm12c/a,hpsc/a,hpsm12c/a),pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psc/a,psm12c/a,hpsc/a,hpsm12c/a)/active 1 \ "Contact not rectangular (Magic rule)" edge4way pc/a,pm12c/a ~(pc/a,pm12c/a)/active 1 ~(pc/a,pm12c/a)/active (~(pc/a,pm12c/a),pc/a,pm12c/a)/active 1 \ "Contact not rectangular (Magic rule)" edge4way gc2 ~(gc2)/contact 1 ~(gc2)/contact (~(gc2),gc2)/contact 1 \ "Contact not rectangular (Magic rule)" edge4way p2c ~(p2c)/metal1 1 ~(p2c)/metal1 (~(p2c),p2c)/metal1 1 \ "Contact not rectangular (Magic rule)" edge4way gc ~(gc)/contact 1 ~(gc)/contact (~(gc),gc)/contact 1 \ "Contact not rectangular (Magic rule)" edge4way gv1 ~(gv1)/via1 1 ~(gv1)/via1 (~(gv1),gv1)/via1 1 \ "Contact not rectangular (Magic rule)" edge4way m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1 ~(m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1)/metal1 1 ~(m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1)/metal1 (~(m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1),m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1)/metal1 1 \ "Contact not rectangular (Magic rule)" edge4way gv2 ~(gv2)/via2 1 ~(gv2)/via2 (~(gv2),gv2)/via2 1 \ "Contact not rectangular (Magic rule)" edge4way m3c/m2,m123c/m2,m234c/m2 ~(m3c/m2,m123c/m2,m234c/m2)/metal2 1 ~(m3c/m2,m123c/m2,m234c/m2)/metal2 (~(m3c/m2,m123c/m2,m234c/m2),m3c/m2,m123c/m2,m234c/m2)/metal2 1 \ "Contact not rectangular (Magic rule)" edge4way gv3 ~(gv3)/via3 1 ~(gv3)/via3 (~(gv3),gv3)/via3 1 \ "Contact not rectangular (Magic rule)" edge4way m4c/m3,m234c/m3 ~(m4c/m3,m234c/m3)/metal3 1 ~(m4c/m3,m234c/m3)/metal3 (~(m4c/m3,m234c/m3),m4c/m3,m234c/m3)/metal3 1 \ "Contact not rectangular (Magic rule)" exact_overlap gc,ndc/a,ndm12c/a,hndc/a,hndm12c/a,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psc/a,psm12c/a,hpsc/a,hpsm12c/a,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a,gc,pc/a,pm12c/a,gc exact_overlap gc2,p2c edge4way pad ~(pad)/m4 1 ~(pad)/m4 (~(pad),pad)/m4 1 \ "Contact not rectangular (Magic rule)" exact_overlap ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c exact_overlap m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2 exact_overlap m3c/m3,m123c/m3,m234c/m3 exact_overlap m4c/m4,m234c/m4 exact_overlap gv1 exact_overlap gv2 exact_overlap gv3 edge4way nfet,pfet,fet,hnfet,hpfet,hfet ~(nfet,pfet,fet,hnfet,hpfet,hfet)/active 1 ~(nfet,pfet,fet,hnfet,hpfet,hfet)/active nfet,pfet,fet,hnfet,hpfet,hfet 1 \ "Transistor cannot bend in this process (Mosis #?.?)" #CC cifstyle lambda=0.20(p) #CC cifwidth CWN 240 \ #CC "generated CIF layer CWN width will be < 12 (';cif see CWN')" #CC cifspacing CWN CWN 120 touching_ok \ #CC "generated CIF layer CWN spacing will be < 6 (';cif see CWN')" #CC cifwidth CWP 240 \ #CC "generated CIF layer CWP width will be < 12 (';cif see CWP')" #CC cifspacing CWP CWP 120 touching_ok \ #CC "generated CIF layer CWP spacing will be < 6 (';cif see CWP')" #CC cifwidth CSN 60 \ #CC "generated CIF layer CSN width will be < 3 (';cif see CSN')" #CC cifspacing CSN CSN 60 touching_ok \ #CC "generated CIF layer CSN spacing will be < 3 (';cif see CSN')" #CC cifwidth CSP 60 \ #CC "generated CIF layer CSP width will be < 3 (';cif see CSP')" #CC cifspacing CSP CSP 60 touching_ok \ #CC "generated CIF layer CSP spacing will be < 3 (';cif see CSP')" stepsize 400 end extract style TSMC0.35um(tsmc35)from:04op cscale 1 lambda 20 step 