tech scmos end version version 2001a description "SCMOS: Submit as technology.lambda: SCN4M_SUBM.20 [to process: TSMC35]" end planes well,w implant,i select,s active,a metal1,m1 metal2,m2 metal3,m3 metal4,m4 oxide,ox comment xp contact via1,v1 via2,v2 via3,v3 fill end types well nwell,nw active nwr well pwell,pw implant n_field_implant,nfi implant p_field_implant,pfi select nselect,ns select pselect,ps active ntransistor,nfet active ptransistor,pfet active diffusion,diff active transistor,fet active ndiffusion,ndif,green active pdiffusion,pdif,brown active ndcontact,ndc active pdcontact,pdc active psubstratepdiff,pohmicdiff,pod,ppdiff,ppd,psd active nsubstratendiff,nohmicdiff,nod,nndiff,nnd,nsd active psubstratepcontact,pohmiccontact,poc,pwcontact,pwc,psc active nsubstratencontact,nohmiccontact,noc,nwcontact,nwc,nsc active nwsd active nwsc active polysilicon,red,poly,p active polycontact,pcontact,polycut,pc contact genericcontact,gcontact,gc metal1 metal1,m1,blue metal1 pseudo_rmetal1,prm1 metal1 rmetal1,rm1 metal1 fillm1,fm1 metal1 m2contact,m2cut,m2c,via1,v1 metal1 pm12contact,pm12c metal1 pdm12contact,pdm12c metal1 psm12contact,psm12c,pom12c,pwm12c metal1 ndm12contact,ndm12c metal1 nsm12contact,nsm12c,nom12c,nwm12c metal1 nwsm12contact,nwsm12c metal2 metal2,m2,purple metal2 pseudo_rmetal2,prm2 metal2 rmetal2,rm2 metal2 fillm2,fm2 via1 gv1 metal2 m3contact,m3cut,m3c,via2,v2 metal2 m123contact,m123c metal3 metal3,m3,cyan metal3 pseudo_rmetal3,prm3 metal3 rmetal3,rm3 metal3 fillm3,fm3 via2 gv2 metal3 m234contact,m234c metal3 m4contact,m4cut,m4c,via3,v3 metal4 metal4,m4,yellow metal4 pseudo_rmetal4,prm4 metal4 rmetal4,rm4 metal4 fillm4,fm4 via3 gv3 metal4 pad oxide glass active silicide_block,sb active poly_resist,pres active pseudo_rpoly,prp active rpoly,rp active pseudo_rndiffusion,prnd active rndiffusion,rndiff,rnd active pseudo_rpdiffusion,prpd active rpdiffusion,rpdiff,rpd active pseudo_rnwell,prnwell,prnw active rnwell,rnw active pseudo_nwr,pnwr implant filln,fn fill filla,fa fill fillb,fb active fillp,fp active fillapm,fapm active activen_resist,anres active activep_resist,apres xp xp xp m1p xp m2p xp m3p xp m4p comment comment comment bb end contact pc poly metal1 ndc ndiff metal1 pdc pdiff metal1 nsc nsd metal1 nwsc nwsd metal1 psc psd metal1 m2c metal1 metal2 m3c metal2 metal3 m4c metal3 metal4 pm12c poly metal1 metal2 pdm12c pdiff metal1 metal2 psm12c psd metal1 metal2 ndm12c ndiff metal1 metal2 nsm12c nsd metal1 metal2 nwsm12c nwsd metal1 metal2 m123c metal1 metal2 metal3 m234c metal2 metal3 metal4 end styles styletype mos nwr 54 pnwr 53 nwsd 3 nwsd 54 nwsc 3 nwsc 20 nwsc 32 nwsc 54 nwell 12 pwell 13 nfi 53 pfi 54 nselect 43 pselect 44 diff 25 tran 2 tran 4 ndiff 2 pdiff 4 nsd 3 psd 5 nfet 6 nfet 7 pfet 8 pfet 9 ndc 2 ndc 20 ndc 32 pdc 4 pdc 20 pdc 32 nsc 3 nsc 20 nsc 32 psc 5 psc 20 psc 32 poly 1 pcontact 1 pcontact 20 pcontact 32 gc 32 metal1 20 rm1 20 rm1 48 prm1 48 m1p 20 m1p 34 fm1 20 fm1 34 fp 1 fp 34 fa 32 fb 45 fb 34 fn 45 fn 34 fapm 1 fapm 20 fapm 21 fapm 34 gv1 55 m2contact 20 m2contact 21 m2contact 55 pm12contact 1 pm12contact 20 pm12contact 21 pm12contact 32 pm12contact 55 ndm12c 2 ndm12c 20 ndm12c 21 ndm12c 32 ndm12c 55 nsm12c 3 nsm12c 20 nsm12c 21 nsm12c 32 nsm12c 55 nwsm12c 3 nwsm12c 20 nwsm12c 21 nwsm12c 32 nwsm12c 55 nwsm12c 54 pdm12c 4 pdm12c 20 pdm12c 21 pdm12c 32 pdm12c 55 psm12c 5 psm12c 20 psm12c 21 psm12c 32 psm12c 55 metal2 21 rm2 21 rm2 48 prm2 48 m2p 21 m2p 34 fm2 21 fm2 34 gv2 56 m3contact 21 m3contact 22 m3contact 56 m123c 20 m123c 21 m123c 22 m123c 55 m123c 56 metal3 22 rm3 22 rm3 48 prm3 48 m3p 22 m3p 34 fm3 22 fm3 34 gv3 57 m4contact 22 m4contact 23 m4contact 57 m234contact 21 m234contact 22 m234contact 23 m234contact 56 m234contact 57 metal4 23 rm4 23 rm4 48 prm4 48 m4p 23 m4p 34 fm4 23 fm4 34 pad 22 pad 23 pad 34 pad 38 glass 34 xp 25 xp 34 sb 10 pres 47 pres 48 rp 47 rp 48 prp 48 anres 2 anres 48 rnd 2 rnd 48 prnd 48 apres 4 apres 53 rpd 4 rpd 53 prpd 53 rnw 12 rnw 53 prnw 54 comment 45 bb 32 error_p 42 error_s 42 error_ps 42 magnet 54 rotate 57 fence 59 end compose compose nfet poly ndiff compose pfet poly pdiff paint diff nselect ndiff paint diff pselect pdiff compose tran poly diff paint tran nselect nfet paint tran pselect pfet paint psd ns ndiff paint nsd ps pdiff paint ndiff ps psd paint pdiff ns nsd paint pad m1 pad paint pad m2 pad paint pad m2c pad paint pfi nwell nfi paint nfi pwell pfi paint anres nwell apres paint apres pwell anres paint ndc nwell pdc paint nfet nwell pfet paint ndiff nwell pdiff paint psd nwell nsd paint psc nwell nsc paint pdc pwell ndc paint pfet pwell nfet paint pdiff pwell ndiff paint nsd pwell psd paint nsc pwell psc paint pad m3 pad paint pad m4 pad compose pres poly sb paint sb poly pres paint poly sb pres erase pres sb poly compose anres ndiff sb paint sb ndiff anres paint ndiff sb anres erase anres sb ndiff compose apres pdiff sb paint sb pdiff apres paint pdiff sb apres erase apres sb pdiff #CRE/CRM compose rm1 prm1 m1 compose rm2 prm2 m2 compose rm3 prm3 m3 compose rm4 prm4 m4 compose rp prp poly compose rnd prnd ndiff compose rpd prpd pdiff paint nwell rnw space paint nwell nwr space paint nwell prnw space paint poly fp fp paint m1 fm1 fm1 paint m2 fm2 fm2 paint m3 fm3 fm3 paint m4 fm4 fm4 end connect nwell,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,nsd,nwsd nwell,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,nsd,nwsd pwell,psc/a,psm12c/a,psd pwell,psc/a,psm12c/a,psd m1,fm1,fapm,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 m1,fm1,fapm,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 m2,fm2,fapm,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 m2,fm2,fapm,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 m3,fm3,fapm,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 m3,fm3,fapm,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 m4,fm4,fapm,m4c/m4,m234c/m4 m4,fm4,fapm,m4c/m4,m234c/m4 ndiff,nsd,nwsd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdiff,psd,pdc/a,pdm12c/a,psc/a,psm12c/a ndiff,nsd,nwsd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdiff,psd,pdc/a,pdm12c/a,psc/a,psm12c/a poly,fp,nfet,pfet,fet,fapm,pc/a,pm12c/a poly,fp,nfet,pfet,fet,fapm,pc/a,pm12c/a gc poly,fp,ndiff,pdiff,nsd,nwsd,psd,m1,fm1,fapm,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 gv1 m1,fm1,fapm,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2,fm2,fapm,m3c/m2,m123c/m2,m234c/m2 gv2 m2,fm2,fapm,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3,fm3,fapm,m4c/m3,m234c/m3 gv3 m3,fm3,fapm,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4,fm4,fapm pad m1,fm1,m2,fm2,m3,fm3,m4,fm4 rm1 prm1 rm2 prm2 rm3 prm3 rm4 prm4 rnw prnw nwr pnwr rp prp rnd prnd rpd prpd pres sb anres sb apres sb end cifoutput style lambda=0.20(p) scalefactor 20 10 layer CWN nwell,rnw,nwr,nwsd,nwsc bloat-or pdiff,apres,rpd,pdc/a,pdm12c/a,pfet * 120 bloat-or nsd,nsc/a,nsm12c/a * 60 bloat-or nfi * 80 grow 60 shrink 60 labels nwell,rnw,nwr,nwsd,nwsc calma 42 0 layer CWNR nwsd,nwsc,nwr grow 140 calma 91 0 layer CWND nwr labels nwr calma 92 0 layer CAA nwsd,nwsc,nwr grow 100 labels nwsd,nwsc calma 43 0 layer CSN bloat-or nwsd,nwsc * 80 nwr 0 calma 43 0 templayer TNWR bloat-or nwr * 100 nwsd,nwsc 40 templayer TCSB nwsd,nwsc grow 40 and-not TNWR layer CSB nwsd,nwsc,nwr grow 140 and-not TCSB calma 29 0 layer CRNW pnwr labels pnwr calma 93 0 layer CWP pwell bloat-or ndiff,anres,rnd,ndc/a,ndm12c/a,nfet * 120 bloat-or psd,psc/a,psm12c/a * 60 bloat-or pfi * 80 grow 60 shrink 60 and-not CWN labels pwell calma 41 0 templayer TNS ns templayer TPS ps #we give priority to selects autogenerated around diffusions (vrs. ohmics) #XDP = (pdiff*40) Or ps #XDN = (ndiff*40) Or ns #FSP = ((pdiff*40,psc*40) Or XDP And-Not XDN Or ps shrink-grow #FSN = ((ndiff*40,nsc*40) Or XDN