100 sidehalo 8 planeorder well 0 planeorder select 1 planeorder cap 2 planeorder active 3 planeorder metal1 4 planeorder metal2 5 planeorder metal3 6 planeorder metal4 7 planeorder oxide 8 planeorder xp 9 planeorder comment 10 planeorder contact 11 planeorder via1 12 planeorder via2 13 planeorder via3 14 resist (ndiff,hndif,ndc,ndm12c,hndc,hndm12c,nsd,hnsd,nsc,nsm12c,hnsc,hnsm12c)/active 80900 resist (pdiff,hpdif,pdc,pdm12c,hpdc,hpdm12c,psd,hpsd,psc,psm12c,hpsc,hpsm12c)/active 152700 resist (nwell,hnwell)/well 1017000 resist (pwell,hpwell)/well 1 resist (poly,pc,pm12c,pc,pm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active 8100 resist (poly2,ecap,p2c)/cap 45800 resist (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c)/metal1 70 resist (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c,m3c,m123c,m234c)/metal2 70 resist (m3,m3c,m123c,m234c,m4c,m4c,m234c)/metal3 70 resist (m4,m4c,m234c,pad)/metal4 40 contact ndc 4 63000 contact pdc 4 126700 contact pc 4 6300 contact p2c 4 31900 contact m2c 4 1490 contact m3c 4 1210 contact m4c 4 1190 #poly2 overlap (poly,pc,pm12c,pc,pm12c)/active (poly2,ecap,p2c)/cap 35.360 #nwell,cwell,pwell areacap (nwell,hnwell)/well 2.200 #ndiff # MODEL HANDLES THIS: areacap (ndiff,hndif,ndc,ndm12c,hndc,hndm12c)/active 38.760 # MODEL HANDLES THIS: overlap (ndiff,hndif,ndc,ndm12c,hndc,hndm12c)/active ~space/w 38.760 # MODEL HANDLES THIS: perimc (ndiff,hndif,ndc,ndm12c,hndc,hndm12c)/active ~(ndiff,hndif,ndc,ndm12c,hndc,hndm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active 69.200 # MODEL HANDLES THIS: sideoverlap (ndiff,hndif,ndc,ndm12c,hndc,hndm12c)/active ~(ndiff,hndif,ndc,ndm12c,hndc,hndm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active ~space/w 69.200 #pdiff #poly sidewall (poly,pc,pm12c)/active ~(poly,pc,pm12c)/active ~(poly,pc,pm12c)/active (poly,pc,pm12c)/active 11.331 areacap (poly,pc,pm12c)/active 4.074 overlap (poly,pc,pm12c)/active ~space/w 4.074 perimc (poly,pc,pm12c)/active ~(poly,pc,pm12c)/active 4.622 sideoverlap (poly,pc,pm12c)/active ~(poly,pc,pm12c)/active ~space/w 4.622 #poly2 #metal1 sidewall (m1,ndc,ndm12c,pdc,pdm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 ~(m1,ndc,ndm12c,pdc,pdm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 ~(m1,ndc,ndm12c,pdc,pdm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 (m1,ndc,ndm12c,pdc,pdm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 20.619 areacap (m1,ndc,ndm12c,pdc,pdm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 1.666 #metal1-sub blocked by ~space/a,~space/c overlap (m1,ndc,ndm12c,pdc,pdm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 ~space/w 1.666 ~space/a,~space/c perimc (m1,ndc,ndm12c,pdc,pdm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 ~(m1,ndc,ndm12c,pdc,pdm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 2.226 sideoverlap (m1,ndc,ndm12c,pdc,pdm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 ~(m1,ndc,ndm12c,pdc,pdm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 ~space/w 2.226 ~space/a,~space/c #metal1-diff blocked by ~space/c overlap (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 (ndiff,hndif,ndc,ndm12c,hndc,hndm12c)/active 1.400 ~space/c sideoverlap (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 ~(m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 (ndiff,hndif,ndc,ndm12c,hndc,hndm12c)/active 2.226 ~space/c overlap (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 (pdiff,hpdif,pdc,pdm12c,hpdc,hpdm12c)/active 1.400 ~space/c sideoverlap (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 ~(m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 (pdiff,hpdif,pdc,pdm12c,hpdc,hpdm12c)/active 2.226 ~space/c #metal1-poly blocked by ~space/c overlap (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 (poly,pc,pm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active 1.687 ~space/c sideoverlap (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 ~(m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 (poly,pc,pm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active 2.250 ~space/c sideoverlap (poly,pc,pm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active ~(poly,pc,pm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 2.250 ~space/c #metal1-poly2 not blocked overlap (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 (poly2,ecap)/cap 1.800 #metal2 sidewall (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 ~(m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 ~(m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 23.532 areacap (m2,m3c,m123c,m234c)/metal2 0.581 #metal2-sub blocked by overlap (m2,m3c,m123c,m234c)/metal2 ~space/w 0.581 ~space/a,~space/m1,~space/c perimc (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 ~(m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 0.836 sideoverlap (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 ~(m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 ~space/w 0.836 ~space/a,~space/m1,~space/c #metal2-*diff blocked by ~space/m1,~space/c overlap (m2,m3c,m123c,m234c)/metal2 (ndiff,hndif,ndc,ndm12c,hndc,hndm12c)/active 0.680 ~space/m1,~space/c sideoverlap (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 ~(m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 (ndiff,hndif,ndc,ndm12c,hndc,hndm12c)/active 0.836 ~space/m1,~space/c overlap (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 (pdiff,hpdif,pdc,pdm12c,hpdc,hpdm12c)/active 0.680 ~space/m1,~space/c sideoverlap (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 ~(m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 (pdiff,hpdif,pdc,pdm12c,hpdc,hpdm12c)/active 0.836 ~space/m1,~space/c #metal2-poly blocked by ~space/m1,~space/c overlap (m2,m3c,m123c,m234c)/metal2 (poly,pc,pm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active 0.583 ~space/m1,~space/c sideoverlap (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 ~(m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 (poly,pc,pm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active 0.840 ~space/m1,~space/c sideoverlap (poly,pc,pm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active ~(poly,pc,pm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 0.840 ~space/m1,~space/c #metal2-poly2 blocked by ~space/m1 #M2->M1 overlap (m2,m3c,m123c,m234c)/metal2 (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 1.844 sideoverlap (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 ~(m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 2.432 sideoverlap (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 ~(m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 2.432 #metal3 sidewall (m3,m3c,m123c,m234c,m4c)/metal3 ~(m3,m3c,m123c,m234c,m4c)/metal3 ~(m3,m3c,m123c,m234c,m4c)/metal3 (m3,m3c,m123c,m234c,m4c)/metal3 24.216 areacap (m3,m4c,m234c)/metal3 0.352 #metal3-sub blocked by ~space/a,~space/m1,~space/m2,~space/c overlap (m3,m4c,m234c)/metal3 ~space/w 0.352 ~space/a,~space/m1,~space/m2,~space/c perimc (m3,m3c,m123c,m234c,m4c)/metal3 ~(m3,m3c,m123c,m234c,m4c)/metal3 0.514 sideoverlap (m3,m3c,m123c,m234c,m4c)/metal3 ~(m3,m3c,m123c,m234c,m4c)/metal3 ~space/w 0.514 ~space/a,~space/m1,~space/m2,~space/c #metal3-*diff blocked by ~space/m1,~space/m2,~space/c overlap (m3,m4c,m234c)/metal3 (ndiff,hndif,ndc,ndm12c,hndc,hndm12c)/active 0.480 ~space/m1,~space/m2,~space/c sideoverlap (m3,m3c,m123c,m234c,m4c)/metal3 ~(m3,m3c,m123c,m234c,m4c)/metal3 (ndiff,hndif,ndc,ndm12c,hndc,hndm12c)/active 0.514 ~space/m1,~space/m2,~space/c overlap (m3,m4c,m234c)/metal3 (pdiff,hpdif,pdc,pdm12c,hpdc,hpdm12c)/active 0.480 ~space/m1,~space/m2,~space/c sideoverlap (m3,m3c,m123c,m234c,m4c)/metal3 ~(m3,m3c,m123c,m234c,m4c)/metal3 (pdiff,hpdif,pdc,pdm12c,hpdc,hpdm12c)/active 0.514 ~space/m1,~space/m2,~space/c #metal3-poly blocked by ~space/m1,~space/m2,~space/c overlap (m3,m4c,m234c)/metal3 (poly,pc,pm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active 0.352 ~space/m1,~space/m2,~space/c sideoverlap (m3,m3c,m123c,m234c,m4c)/metal3 ~(m3,m3c,m123c,m234c,m4c)/metal3 (poly,pc,pm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active 0.516 ~space/m1,~space/m2,~space/c sideoverlap (poly,pc,pm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active ~(poly,pc,pm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active (m3,m3c,m123c,m234c,m4c)/metal3 0.516 ~space/m1,~space/m2,~space/c #metal3-poly2 blocked by ~space/m1,~space/m2 #M3->M1 #metal3-metal1 blocked by ~space/m2 overlap (m3,m4c,m234c)/metal3 (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 0.601 ~space/m2 sideoverlap (m3,m3c,m123c,m234c,m4c)/metal3 ~(m3,m3c,m123c,m234c,m4c)/metal3 (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 0.864 ~space/m2 sideoverlap (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 ~(m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 (m3,m3c,m123c,m234c,m4c)/metal3 0.864 ~space/m2 #M3->M2 overlap (m3,m4c,m234c)/metal3 (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 1.844 sideoverlap (m3,m3c,m123c,m234c,m4c)/metal3 ~(m3,m3c,m123c,m234c,m4c)/metal3 (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 2.430 sideoverlap (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 ~(m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 (m3,m3c,m123c,m234c,m4c)/metal3 2.430 #metal4 sidewall (m4,m4c,m234c,pad)/metal4 ~(m4,m4c,m234c,pad)/metal4 ~(m4,m4c,m234c,pad)/metal4 (m4,m4c,m234c,pad)/metal4 64.860 areacap (m4,pad)/metal4 0.235 #metal4-sub blocked by ~space/a,~space/m1,~space/m2,~space/m3,~space/c overlap (m4,pad)/metal4 ~space/w 0.235 ~space/a,~space/m1,~space/m2,~space/m3,~space/c perimc (m4,m4c,m234c,pad)/metal4 ~(m4,m4c,m234c,pad)/metal4 0.802 sideoverlap (m4,m4c,m234c,pad)/metal4 ~(m4,m4c,m234c,pad)/metal4 ~space/w 0.802 ~space/a,~space/m1,~space/m2,~space/m3,~space/c #metal4-*diff blocked by ~space/m1,~space/m2,~space/m3,~space/c overlap (m4,pad)/metal4 (ndiff,hndif,ndc,ndm12c,hndc,hndm12c)/active 0.400 ~space/m1,~space/m2,~space/m3,~space/c sideoverlap (m4,m4c,m234c,pad)/metal4 ~(m4,m4c,m234c,pad)/metal4 (ndiff,hndif,ndc,ndm12c,hndc,hndm12c)/active 0.802 ~space/m1,~space/m2,~space/m3,~space/c overlap (m4,pad)/metal4 (pdiff,hpdif,pdc,pdm12c,hpdc,hpdm12c)/active 0.400 ~space/m1,~space/m2,~space/m3,~space/c sideoverlap (m4,m4c,m234c,pad)/metal4 ~(m4,m4c,m234c,pad)/metal4 (pdiff,hpdif,pdc,pdm12c,hpdc,hpdm12c)/active 0.802 ~space/m1,~space/m2,~space/m3,~space/c #metal4-poly blocked by ~space/m1,~space/m2,~space/m3,~space/c overlap (m4,pad)/metal4 (poly,pc,pm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active 0.271 ~space/m1,~space/m2,~space/m3,~space/c sideoverlap (m4,m4c,m234c,pad)/metal4 ~(m4,m4c,m234c,pad)/metal4 (poly,pc,pm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active 0.666 ~space/m1,~space/m2,~space/m3,~space/c sideoverlap (poly,pc,pm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active ~(poly,pc,pm12c,nfet,pfet,fet,hnfet,hpfet,hfet)/active (m4,m4c,m234c,pad)/metal4 0.666 ~space/m1,~space/m2,~space/m3,~space/c #metal4-poly2 blocked by ~space/m1,~space/m2,~space/m3 #M4->M1 #metal4-metal1 blocked by ~space/m2,~space/m3 overlap (m4,pad)/metal4 (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 0.359 ~space/m2,~space/m3 sideoverlap (m4,m4c,m234c,pad)/metal4 ~(m4,m4c,m234c,pad)/metal4 (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 1.038 ~space/m2,~space/m3 sideoverlap (m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 ~(m1,ndc,ndm12c,nsc,nsm12c,pdc,pdm12c,psc,psm12c,hndc,hndm12c,hnsc,hnsm12c,hpdc,hpdm12c,hpsc,hpsm12c,pc,pm12c,p2c,m2c,m123c)/metal1 (m4,m4c,m234c,pad)/metal4 1.038 ~space/m2,~space/m3 #M4->M2 #metal4-metal2 blocked by ~space/m3 overlap (m4,pad)/metal4 (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 0.601 ~space/m3 sideoverlap (m4,m4c,m234c,pad)/metal4 ~(m4,m4c,m234c,pad)/metal4 (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 1.698 ~space/m3 sideoverlap (m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 ~(m2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,hpdm12c,hndm12c,hpsm12c,hnsm12c,m3c,m234c)/metal2 (m4,m4c,m234c,pad)/metal4 1.698 ~space/m3 #M4->M3 overlap (m4,pad)/metal4 (m3,m3c,m123c,m234c,m4c)/metal3 1.844 sideoverlap (m4,m4c,m234c,pad)/metal4 ~(m4,m4c,m234c,pad)/metal4 (m3,m3c,m123c,m234c,m4c)/metal3 4.604 sideoverlap (m3,m3c,m123c,m234c,m4c)/metal3 ~(m3,m3c,m123c,m234c,m4c)/metal3 (m4,m4c,m234c,pad)/metal4 4.604 #metal5 #metal6 #metal7 #metali #fets fet hpfet hpdif,hpdc 2 hpfet Vdd! hnwell 52 181 fet hpfet hpdif,hpdc 1 hpfet Vdd! hnwell 52 181 fet hnfet hndif,hndc 2 hnfet Gnd! hpwell 53 181 fet hnfet hndif,hndc 1 hnfet Gnd! hpwell 53 181 fet pfet pdiff,pdc 2 pfet Vdd! nwell 52 181 fet pfet pdiff,pdc 1 pfet Vdd! nwell 52 181 fet nfet ndiff,ndc 2 nfet Gnd! pwell 53 181 fet nfet ndiff,ndc 1 nfet Gnd! pwell 53 181 fetresis hpfet linear 18703 fetresis hpfet saturation 18703 fetresis hnfet linear 6839 fetresis hnfet saturation 6839 fetresis pfet linear 14879 fetresis pfet saturation 14879 fetresis nfet linear 5493 fetresis nfet saturation 5493 end wiring contact pdcontact 4 metal1 0 pdiff 0 contact ndcontact 4 metal1 0 ndiff 0 contact pcontact 4 metal1 0 poly 0 contact m2contact 4 metal1 0 metal2 0 contact m3contact 5 metal2 0 metal3 1 contact m4contact 4 metal3 0 metal4 0 end router layer2 metal2 3 m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 4 poly,ndiff,nsd,pdiff,psd,hndif,hnsd,hpdif,hpsd,m1 1 layer1 metal1 3 m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1 3 contacts m2contact 4 gridspacing 8 end