And-Not FDP Or ns shrink-grow #CSN = FSN #CSP = FSP #diffusion auto-nselect (will have priority) templayer XDN bloat-or ndiff,anres,rnd,ndc/a,ndm12c/a * 40 psd,psc/a,psm12c/a 0 or TNS #diffusion auto-pselect (will have priority) templayer XDP bloat-or pdiff,apres,rpd,pdc/a,pdm12c/a * 40 nsd,nsc/a,nsm12c/a 0 or TPS #final pselect templayer FSP bloat-or pdiff,apres,rpd,pfet,psd,pdc/a,pdm12c/a,psc/a,psm12c/a,pfet * 40 ndiff,anres,rnd,ndc/a,ndm12c/a,nsd,nsc/a,nsm12c/a,nfet 0 or XDP #give diff nselect priority and-not XDN or TPS shrink 20 grow 20 grow 20 shrink 20 #final nselect templayer FSN bloat-or ndiff,anres,rnd,nfet,nsd,nwsd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,nfet * 40 pdiff,apres,rpd,pdc/a,pdm12c/a,psd,psc/a,psm12c/a,pfet 0 and-not nwr or XDN #never conflict with final pselect and-not FSP #drawn select always goes or TNS shrink 20 grow 20 grow 20 shrink 20 layer CSN FSN calma 45 0 layer CSP FSP calma 44 0 layer CAA diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,pfet,pfet,fet labels diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,pfet,pfet,fet calma 43 0 layer CCA nwsc/m1,nwsm12c/m1 squares 40 40 60 calma 48 0 layer CCA ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1 squares 20 40 60 calma 48 0 layer CCA pdc/m1,pdm12c/m1,psc/m1,psm12c/m1 squares 20 40 60 calma 48 0 layer CPG poly,pres,rp,nfet,pfet,fet,pc/a,pm12c/a labels poly,pres,rp,nfet,pfet,fet,pc/a,pm12c/a calma 46 0 layer CCP pc/m1,pm12c/m1 squares 20 40 60 calma 47 0 layer CCC gc squares 0 40 60 calma 25 0 layer CV1 m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 squares 20 40 60 calma 50 0 layer CV1 gv1 squares 0 40 60 calma 50 0 layer CV2 m3c/m2,m123c/m2,m234c/m2 squares 20 40 60 calma 61 0 layer CV2 gv2 squares 0 40 60 calma 61 0 layer CV3 m4c/m3,m234c/m3 squares 20 40 60 calma 30 0 layer CV3 gv3 squares 0 40 60 calma 30 0 templayer XPAD1 pad shrink 120 templayer XPAD2 XPAD1 shrink 120 layer CM4 pad labels pad calma 31 0 layer CV3 XPAD2 squares 40 40 200 calma 30 0 layer CM3 pad labels pad calma 62 0 layer CV2 XPAD2 squares 160 40 200 calma 61 0 layer CM2 pad labels pad calma 51 0 layer CV1 XPAD2 squares 40 40 200 calma 50 0 layer CM1 pad calma 49 0 layer CM1 m1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 labels m1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 calma 49 0 layer CM2 m2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 labels m2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 calma 51 0 layer CMFP m1p labels m1p calma 81 0 layer CMSP m2p labels m2p calma 82 0 layer 100 fp labels fp calma 100 0 layer 101 fm1 labels fm1 calma 101 0 layer 102 fm2 labels fm2 calma 102 0 layer 103 fm3 labels fm3 calma 103 0 layer 104 fm4 labels fm4 calma 104 0 layer 109 fa or fb squares 0 200 80 labels fa calma 109 0 layer 119 fn calma 119 0 layer 110 fapm labels fapm calma 110 0 # layer CPG fp layer CPG fp,fapm squares 0 200 80 labels fp calma 46 0 # layer CM1 fm1 layer CM1 fm1,fapm squares 0 200 80 labels fm1 calma 49 0 # layer CM2 fm2 layer CM2 fm2,fapm squares 0 200 80 labels fm2 calma 51 0 # layer CM3 fm3 layer CM3 fm3,fapm squares 0 200 80 labels fm3 calma 62 0 layer CM3 m3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 labels m3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 calma 62 0 layer CMTP m3p labels m3p calma 83 0 layer CM4 m4,rm4,m4c/m4,m234c/m4 labels m4,rm4,m4c/m4,m234c/m4 calma 31 0 layer CMQP m4p labels m4p calma 84 0 # layer CM4 fm4 layer CM4 fm4,fapm squares 0 200 80 labels fm4 calma 31 0 layer COG pad shrink 500 labels pad calma 52 0 layer COG glass labels glass calma 52 0 layer CFI nfi,pfi labels nfi,pfi calma 27 0 layer CSB sb,pres,anres,apres labels sb,pres,anres,apres calma 29 0 #CRE/CRM layer CRW rnw,prnw labels rnw,prnw calma 65 0 layer CRG rp,prp,pres labels rp,prp,pres calma 67 0 layer CRD rnd,rpd,prnd,prpd,anres,apres labels rnd,rpd,prnd,prpd,anres,apres calma 66 0 layer CRE rnw,rp,rnd,rpd,pres,anres,apres labels rnw,rp,rnd,rpd,pres,anres,apres calma 64 0 layer CRF rm1,prm1 labels rm1,prm1 calma 71 0 layer CRS rm2,prm2 labels rm2,prm2 calma 72 0 layer CRT rm3,prm3 labels rm3,prm3 calma 73 0 layer CRQ rm4,prm4 labels rm4,prm4 calma 74 0 #CRE/CRM layer CRM rm1,prm1,rm2,prm2,rm3,prm3,rm4,prm4 #CRE/CRM calma 70 0 layer CX comment labels comment calma 63 0 layer XP pad,xp labels pad,xp calma 26 0 style fill-only scalefactor 20 10 layer 100 fp calma 100 0 layer 101 fm1 calma 101 0 layer 102 fm2 calma 102 0 layer 103 fm3 calma 103 0 layer 104 fm4 calma 104 0 layer 109 fa or fb calma 109 0 layer 119 fn calma 119 0 style fapm-boxes # this output style creates fill boxes automatically (to meet minimum # density requirements for poly and metal layers) 5 microns outside of # drawn layout IF: 1. you have a flattened version of your chip, # 2. over which you paint the special fill layer 'fa', preferably with # a size that is a multiple of 10 + n * (10 + 4), 3. set 'cif # ostype fapm-boxes' and cif out to a file (this actually creates the # fill boxes on cif/strm layer '110' using the magic 'squares' # command), 4. cif in the resulting file (which creates boxes on magic # layer 'fapm') and place this cell onto your chip (and verify absence # of drc errors or shorts), then 5. cif out under your regular cif out # style, where the 'fapm' layer creates fill boxes on poly and all # metal layers. scalefactor 20 10 templayer CRIT fapm,fn,diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,pfet,pfet,fet,poly,pres,rp,nfet,pfet,fet,pc/a,pm12c/a or fm1,m1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 or fm2,m2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 or fm3,m3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 or fm4,m4,rm4,m4c/m4,m234c/m4 or glass,pad grow 500 and fa layer 110 fa squares 0 200 80 and-not CRIT shrink 90 grow 90 or fapm labels fapm calma 110 0 style fapm-stripes scalefactor 20 10 # this output style creates the above layer 110 as stripes for reduced size # HOWEVER it requires each 'fa' box to first be an exact multiple as above # and then *replacing* the left side (1-lambda wide) stripe of each 'fa' box # to be a 1-lambda wide layer 'fb' box -- else you won't get strips! templayer CRIT fapm,fn,diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,pfet,pfet,fet,poly,pres,rp,nfet,pfet,fet,pc/a,pm12c/a or fm1,m1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 or fm2,m2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 or fm3,m3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 or fm4,m4,rm4,m4c/m4,m234c/m4 or glass,pad grow 500 and fa templayer FB fa or fb squares 0 200 80 and-not CRIT layer 110 fa squares 0 200 80 and-not CRIT or FB shrink 90 grow 90 or fapm labels fapm calma 110 0 style lambda=0.20(cp) scalefactor 20 10 layer CWN nwell,rnw,nwr,nwsd,nwsc bloat-or pdiff,apres,rpd,pdc/a,pdm12c/a,pfet * 120 bloat-or nsd,nsc/a,nsm12c/a * 60 bloat-or nfi * 80 grow 60 shrink 60 labels nwell,rnw,nwr,nwsd,nwsc calma 42 0 layer CWNR nwsd,nwsc,nwr grow 140 calma 91 0 layer CWND nwr labels nwr calma 92 0 layer CAA nwsd,nwsc,nwr grow 100 labels nwsd,nwsc calma 43 0 layer CSN bloat-or nwsd,nwsc * 80 nwr 0 calma 43 0 templayer TNWR bloat-or nwr * 100 nwsd,nwsc 40 templayer TCSB nwsd,nwsc grow 40 and-not TNWR layer CSB nwsd,nwsc,nwr grow 140 and-not TCSB calma 29 0 layer CRNW pnwr labels pnwr calma 93 0 layer CWP pwell bloat-or ndiff,anres,rnd,ndc/a,ndm12c/a,nfet * 120 bloat-or psd,psc/a,psm12c/a * 60 bloat-or pfi * 80 grow 60 shrink 60 and-not CWN labels pwell calma 41 0 templayer TNS ns templayer TPS ps #we give priority to selects autogenerated around diffusions (vrs. ohmics) #XDP = (pdiff*40) Or ps #XDN = (ndiff*40) Or ns #FSP = ((pdiff*40,psc*40) Or XDP And-Not XDN Or ps shrink-grow #FSN = ((ndiff*40,nsc*40) Or XDN And-Not FDP Or ns shrink-grow #CSN = FSN #CSP = FSP #diffusion auto-nselect (will have priority) templayer XDN bloat-or ndiff,anres,rnd,ndc/a,ndm12c/a * 40 psd,psc/a,psm12c/a 0 or TNS #diffusion auto-pselect (will have priority) templayer XDP bloat-or pdiff,apres,rpd,pdc/a,pdm12c/a * 40 nsd,nsc/a,nsm12c/a 0 or TPS #final pselect templayer FSP bloat-or pdiff,apres,rpd,pfet,psd,pdc/a,pdm12c/a,psc/a,psm12c/a,pfet * 40 ndiff,anres,rnd,ndc/a,ndm12c/a,nsd,nsc/a,nsm12c/a,nfet 0 or XDP #give diff nselect priority and-not XDN or TPS shrink 20 grow 20 grow 20 shrink 20 #final nselect templayer FSN bloat-or ndiff,anres,rnd,nfet,nsd,nwsd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,nfet * 40 pdiff,apres,rpd,pdc/a,pdm12c/a,psd,psc/a,psm12c/a,pfet 0 and-not nwr or XDN #never conflict with final pselect and-not FSP #drawn select always goes or TNS shrink 20 grow 20 grow 20 shrink 20 layer CSN FSN calma 45 0 layer CSP FSP calma 44 0 layer CAA diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,pfet,pfet,fet labels diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,pfet,pfet,fet calma 43 0 layer CCC nwsc/m1,nwsm12c/m1 squares 40 40 60 calma 25 0 layer CCC ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1 squares 20 40 60 calma 25 0 layer CCC pdc/m1,pdm12c/m1,psc/m1,psm12c/m1 squares 20 40 60 calma 25 0 layer CPG poly,pres,rp,nfet,pfet,fet,pc/a,pm12c/a labels poly,pres,rp,nfet,pfet,fet,pc/a,pm12c/a calma 46 0 layer CCC pc/m1,pm12c/m1 squares 20 40 60 calma 25 0 layer CCC gc squares 0 40 60 calma 25 0 layer CV1 m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 squares 20 40 60 calma 50 0 layer CV1 gv1 squares 0 40 60 calma 50 0 layer CV2 m3c/m2,m123c/m2,m234c/m2 squares 20 40 60 calma 61 0 layer CV2 gv2 squares 0 40 60 calma 61 0 layer CV3 m4c/m3,m234c/m3 squares 20 40 60 calma 30 0 layer CV3 gv3 squares 0 40 60 calma 30 0 templayer XPAD1 pad shrink 120 templayer XPAD2 XPAD1 shrink 120 layer CM4 pad labels pad calma 31 0 layer CV3 XPAD2 squares 40 40 200 calma 30 0 layer CM3 pad labels pad calma 62 0 layer CV2 XPAD2 squares 160 40 200 calma 61 0 layer CM2 pad labels pad calma 51 0 layer CV1 XPAD2 squares 40 40 200 calma 50 0 layer CM1 pad calma 49 0 layer CM1 m1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 labels m1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 calma 49 0 layer CM2 m2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 labels m2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 calma 51 0 layer CMFP m1p labels m1p calma 81 0 layer CMSP m2p labels m2p calma 82 0 layer 100 fp labels fp calma 100 0 layer 101 fm1 labels fm1 calma 101 0 layer 102 fm2 labels fm2 calma 102 0 layer 103 fm3 labels fm3 calma 103 0 layer 104 fm4 labels fm4 calma 104 0 layer 109 fa or fb squares 0 200 80 labels fa calma 109 0 layer 119 fn calma 119 0 layer 110 fapm labels fapm calma 110 0 # layer CPG fp layer CPG fp,fapm squares 0 200 80 labels fp calma 46 0 # layer CM1 fm1 layer CM1 fm1,fapm squares 0 200 80 labels fm1 calma 49 0 # layer CM2 fm2 layer CM2 fm2,fapm squares 0 200 80 labels fm2 calma 51 0 # layer CM3 fm3 layer CM3 fm3,fapm squares 0 200 80 labels fm3 calma 62 0 layer CM3 m3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 labels m3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 calma 62 0 layer CMTP m3p labels m3p calma 83 0 layer CM4 m4,rm4,m4c/m4,m234c/m4 labels m4,rm4,m4c/m4,m234c/m4 calma 31 0 layer CMQP m4p labels m4p calma 84 0 # layer CM4 fm4 layer CM4 fm4,fapm squares 0 200 80 labels fm4 calma 31 0 layer COG pad shrink 500 labels pad calma 52 0 layer COG glass labels glass calma 52 0 layer CFI nfi,pfi labels nfi,pfi calma 27 0 layer CSB sb,pres,anres,apres labels sb,pres,anres,apres calma 29 0 #CRE/CRM layer CRW rnw,prnw labels rnw,prnw calma 65 0 layer CRG rp,prp,pres labels rp,prp,pres calma 67 0 layer CRD rnd,rpd,prnd,prpd,anres,apres labels rnd,rpd,prnd,prpd,anres,apres calma 66 0 layer CRE rnw,rp,rnd,rpd,pres,anres,apres labels rnw,rp,rnd,rpd,pres,anres,apres calma 64 0 layer CRF rm1,prm1 labels rm1,prm1 calma 71 0 layer CRS rm2,prm2 labels rm2,prm2 calma 72 0 layer CRT rm3,prm3 labels rm3,prm3 calma 73 0 layer CRQ rm4,prm4 labels rm4,prm4 calma 74 0 #CRE/CRM layer CRM rm1,prm1,rm2,prm2,rm3,prm3,rm4,prm4 #CRE/CRM calma 70 0 layer CX comment labels comment calma 63 0 layer XP pad,xp labels pad,xp calma 26 0 style lambda=0.20(c) scalefactor 20 10 layer CWN nwell,rnw,nwr,nwsd,nwsc bloat-or pdiff,apres,rpd,pdc/a,pdm12c/a,pfet * 120 bloat-or nsd,nsc/a,nsm12c/a * 60 bloat-or nfi * 80 grow 60 shrink 60 labels nwell,rnw,nwr,nwsd,nwsc calma 42 0 layer CWNR nwsd,nwsc,nwr grow 140 calma 91 0 layer CWND nwr labels nwr calma 92 0 layer CAA nwsd,nwsc,nwr grow 100 labels nwsd,nwsc calma 43 0 layer CSN bloat-or nwsd,nwsc * 80 nwr 0 calma 43 0 templayer TNWR bloat-or nwr * 100 nwsd,nwsc 40 templayer TCSB nwsd,nwsc grow 40 and-not TNWR layer CSB nwsd,nwsc,nwr grow 140 and-not TCSB calma 29 0 layer CRNW pnwr labels pnwr calma 93 0 templayer TNS ns templayer TPS ps #we give priority to selects autogenerated around diffusions (vrs. ohmics) #XDP = (pdiff*40) Or ps #XDN = (ndiff*40) Or ns #FSP = ((pdiff*40,psc*40) Or XDP And-Not XDN Or ps shrink-grow #FSN = ((ndiff*40,nsc*40) Or XDN And-Not FDP Or ns shrink-grow #CSN = FSN #CSP = FSP #diffusion auto-nselect (will have priority) templayer XDN bloat-or ndiff,anres,rnd,ndc/a,ndm12c/a * 40 psd,psc/a,psm12c/a 0 or TNS #diffusion auto-pselect (will have priority) templayer XDP bloat-or pdiff,apres,rpd,pdc/a,pdm12c/a * 40 nsd,nsc/a,nsm12c/a 0 or TPS #final pselect templayer FSP bloat-or pdiff,apres,rpd,pfet,psd,pdc/a,pdm12c/a,psc/a,psm12c/a,pfet * 40 ndiff,anres,rnd,ndc/a,ndm12c/a,nsd,nsc/a,nsm12c/a,nfet 0 or XDP #give diff nselect priority and-not XDN or TPS shrink 20 grow 20 grow 20 shrink 20 #final nselect templayer FSN bloat-or ndiff,anres,rnd,nfet,nsd,nwsd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,nfet * 40 pdiff,apres,rpd,pdc/a,pdm12c/a,psd,psc/a,psm12c/a,pfet 0 and-not nwr or XDN #never conflict with final pselect and-not FSP #drawn select always goes or TNS shrink 20 grow 20 grow 20 shrink 20 layer CSN FSN calma 45 0 layer CSP FSP calma 44 0 layer CAA diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,pfet,pfet,fet labels diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,pfet,pfet,fet calma 43 0 layer CCC nwsc/m1,nwsm12c/m1 squares 40 40 60 calma 25 0 layer CCC ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1 squares 20 40 60 calma 25 0 layer CCC pdc/m1,pdm12c/m1,psc/m1,psm12c/m1 squares 20 40 60 calma 25 0 layer CPG poly,pres,rp,nfet,pfet,fet,pc/a,pm12c/a labels poly,pres,rp,nfet,pfet,fet,pc/a,pm12c/a calma 46 0 layer CCC pc/m1,pm12c/m1 squares 20 40 60 calma 25 0 layer CCC gc squares 0 40 60 calma 25 0 layer CV1 m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 squares 20 40 60 calma 50 0 layer CV1 gv1 squares 0 40 60 calma 50 0 layer CV2 m3c/m2,m123c/m2,m234c/m2 squares 20 40 60 calma 61 0 layer CV2 gv2 squares 0 40 60 calma 61 0 layer CV3 m4c/m3,m234c/m3 squares 20 40 60 calma 30 0 layer CV3 gv3 squares 0 40 60 calma 30 0 templayer XPAD1 pad shrink 120 templayer XPAD2 XPAD1 shrink 120 layer CM4 pad labels pad calma 31 0 layer CV3 XPAD2 squares 40 40 200 calma 30 0 layer CM3 pad labels pad calma 62 0 layer CV2 XPAD2 squares 160 40 200 calma 61 0 layer CM2 pad labels pad calma 51 0 layer CV1 XPAD2 squares 40 40 200 calma 50 0 layer CM1 pad calma 49 0 layer CM1 m1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 labels m1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 calma 49 0 layer CM2 m2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 labels m2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 calma 51 0 layer CMFP m1p labels m1p calma 81 0 layer CMSP m2p labels m2p calma 82 0 layer 100 fp labels fp calma 100 0 layer 101 fm1 labels fm1 calma 101 0 layer 102 fm2 labels