plowing fixed nfet,pfet,glass,pad,hnfet,hpfet covered nfet,pfet,hnfet,hpfet drag nfet,pfet,hnfet,hpfet end plot style colorversatec ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a yellow \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a cyan \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a yellow \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a cyan \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a yellow \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a cyan \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a magenta \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a yellow \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a cyan \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a magenta \ 2A2A 0000 A2A2 0000 \ 2A2A 0000 A2A2 0000 \ 2A2A 0000 A2A2 0000 \ 2A2A 0000 A2A2 0000 poly,pc/a,pm12c/a magenta \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA nfet,hnfet yellow \ 0505 8282 1414 0A0A \ 5050 2828 4141 A0A0 \ 0505 8282 1414 0A0A \ 5050 2828 4141 A0A0 nfet,hnfet cyan \ 0000 0505 0000 1414 \ 0000 5050 0000 4141 \ 0000 0505 0000 1414 \ 0000 5050 0000 4141 nfet,hnfet magenta \ 5050 2828 4141 A0A0 \ 0505 8282 1414 0A0A \ 5050 2828 4141 A0A0 \ 0505 8282 1414 0A0A pfet,hpfet yellow \ 6363 A0A0 5050 2828 \ 3636 0A0A 0505 8282 \ 6363 A0A0 5050 2828 \ 3636 0A0A 0505 8282 pfet,hpfet cyan \ 0000 5151 0000 5454 \ 0000 1515 0000 1515 \ 0000 5151 0000 5454 \ 0000 1515 0000 1515 pfet,hpfet magenta \ 9494 0A0A 2525 8282 \ 4949 A0A0 5252 2828 \ 9494 0A0A 2525 8282 \ 4949 A0A0 5252 2828 poly2,ecap yellow \ FFFF FFFF FFFF FFFF \ FFFF FFFF FFFF FFFF \ FFFF FFFF FFFF FFFF \ FFFF FFFF FFFF FFFF m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,m123c/m1 cyan \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m234c/m2 cyan \ 0000 1111 0000 4444 \ 0000 1111 0000 4444 \ 0000 1111 0000 4444 \ 0000 1111 0000 4444 m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m234c/m2 magenta \ 0000 4444 0000 1111 \ 0000 4444 0000 1111 \ 0000 4444 0000 1111 \ 0000 4444 0000 1111 m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,hpdm12c/m1,hndm12c/m1,hpsm12c/m1,hnsm12c/m1,gv1 black \ 0000 6666 6666 0000 \ 0000 9999 9999 0000 \ 0000 6666 6666 0000 \ 0000 9999 9999 0000 pad,glass black \ 0300 0700 0E00 1C00 \ 3800 7000 E000 C000 \ 00C0 00E0 0070 0038 \ 001C 000E 0007 0003 nwell,hnwell yellow \ 0800 1000 2000 4000 \ 8000 0001 0002 0004 \ 0008 0010 0020 0040 \ 0080 0010 0200 0400 nwell,hnwell cyan \ 1000 2000 4000 8000 \ 0001 0002 0004 0008 \ 0010 0020 0040 0080 \ 0100 0200 0400 0800 pwell,hpwell yellow \ 1000 0400 0400 0100 \ 0100 0040 0040 0010 \ 0010 0004 0004 0001 \ 0001 4000 4000 1000 pwell,hpwell cyan \ 0000 0800 0000 0200 \ 0000 0080 0000 0020 \ 0000 0008 0000 0002 \ 0000 8000 0000 2000 pwell,hpwell magenta \ 0800 0000 0200 0000 \ 0080 0000 0020 0000 \ 0008 0000 0002 0000 \ 8000 0000 2000 0000 m3c/m2,m123c/m2,m234c/m2,gv2 black \ 0100 0000 0000 0000 \ 1010 0000 0000 0000 \ 0001 0000 0000 0000 \ 1010 0000 0000 0000 m3c/m2,m123c/m2,m234c/m2,gv2 cyan \ 0280 0000 0820 0000 \ 2008 0000 8002 0000 \ 8002 0000 2008 0000 \ 0820 0000 0280 0000 m3c/m2,m123c/m2,m234c/m2,gv2 magenta \ 0100 06C0 0440 1830 \ 1010 600C 4004 8003 \ 0001 C006 4004 3018 \ 1010 0C60 0440 0380 m3c/m2,m123c/m2,m234c/m2,gv2 black \ 0820 0820 0820 0FE0 \ E00F 2008 2008 2008 \ 2008 2008 2008 E00F \ 0000 