fm2 calma 102 0 layer 103 fm3 labels fm3 calma 103 0 layer 104 fm4 labels fm4 calma 104 0 layer 109 fa or fb squares 0 200 80 labels fa calma 109 0 layer 119 fn calma 119 0 layer 110 fapm labels fapm calma 110 0 # layer CPG fp layer CPG fp,fapm squares 0 200 80 labels fp calma 46 0 # layer CM1 fm1 layer CM1 fm1,fapm squares 0 200 80 labels fm1 calma 49 0 # layer CM2 fm2 layer CM2 fm2,fapm squares 0 200 80 labels fm2 calma 51 0 # layer CM3 fm3 layer CM3 fm3,fapm squares 0 200 80 labels fm3 calma 62 0 layer CM3 m3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 labels m3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 calma 62 0 layer CMTP m3p labels m3p calma 83 0 layer CM4 m4,rm4,m4c/m4,m234c/m4 labels m4,rm4,m4c/m4,m234c/m4 calma 31 0 layer CMQP m4p labels m4p calma 84 0 # layer CM4 fm4 layer CM4 fm4,fapm squares 0 200 80 labels fm4 calma 31 0 layer COG pad shrink 500 labels pad calma 52 0 layer COG glass labels glass calma 52 0 layer CFI nfi,pfi labels nfi,pfi calma 27 0 layer CSB sb,pres,anres,apres labels sb,pres,anres,apres calma 29 0 #CRE/CRM layer CRW rnw,prnw labels rnw,prnw calma 65 0 layer CRG rp,prp,pres labels rp,prp,pres calma 67 0 layer CRD rnd,rpd,prnd,prpd,anres,apres labels rnd,rpd,prnd,prpd,anres,apres calma 66 0 layer CRE rnw,rp,rnd,rpd,pres,anres,apres labels rnw,rp,rnd,rpd,pres,anres,apres calma 64 0 layer CRF rm1,prm1 labels rm1,prm1 calma 71 0 layer CRS rm2,prm2 labels rm2,prm2 calma 72 0 layer CRT rm3,prm3 labels rm3,prm3 calma 73 0 layer CRQ rm4,prm4 labels rm4,prm4 calma 74 0 #CRE/CRM layer CRM rm1,prm1,rm2,prm2,rm3,prm3,rm4,prm4 #CRE/CRM calma 70 0 layer CX comment labels comment calma 63 0 layer XP pad,xp labels pad,xp calma 26 0 style lambda=0.20() scalefactor 20 10 layer CWN nwell,rnw,nwr,nwsd,nwsc bloat-or pdiff,apres,rpd,pdc/a,pdm12c/a,pfet * 120 bloat-or nsd,nsc/a,nsm12c/a * 60 bloat-or nfi * 80 grow 60 shrink 60 labels nwell,rnw,nwr,nwsd,nwsc calma 42 0 layer CWNR nwsd,nwsc,nwr grow 140 calma 91 0 layer CWND nwr labels nwr calma 92 0 layer CAA nwsd,nwsc,nwr grow 100 labels nwsd,nwsc calma 43 0 layer CSN bloat-or nwsd,nwsc * 80 nwr 0 calma 43 0 templayer TNWR bloat-or nwr * 100 nwsd,nwsc 40 templayer TCSB nwsd,nwsc grow 40 and-not TNWR layer CSB nwsd,nwsc,nwr grow 140 and-not TCSB calma 29 0 layer CRNW pnwr labels pnwr calma 93 0 templayer TNS ns templayer TPS ps #we give priority to selects autogenerated around diffusions (vrs. ohmics) #XDP = (pdiff*40) Or ps #XDN = (ndiff*40) Or ns #FSP = ((pdiff*40,psc*40) Or XDP And-Not XDN Or ps shrink-grow #FSN = ((ndiff*40,nsc*40) Or XDN And-Not FDP Or ns shrink-grow #CSN = FSN #CSP = FSP #diffusion auto-nselect (will have priority) templayer XDN bloat-or ndiff,anres,rnd,ndc/a,ndm12c/a * 40 psd,psc/a,psm12c/a 0 or TNS #diffusion auto-pselect (will have priority) templayer XDP bloat-or pdiff,apres,rpd,pdc/a,pdm12c/a * 40 nsd,nsc/a,nsm12c/a 0 or TPS #final pselect templayer FSP bloat-or pdiff,apres,rpd,pfet,psd,pdc/a,pdm12c/a,psc/a,psm12c/a,pfet * 40 ndiff,anres,rnd,ndc/a,ndm12c/a,nsd,nsc/a,nsm12c/a,nfet 0 or XDP #give diff nselect priority and-not XDN or TPS shrink 20 grow 20 grow 20 shrink 20 #final nselect templayer FSN bloat-or ndiff,anres,rnd,nfet,nsd,nwsd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,nfet * 40 pdiff,apres,rpd,pdc/a,pdm12c/a,psd,psc/a,psm12c/a,pfet 0 and-not nwr or XDN #never conflict with final pselect and-not FSP #drawn select always goes or TNS shrink 20 grow 20 grow 20 shrink 20 layer CSN FSN calma 45 0 layer CSP FSP calma 44 0 layer CAA diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,pfet,pfet,fet labels diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,pfet,pfet,fet calma 43 0 layer CCA nwsc/m1,nwsm12c/m1 squares 40 40 60 calma 48 0 layer CCA ndc/m1,ndm12c/m1,nsc/m1,nsm12c/m1 squares 20 40 60 calma 48 0 layer CCA pdc/m1,pdm12c/m1,psc/m1,psm12c/m1 squares 20 40 60 calma 48 0 layer CPG poly,pres,rp,nfet,pfet,fet,pc/a,pm12c/a labels poly,pres,rp,nfet,pfet,fet,pc/a,pm12c/a calma 46 0 layer CCP pc/m1,pm12c/m1 squares 20 40 60 calma 47 0 layer CCC gc squares 0 40 60 calma 25 0 layer CV1 m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 squares 20 40 60 calma 50 0 layer CV1 gv1 squares 0 40 60 calma 50 0 layer CV2 m3c/m2,m123c/m2,m234c/m2 squares 20 40 60 calma 61 0 layer CV2 gv2 squares 0 40 60 calma 61 0 layer CV3 m4c/m3,m234c/m3 squares 20 40 60 calma 30 0 layer CV3 gv3 squares 0 40 60 calma 30 0 templayer XPAD1 pad shrink 120 templayer XPAD2 XPAD1 shrink 120 layer CM4 pad labels pad calma 31 0 layer CV3 XPAD2 squares 40 40 200 calma 30 0 layer CM3 pad labels pad calma 62 0 layer CV2 XPAD2 squares 160 40 200 calma 61 0 layer CM2 pad labels pad calma 51 0 layer CV1 XPAD2 squares 40 40 200 calma 50 0 layer CM1 pad calma 49 0 layer CM1 m1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 labels m1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 calma 49 0 layer CM2 m2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 labels m2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 calma 51 0 layer CMFP m1p labels m1p calma 81 0 layer CMSP m2p labels m2p calma 82 0 layer 100 fp labels fp calma 100 0 layer 101 fm1 labels fm1 calma 101 0 layer 102 fm2 labels fm2 calma 102 0 layer 103 fm3 labels fm3 calma 103 0 layer 104 fm4 labels fm4 calma 104 0 layer 109 fa or fb squares 0 200 80 labels fa calma 109 0 layer 119 fn calma 119 0 layer 110 fapm labels fapm calma 110 0 # layer CPG fp layer CPG fp,fapm squares 0 200 80 labels fp calma 46 0 # layer CM1 fm1 layer CM1 fm1,fapm squares 0 200 80 labels fm1 calma 49 0 # layer CM2 fm2 layer CM2 fm2,fapm squares 0 200 80 labels fm2 calma 51 0 # layer CM3 fm3 layer CM3 fm3,fapm squares 0 200 80 labels fm3 calma 62 0 layer CM3 m3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 labels m3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3,m234c/m3,m4c/m3,m234c/m3 calma 62 0 layer CMTP m3p labels m3p calma 83 0 layer CM4 m4,rm4,m4c/m4,m234c/m4 labels m4,rm4,m4c/m4,m234c/m4 calma 31 0 layer CMQP m4p labels m4p calma 84 0 # layer CM4 fm4 layer CM4 fm4,fapm squares 0 200 80 labels fm4 calma 31 0 layer COG pad shrink 500 labels pad calma 52 0 layer COG glass labels glass calma 52 0 layer CFI nfi,pfi labels nfi,pfi calma 27 0 layer CSB sb,pres,anres,apres labels sb,pres,anres,apres calma 29 0 #CRE/CRM layer CRW rnw,prnw labels rnw,prnw calma 65 0 layer CRG rp,prp,pres labels rp,prp,pres calma 67 0 layer CRD rnd,rpd,prnd,prpd,anres,apres labels rnd,rpd,prnd,prpd,anres,apres calma 66 0 layer CRE rnw,rp,rnd,rpd,pres,anres,apres labels rnw,rp,rnd,rpd,pres,anres,apres calma 64 0 layer CRF rm1,prm1 labels rm1,prm1 calma 71 0 layer CRS rm2,prm2 labels rm2,prm2 calma 72 0 layer CRT rm3,prm3 labels rm3,prm3 calma 73 0 layer CRQ rm4,prm4 labels rm4,prm4 calma 74 0 #CRE/CRM layer CRM rm1,prm1,rm2,prm2,rm3,prm3,rm4,prm4 #CRE/CRM calma 70 0 layer CX comment labels comment calma 63 0 layer XP pad,xp labels pad,xp calma 26 0 end cifinput style lambda=0.20(p) scalefactor 20 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer rnw CWN and-not CWNR and CRE and-not CSB and-not CRD and-not CAA and-not CPG calma CWN 42 * layer rnw CWN and-not CWNR and CRW and-not CRD and-not CAA and-not CPG calma CWN 42 * layer pseudo_rnwell CRW and-not CRE calma CRW 65 * calma CWNR 91 * layer nwr CWND calma CWND 92 * layer pseudo_nwr CRNW calma CRNW 93 * layer pwell CWP and-not CTA labels CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * calma CSN 45 * calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer rnd CAA and CSN and-not CWNR and CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer rnd CAA and CSN and-not CWNR and CRD and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer pseudo_rndiff CRD and-not CRE and-not CAA and-not CSB and-not CPG and-not CWN and-not CSP and CSN and-not CBA calma