0FE0 0820 0820 error_p,error_s,error_ps black \ 0000 3C3C 4646 4A4A \ 5252 6262 3C3C 0000 \ 0000 3C3C 4646 4A4A \ 5252 6262 3C3C 0000 magnet yellow \ AAAA 0000 5555 0000 \ AAAA 0000 5555 0000 \ AAAA 0000 5555 0000 \ AAAA 0000 5555 0000 fence magenta \ FFFF 0000 0000 0000 \ 0000 0000 0000 0000 \ FFFF 0000 0000 0000 \ 0000 0000 0000 0000 rotate cyan \ 0000 E0E0 E0E0 E0E0 \ 0000 0000 0000 0000 \ 0000 E0E0 E0E0 E0E0 \ 0000 0000 0000 0000 pc/a,pm12c/a,ndc/a,ndm12c/a,hndc/a,hndm12c/a,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psc/a,psm12c/a,hpsc/a,hpsm12c/a,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a,gc,gc,gc X style versatec pfet,hpfet \ 07c0 0f80 1f00 3e00 \ 7c00 f800 f001 e003 \ c007 800f 001f 003e \ 00c7 00f8 01f0 03e0 nfet,hnfet \ 1f00 0f80 07c0 03e0 \ 01f0 00f8 007c 003e \ 001f 800f c007 e003 \ f001 f800 7c00 3e00 gv1 \ c3c3 c3c3 0000 0000 \ 0000 0000 c3c3 c3c3 \ c3c3 c3c3 0000 0000 \ 0000 0000 c3c3 c3c3 pwell,hpwell \ 2020 2020 2020 2020 \ 2020 2020 2020 2020 \ 0000 0000 0000 0000 \ 0000 0000 0000 0000 nwell,hnwell \ 0808 0404 0202 0101 \ 0000 0000 0000 0000 \ 0808 0404 0202 0101 \ 0000 0000 0000 0000 poly,pc/a,pm12c/a,nfet,hnfet,pfet,hpfet \ 0808 0400 0202 0101 \ 8080 4000 2020 1010 \ 0808 0004 0202 0101 \ 8080 0040 2020 1010 m1,ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,hndc/m1,hndm12c/m1,hnsc/m1,hnsm12c/m1,hpdc/m1,hpdm12c/m1,hpsc/m1,hpsm12c/m1,pc/m1,pm12c/m1,p2c,m2c/m1,m123c/m1 \ 8080 0000 0000 0000 \ 0808 0000 0000 0000 \ 8080 0000 0000 0000 \ 0808 0000 0000 0000 pad,glass \ 0000 0000 1c1c 3e3e \ 3636 3e3e 1c1c 0000 \ 0000 0000 1c1c 3e3e \ 3636 3e3e 1c1c 0000 nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a \ 0808 1414 2222 4141 \ 8080 4040 2020 1010 \ 0808 1414 2222 4141 \ 8080 4040 2020 1010 m2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,hpdm12c/m2,hndm12c/m2,hpsm12c/m2,hnsm12c/m2,m3c/m2,m234c/m2 \ 0000 1111 0000 0000 \ 0000 1111 0000 0000 \ 0000 1111 0000 0000 \ 0000 1111 0000 0000 pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,pfet,hpfet \ 0000 0808 5555 8080 \ 0000 8080 5555 0808 \ 0000 0808 5555 8080 \ 0000 8080 5555 0808 psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a \ 1414 2222 0000 2222 \ 4141 2222 0000 2222 \ 1414 2222 0000 2222 \ 4141 2222 0000 2222 ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a,nfet,hnfet \ 0808 1010 2020 4040 \ 8080 4141 2222 1414 \ 0808 1010 2020 4040 \ 8080 4141 2222 1414 pc/a,pm12c/a,ndc/a,ndm12c/a,hndc/a,hndm12c/a,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psc/a,psm12c/a,hpsc/a,hpsm12c/a,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a,gc,gc,gc X style gremlin pfet,hpfet 9 nfet,hnfet 10 gv1 11 pwell,hpwell 15 nwell,hnwell 16 poly,pc/a,pm12c/a,nfet,hnfet,pfet,hpfet 19 pc/a,pm12c/a,ndc/a,ndm12c/a,hndc/a,hndm12c/a,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psc/a,psm12c/a,hpsc/a,hpsm12c/a,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a,gc,gc,gc 22 pad,glass 23 nsd,hnsd,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a 24 gv1 28 pdiff,hpdif,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,pfet,hpfet 29 psd,hpsd,psc/a,psm12c/a,hpsc/a,hpsm12c/a 30 ndiff,hndif,ndc/a,ndm12c/a,hndc/a,hndm12c/a,nfet,hnfet 31 pc/a,pm12c/a,ndc/a,ndm12c/a,hndc/a,hndm12c/a,pdc/a,pdm12c/a,hpdc/a,hpdm12c/a,psc/a,psm12c/a,hpsc/a,hpsm12c/a,nsc/a,nsm12c/a,hnsc/a,hnsm12c/a,gc,gc,gc,gv1 X end