CRD 66 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer rpd CAA and CSP and-not CWNR and CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CAA 43 * layer rpd CAA and CSP and-not CWNR and CRD and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CAA 43 * layer pseudo_rpdiff CRD and-not CRE and-not CAA and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CRD 66 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nwsd CAA and CSN and CWNR shrink 100 and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer ndc CAA and CSN and CCA and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer ndc CAA and CSN and CCC and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nsc CAA and CSN and CCA and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer nsc CAA and CSN and CCC and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nwsc CAA and CSN and-not CV1 and CWNR shrink 100 and-not CTA and CCA and CWN and CM1 grow 40 grow 10 shrink 10 calma CCA 48 * layer nwsc CAA and CSN and-not CV1 and CWNR shrink 105 and-not CTA and CCC and CWN and CM1 grow 40 grow 10 shrink 10 calma CCC 25 * layer pdc CAA and CSP and CCA and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer pdc CAA and CSP and CCC and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer psc CAA and CSP and CCA and-not CV1 and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer psc CAA and CSP and CCC and-not CV1 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer ndc CAA and CSN and CCA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer ndc CAA and CSN and CCC and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nsc CAA and CSN and CCA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer nsc CAA and CSN and CCC and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nwsc CAA and CSN and CV1 and CV2 and-not CV3 and CWNR shrink 100 and-not CTA and CCA and CWN and CM1 grow 40 grow 10 shrink 10 calma CCA 48 * layer nwsc CAA and CSN and CV1 and CV2 and-not CV3 and CWNR shrink 105 and-not CTA and CCC and CWN and CM1 grow 40 grow 10 shrink 10 calma CCC 25 * layer pdc CAA and CSP and CCA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer pdc CAA and CSP and CCC and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer psc CAA and CSP and CCA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer psc CAA and CSP and CCC and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer rp CPG and CRE and-not CSB calma CPG 46 * layer rp CPG and CRG calma CPG 46 * layer pseudo_rpoly CRG and-not CRE calma CRG 67 * layer pc CCP and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCP 47 * layer pc CCC and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCC 25 * layer pc CCP and CV1 and CV2 and-not CV3 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCP 47 * layer pc CCC and CV1 and CV2 and-not CV3 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCC 25 * layer gc CCP and-not CPG and-not CPC calma CCP 47 * layer gc CCP and-not CM1 calma CCP 47 * layer gc CCA and-not COP and-not CAA and-not CBA calma CCA 48 * layer gc CCA and-not COP and-not CM1 calma CCA 48 * layer gc CCC and-not COP and-not CPG and-not CPC and-not CEL and-not CAA and-not CBA calma CCC 25 * layer gc CCC and-not COP and-not CM1 calma CCC 25 * layer gc CCE and-not CPC and-not CEL calma CCE 55 * layer gc CCE and-not CM1 calma CCE 55 * layer gv1 CV1 and-not COP and-not CM1 calma CV1 50 * layer gv1 CV1 and-not COP and-not CM2 calma CV1 50 * layer gv2 CV2 and-not COP and-not CM2 calma CV2 61 * layer gv2 CV2 and-not COP and-not CM3 calma CV2 61 * layer gv3 CV3 and-not COP and-not CM3 calma CV3 30 * layer gv3 CV3 and-not COP and-not CM4 calma CV3 30 * layer m2c CV1 and-not CV2 and-not CCC and-not CCP and-not CCA and-not XP grow 20 and CM2 and CM1 grow 10 shrink 10 calma CV1 50 * layer m2c CV1 and CV2 and CV3 and-not CCC and-not CCP and-not CCA and-not XP grow 20 and CM2 and CM1 grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and-not CV2 and CCP grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and-not CV2 and CCC grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and CV2 and CV3 and CCP grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and CV2 and CV3 and CCC grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer m1 CM1 and-not CRM and-not CRF and-not XP labels CM1 calma CM1 49 * layer rm1 CRM and CM1 calma CRM 70 * layer rm1 CRF and CM1 calma CRF 71 * layer pseudo_rmetal1 CRF and-not rm1 calma CRF 71 * layer m1p CMFP labels CMFP calma CMFP 81 * layer m2 CM2 and-not CRM and-not CRS and-not XP labels CM2 calma CM2 51 * layer rm2 CRM and CM2 calma CRM 70 * layer rm2 CRS and CM2 calma CRS 72 * layer pseudo_rmetal2 CRS and-not rm2 calma CRS 72 * layer m2p CMSP labels CMSP calma CMSP 82 * layer ndm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CV2 and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CV2 and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CV2 and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CV2 and-not CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer nwsm12c CAA and CSN and CV1 and-not CV2 and CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nwsm12c CAA and CSN and CV1 and-not CV2 and CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and CV2 and CV3 and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and CV2 and CV3 and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and CV2 and CV3 and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and CV2 and CV3 and-not CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer nwsm12c CAA and CSN and CV1 and CV2 and CV3 and CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nwsm12c CAA and CSN and CV1 and CV2 and CV3 and CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer fp 100 calma 100 100 * layer fm1 101 calma 101 101 * layer fm2 102 calma 102 102 * layer fm3 103 calma 103 103 * layer fm4 104 calma 104 104 * layer fa 109 calma 109 109 * layer fn 119 calma 119 119 * layer fapm 110 calma 110 110 * layer m3c CV2 and-not CV3 and-not CV1 and-not XP grow 20 and CM3 and CM2 grow 10 shrink 10 calma CV2 61 * layer m123c CV2 and-not CV3 and CV1 and-not XP grow 20 and CM3 and CM2 and CM1 grow 10 shrink 10 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT and-not XP labels CM3 calma CM3 62 * layer rm3 CRM and CM3 calma CRM 70 * layer rm3 CRT and CM3 calma CRT 73 * layer pseudo_rmetal3 CRT and-not rm3 calma CRT 73 * layer m3p CMTP labels CMTP calma CMTP 83 * layer m234c CV3 and CV2 and-not XP grow 20 and CM4 and CM3 and CM2 grow 20 shrink 20 calma CV3 30 * layer m4 CM4 and-not CRM and-not CRQ and-not XP labels CM4 calma CM4 31 * layer rm4 CRM and CM4 calma CRM 70 * layer rm4 CRQ and CM4 calma CRQ 74 * layer pseudo_rmetal4 CRQ and-not rm4 calma CRQ 74 * layer m4p CMQP labels CMQP calma CMQP 84 * layer m4c CV3 and-not CV2 and-not XP grow 20 and CM4 and CM3 grow 20 shrink 20 calma CV3 30 * layer pad XP labels pad calma XP 26 * layer glass COG and-not COP and-not XP labels COG calma COG 52 * layer nfi CFI and CWN labels CFI calma CFI 27 * layer pfi CFI and-not CWN labels CFI calma CFI 27 * layer sb CSB and-not CWNR labels CSB calma CSB 29 * layer pres CPG and CSB calma CPG 46 * layer anres CAA and CSN and-not CWNR and-not CTA and CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer apres CAA and CSP and-not CWNR and-not CTA and CSB and-not CPG and CWN and-not CSN and-not CPS and-not CBA calma CAA 43 * layer comment CX labels CX calma CX 63 * calma CTA 60 * #CRE/CRM calma CRW 65 * calma CRG 67 * calma CRD 66 * calma CRE 64 * calma CRF 71 * calma CRS 72 * calma CRT 73 * calma CRQ 74 * calma CRM 70 * style lambda=0.20(s) scalefactor 20 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer rnw CWN and-not CWNR and CRE and-not CSB and-not CRD and-not CAA and-not CPG calma CWN 42 * layer rnw CWN and-not CWNR and CRW and-not CRD and-not CAA and-not CPG calma CWN 42 * layer pseudo_rnwell CRW and-not CRE calma CRW 65 * calma CWNR 91 * layer nwr CWND calma CWND 92 * layer pseudo_nwr CRNW calma CRNW 93 * ignore CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer nselect CSN calma CSN 45 * layer pselect CSP calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer rnd CAA and CSN and-not CWNR and CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer rnd CAA and CSN and-not CWNR and CRD and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer pseudo_rndiff CRD and-not CRE and-not CAA and-not CSB and-not CPG and-not CWN and-not CSP and CSN and-not CBA calma CRD 66 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer rpd CAA and CSP and-not CWNR and CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CAA 43 * layer rpd CAA and CSP and-not CWNR and CRD and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CAA 43 * layer pseudo_rpdiff CRD and-not CRE and-not CAA and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CRD 66 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nwsd CAA and CSN and CWNR shrink 100 and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer ndc CAA and CSN and CCA and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer ndc CAA and CSN and CCC and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nsc CAA and CSN and CCA and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer nsc CAA and CSN and CCC and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nwsc CAA and CSN and-not CV1 and CWNR shrink 100 and-not CTA and CCA and CWN and CM1 grow 40 grow 10 shrink 10 calma CCA 48 * layer nwsc CAA and CSN and-not CV1 and CWNR shrink 105 and-not CTA and CCC and CWN and CM1 grow 40 grow 10 shrink 10 calma CCC 25 * layer pdc CAA and CSP and CCA and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer pdc CAA and CSP and CCC and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer psc CAA and CSP and CCA and-not CV1 and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer psc CAA and CSP and CCC and-not CV1 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer ndc CAA and CSN and CCA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer ndc CAA and CSN and CCC and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nsc CAA and CSN and CCA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer nsc CAA and CSN and CCC and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nwsc CAA and CSN and CV1 and CV2 and-not CV3 and CWNR shrink 100 and-not CTA and CCA and CWN and CM1 grow 40 grow 10 shrink 10 calma CCA 48 * layer nwsc CAA and CSN and CV1 and CV2 and-not CV3 and CWNR shrink 105 and-not CTA and CCC and CWN and CM1 grow 40 grow 10 shrink 10 calma CCC 25 * layer pdc CAA and CSP and CCA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer pdc CAA and CSP and CCC and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer psc CAA and CSP and CCA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer psc CAA and CSP and CCC and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer rp CPG and CRE and-not CSB calma CPG 46 * layer rp CPG and CRG calma CPG 46 * layer pseudo_rpoly CRG and-not CRE calma CRG 67 * layer pc CCP and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCP 47 * layer pc CCC and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCC 25 * layer pc CCP and CV1 and CV2 and-not CV3 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCP 47 * layer pc CCC and CV1 and CV2 and-not CV3 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCC 25 * layer gc CCP and-not CPG and-not CPC calma CCP 47 * layer gc CCP and-not CM1 calma CCP 47 * layer gc CCA and-not COP and-not CAA and-not CBA calma CCA 48 * layer gc CCA and-not COP and-not CM1 calma CCA 48 * layer gc CCC and-not COP and-not CPG and-not CPC and-not CEL and-not CAA and-not CBA calma CCC 25 * layer gc CCC and-not COP and-not CM1 calma CCC 25 * layer gc CCE and-not CPC and-not CEL calma CCE 55 * layer gc CCE and-not CM1 calma CCE 55 * layer gv1 CV1 and-not COP and-not CM1 calma CV1 50 * layer gv1 CV1 and-not COP and-not CM2 calma CV1 50 * layer gv2 CV2 and-not COP and-not CM2 calma CV2 61 * layer gv2 CV2 and-not COP and-not CM3 calma CV2 61 * layer gv3 CV3 and-not COP and-not CM3 calma CV3 30 * layer gv3 CV3 and-not COP and-not CM4 calma CV3 30 * layer m2c CV1 and-not CV2 and-not CCC and-not CCP and-not CCA and-not XP grow 20 and CM2 and CM1 grow 10 shrink 10 calma CV1 50 * layer m2c CV1 and CV2 and CV3 and-not CCC and-not CCP and-not CCA and-not XP grow 20 and CM2 and CM1 grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and-not CV2 and CCP grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and-not CV2 and CCC grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and CV2 and CV3 and CCP grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and CV2 and CV3 and CCC grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer m1 CM1 and-not CRM and-not CRF and-not XP labels CM1 calma CM1 49 * layer rm1 CRM and CM1 calma CRM 70 * layer rm1 CRF and CM1 calma CRF 71 * layer pseudo_rmetal1 CRF and-not rm1 calma CRF 71 * layer m1p CMFP labels CMFP calma CMFP 81 * layer m2 CM2 and-not CRM and-not CRS and-not XP labels CM2 calma CM2 51 * layer rm2 CRM and CM2 calma CRM 70 * layer rm2 CRS and CM2 calma CRS 72 * layer pseudo_rmetal2 CRS and-not rm2 calma CRS 72 * layer m2p CMSP labels CMSP calma CMSP 82 * layer ndm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CV2 and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CV2 and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CV2 and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CV2 and-not CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer nwsm12c CAA and CSN and CV1 and-not CV2 and CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nwsm12c CAA and CSN and CV1 and-not CV2 and CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and CV2 and CV3 and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and CV2 and CV3 and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and CV2 and CV3 and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and CV2 and CV3 and-not CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer nwsm12c CAA and CSN and CV1 and CV2 and CV3 and CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nwsm12c CAA and CSN and CV1 and CV2 and CV3 and CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer fp 100 calma 100 100 * layer fm1 101 calma 101 101 * layer fm2 102 calma 102 102 * layer fm3 103 calma 103 103 * layer fm4 104 calma 104 104 * layer fa 109 calma 109 109 * layer fn 119 calma 119 119 * layer fapm 110 calma 110 110 * layer m3c CV2 and-not CV3 and-not CV1 and-not XP grow 20 and CM3 and CM2 grow 10 shrink 10 calma CV2 61 * layer m123c CV2 and-not CV3 and CV1 and-not XP grow 20 and CM3 and CM2 and CM1 grow 10 shrink 10 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT and-not XP labels CM3 calma CM3 62 * layer rm3 CRM and CM3 calma CRM 70 * layer rm3 CRT and CM3 calma CRT 73 * layer pseudo_rmetal3 CRT and-not rm3 calma CRT 73 * layer m3p CMTP labels CMTP calma CMTP 83 * layer m234c CV3 and CV2 and-not XP grow 20 and CM4 and CM3 and CM2 grow 20 shrink 20 calma CV3 30 * layer m4 CM4 and-not CRM and-not CRQ and-not XP labels CM4 calma CM4 31 * layer rm4 CRM and CM4 calma CRM 70 * layer rm4 CRQ and CM4 calma CRQ 74 * layer pseudo_rmetal4 CRQ and-not rm4 calma CRQ 74 * layer m4p CMQP labels CMQP calma CMQP 84 * layer m4c CV3 and-not CV2 and-not XP grow 20 and CM4 and CM3 grow 20 shrink 20 calma CV3 30 * layer pad XP labels pad calma XP 26 * layer glass COG and-not COP and-not XP labels COG calma COG 52 * layer nfi CFI and CWN labels CFI calma CFI 27 * layer pfi CFI and-not CWN labels CFI calma CFI 27 * layer sb CSB and-not CWNR labels CSB calma CSB 29 * layer pres CPG and CSB calma CPG 46 * layer anres CAA and CSN and-not CWNR and-not CTA and CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer apres CAA and CSP and-not CWNR and-not CTA and CSB and-not CPG and CWN and-not CSN and-not CPS and-not CBA calma CAA 43 * layer comment CX labels CX calma CX 63 * calma CTA 60 * #CRE/CRM calma CRW 65 * calma CRG 67 * calma CRD 66 * calma CRE 64 * calma CRF 71 * calma CRS 72 * calma CRT 73 * calma CRQ 74 * calma CRM 70 * style lambda=0.20(ps) scalefactor 20 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer rnw CWN and-not CWNR and CRE and-not CSB and-not CRD and-not CAA and-not CPG calma CWN 42 * layer rnw CWN and-not CWNR and CRW and-not CRD and-not CAA and-not CPG calma CWN 42 * layer pseudo_rnwell CRW and-not CRE calma CRW 65 * calma CWNR 91 * layer nwr CWND calma CWND 92 * layer pseudo_nwr CRNW calma CRNW 93 * layer pwell CWP and-not CTA labels CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer nselect CSN calma CSN 45 * layer pselect CSP calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer rnd CAA and CSN and-not CWNR and CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer rnd CAA and CSN and-not CWNR and CRD and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer pseudo_rndiff CRD and-not CRE and-not CAA and-not CSB and-not CPG and-not CWN and-not CSP and CSN and-not CBA calma CRD 66 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer rpd CAA and CSP and-not CWNR and CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CAA 43 * layer rpd CAA and CSP and-not CWNR and CRD and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CAA 43 * layer pseudo_rpdiff CRD and-not CRE and-not CAA and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CRD 66 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nwsd CAA and CSN and CWNR shrink 100 and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer ndc CAA and CSN and CCA and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer ndc CAA and CSN and CCC and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nsc CAA and CSN and CCA and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer nsc CAA and CSN and CCC and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nwsc CAA and CSN and-not CV1 and CWNR shrink 100 and-not CTA and CCA and CWN and CM1 grow 40 grow 10 shrink 10 calma CCA 48 * layer nwsc CAA and CSN and-not CV1 and CWNR shrink 105 and-not CTA and CCC and CWN and CM1 grow 40 grow 10 shrink 10 calma CCC 25 * layer pdc CAA and CSP and CCA and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer pdc CAA and CSP and CCC and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer psc CAA and CSP and CCA and-not CV1 and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer psc CAA and CSP and CCC and-not CV1 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer ndc CAA and CSN and CCA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer ndc CAA and CSN and CCC and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nsc CAA and CSN and CCA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer nsc CAA and CSN and CCC and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nwsc CAA and CSN and CV1 and CV2 and-not CV3 and CWNR shrink 100 and-not CTA and CCA and CWN and CM1 grow 40 grow 10 shrink 10 calma CCA 48 * layer nwsc CAA and CSN and CV1 and CV2 and-not CV3 and CWNR shrink 105 and-not CTA and CCC and CWN and CM1 grow 40 grow 10 shrink 10 calma CCC 25 * layer pdc CAA and CSP and CCA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer pdc CAA and CSP and CCC and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer psc CAA and CSP and CCA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer psc CAA and CSP and CCC and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer rp CPG and CRE and-not CSB calma CPG 46 * layer rp CPG and CRG calma CPG 46 * layer pseudo_rpoly CRG and-not CRE calma CRG 67 * layer pc CCP and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCP 47 * layer pc CCC and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCC 25 * layer pc CCP and CV1 and CV2 and-not CV3 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCP 47 * layer pc CCC and CV1 and CV2 and-not CV3 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCC 25 * layer gc CCP and-not CPG and-not CPC calma CCP 47 * layer gc CCP and-not CM1 calma CCP 47 * layer gc CCA and-not COP and-not CAA and-not CBA calma CCA 48 * layer gc CCA and-not COP and-not CM1 calma CCA 48 * layer gc CCC and-not COP and-not CPG and-not CPC and-not CEL and-not CAA and-not CBA calma CCC 25 * layer gc CCC and-not COP and-not CM1 calma CCC 25 * layer gc CCE and-not CPC and-not CEL calma CCE 55 * layer gc CCE and-not CM1 calma CCE 55 * layer gv1 CV1 and-not COP and-not CM1 calma CV1 50 * layer gv1 CV1 and-not COP and-not CM2 calma CV1 50 * layer gv2 CV2 and-not COP and-not CM2 calma CV2 61 * layer gv2 CV2 and-not COP and-not CM3 calma CV2 61 * layer gv3 CV3 and-not COP and-not CM3 calma CV3 30 * layer gv3 CV3 and-not COP and-not CM4 calma CV3 30 * layer m2c CV1 and-not CV2 and-not CCC and-not CCP and-not CCA and-not XP grow 20 and CM2 and CM1 grow 10 shrink 10 calma CV1 50 * layer m2c CV1 and CV2 and CV3 and-not CCC and-not CCP and-not CCA and-not XP grow 20 and CM2 and CM1 grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and-not CV2 and CCP grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and-not CV2 and CCC grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and CV2 and CV3 and CCP grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and CV2 and CV3 and CCC grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer m1 CM1 and-not CRM and-not CRF and-not XP labels CM1 calma CM1 49 * layer rm1 CRM and CM1 calma CRM 70 * layer rm1 CRF and CM1 calma CRF 71 * layer pseudo_rmetal1 CRF and-not rm1 calma CRF 71 * layer m1p CMFP labels CMFP calma CMFP 81 * layer m2 CM2 and-not CRM and-not CRS and-not XP labels CM2 calma CM2 51 * layer rm2 CRM and CM2 calma CRM 70 * layer rm2 CRS and CM2 calma CRS 72 * layer pseudo_rmetal2 CRS and-not rm2 calma CRS 72 * layer m2p CMSP labels CMSP calma CMSP 82 * layer ndm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CV2 and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CV2 and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CV2 and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CV2 and-not CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer nwsm12c CAA and CSN and CV1 and-not CV2 and CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nwsm12c CAA and CSN and CV1 and-not CV2 and CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and CV2 and CV3 and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and CV2 and CV3 and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and CV2 and CV3 and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and CV2 and CV3 and-not CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer nwsm12c CAA and CSN and CV1 and CV2 and CV3 and CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nwsm12c CAA and CSN and CV1 and CV2 and CV3 and CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer fp 100 calma 100 100 * layer fm1 101 calma 101 101 * layer fm2 102 calma 102 102 * layer fm3 103 calma 103 103 * layer fm4 104 calma 104 104 * layer fa 109 calma 109 109 * layer fn 119 calma 119 119 * layer fapm 110 calma 110 110 * layer m3c CV2 and-not CV3 and-not CV1 and-not XP grow 20 and CM3 and CM2 grow 10 shrink 10 calma CV2 61 * layer m123c CV2 and-not CV3 and CV1 and-not XP grow 20 and CM3 and CM2 and CM1 grow 10 shrink 10 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT and-not XP labels CM3 calma CM3 62 * layer rm3 CRM and CM3 calma CRM 70 * layer rm3 CRT and CM3 calma CRT 73 * layer pseudo_rmetal3 CRT and-not rm3 calma CRT 73 * layer m3p CMTP labels CMTP calma CMTP 83 * layer m234c CV3 and CV2 and-not XP grow 20 and CM4 and CM3 and CM2 grow 20 shrink 20 calma CV3 30 * layer m4 CM4 and-not CRM and-not CRQ and-not XP labels CM4 calma CM4 31 * layer rm4 CRM and CM4 calma CRM 70 * layer rm4 CRQ and CM4 calma CRQ 74 * layer pseudo_rmetal4 CRQ and-not rm4 calma CRQ 74 * layer m4p CMQP labels CMQP calma CMQP 84 * layer m4c CV3 and-not CV2 and-not XP grow 20 and CM4 and CM3 grow 20 shrink 20 calma CV3 30 * layer pad XP labels pad calma XP 26 * layer glass COG and-not COP and-not XP labels COG calma COG 52 * layer nfi CFI and CWN labels CFI calma CFI 27 * layer pfi CFI and-not CWN labels CFI calma CFI 27 * layer sb CSB and-not CWNR labels CSB calma CSB 29 * layer pres CPG and CSB calma CPG 46 * layer anres CAA and CSN and-not CWNR and-not CTA and CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer apres CAA and CSP and-not CWNR and-not CTA and CSB and-not CPG and CWN and-not CSN and-not CPS and-not CBA calma CAA 43 * layer comment CX labels CX calma CX 63 * calma CTA 60 * #CRE/CRM calma CRW 65 * calma CRG 67 * calma CRD 66 * calma CRE 64 * calma CRF 71 * calma CRS 72 * calma CRT 73 * calma CRQ 74 * calma CRM 70 * style lambda=0.20() scalefactor 20 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer rnw CWN and-not CWNR and CRE and-not CSB and-not CRD and-not CAA and-not CPG calma CWN 42 * layer rnw CWN and-not CWNR and CRW and-not CRD and-not CAA and-not CPG calma CWN 42 * layer pseudo_rnwell CRW and-not CRE calma CRW 65 * calma CWNR 91 * layer nwr CWND calma CWND 92 * layer pseudo_nwr CRNW calma CRNW 93 * ignore CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * calma CSN 45 * calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer rnd CAA and CSN and-not CWNR and CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer rnd CAA and CSN and-not CWNR and CRD and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer pseudo_rndiff CRD and-not CRE and-not CAA and-not CSB and-not CPG and-not CWN and-not CSP and CSN and-not CBA calma CRD 66 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer rpd CAA and CSP and-not CWNR and CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CAA 43 * layer rpd CAA and CSP and-not CWNR and CRD and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CAA 43 * layer pseudo_rpdiff CRD and-not CRE and-not CAA and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CRD 66 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nwsd CAA and CSN and CWNR shrink 100 and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer ndc CAA and CSN and CCA and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer ndc CAA and CSN and CCC and-not CV1 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nsc CAA and CSN and CCA and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer nsc CAA and CSN and CCC and-not CV1 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nwsc CAA and CSN and-not CV1 and CWNR shrink 100 and-not CTA and CCA and CWN and CM1 grow 40 grow 10 shrink 10 calma CCA 48 * layer nwsc CAA and CSN and-not CV1 and CWNR shrink 105 and-not CTA and CCC and CWN and CM1 grow 40 grow 10 shrink 10 calma CCC 25 * layer pdc CAA and CSP and CCA and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer pdc CAA and CSP and CCC and-not CV1 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer psc CAA and CSP and CCA and-not CV1 and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer psc CAA and CSP and CCC and-not CV1 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer ndc CAA and CSN and CCA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer ndc CAA and CSN and CCC and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nsc CAA and CSN and CCA and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer nsc CAA and CSN and CCC and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer nwsc CAA and CSN and CV1 and CV2 and-not CV3 and CWNR shrink 100 and-not CTA and CCA and CWN and CM1 grow 40 grow 10 shrink 10 calma CCA 48 * layer nwsc CAA and CSN and CV1 and CV2 and-not CV3 and CWNR shrink 105 and-not CTA and CCC and CWN and CM1 grow 40 grow 10 shrink 10 calma CCC 25 * layer pdc CAA and CSP and CCA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer pdc CAA and CSP and CCC and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer psc CAA and CSP and CCA and CV1 and CV2 and-not CV3 and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCA 48 * layer psc CAA and CSP and CCC and CV1 and CV2 and-not CV3 and-not CWNR and-not CTA and-not CPS and-not CWN and CM1 grow 20 grow 10 shrink 10 calma CCC 25 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer rp CPG and CRE and-not CSB calma CPG 46 * layer rp CPG and CRG calma CPG 46 * layer pseudo_rpoly CRG and-not CRE calma CRG 67 * layer pc CCP and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCP 47 * layer pc CCC and-not CV1 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCC 25 * layer pc CCP and CV1 and CV2 and-not CV3 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCP 47 * layer pc CCC and CV1 and CV2 and-not CV3 and CPG and-not CPC and-not CEL and-not CAA grow 20 and CM1 grow 10 shrink 10 calma CCC 25 * layer gc CCP and-not CPG and-not CPC calma CCP 47 * layer gc CCP and-not CM1 calma CCP 47 * layer gc CCA and-not COP and-not CAA and-not CBA calma CCA 48 * layer gc CCA and-not COP and-not CM1 calma CCA 48 * layer gc CCC and-not COP and-not CPG and-not CPC and-not CEL and-not CAA and-not CBA calma CCC 25 * layer gc CCC and-not COP and-not CM1 calma CCC 25 * layer gc CCE and-not CPC and-not CEL calma CCE 55 * layer gc CCE and-not CM1 calma CCE 55 * layer gv1 CV1 and-not COP and-not CM1 calma CV1 50 * layer gv1 CV1 and-not COP and-not CM2 calma CV1 50 * layer gv2 CV2 and-not COP and-not CM2 calma CV2 61 * layer gv2 CV2 and-not COP and-not CM3 calma CV2 61 * layer gv3 CV3 and-not COP and-not CM3 calma CV3 30 * layer gv3 CV3 and-not COP and-not CM4 calma CV3 30 * layer m2c CV1 and-not CV2 and-not CCC and-not CCP and-not CCA and-not XP grow 20 and CM2 and CM1 grow 10 shrink 10 calma CV1 50 * layer m2c CV1 and CV2 and CV3 and-not CCC and-not CCP and-not CCA and-not XP grow 20 and CM2 and CM1 grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and-not CV2 and CCP grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and-not CV2 and CCC grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and CV2 and CV3 and CCP grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer pm12c CV1 and CV2 and CV3 and CCC grow 20 and CM2 and CM1 and CPG grow 10 shrink 10 calma CV1 50 * layer m1 CM1 and-not CRM and-not CRF and-not XP labels CM1 calma CM1 49 * layer rm1 CRM and CM1 calma CRM 70 * layer rm1 CRF and CM1 calma CRF 71 * layer pseudo_rmetal1 CRF and-not rm1 calma CRF 71 * layer m1p CMFP labels CMFP calma CMFP 81 * layer m2 CM2 and-not CRM and-not CRS and-not XP labels CM2 calma CM2 51 * layer rm2 CRM and CM2 calma CRM 70 * layer rm2 CRS and CM2 calma CRS 72 * layer pseudo_rmetal2 CRS and-not rm2 calma CRS 72 * layer m2p CMSP labels CMSP calma CMSP 82 * layer ndm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CV2 and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and-not CV2 and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and-not CV2 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CV2 and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and-not CV2 and-not CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer nwsm12c CAA and CSN and CV1 and-not CV2 and CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nwsm12c CAA and CSN and CV1 and-not CV2 and CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer ndm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and CV2 and CV3 and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer pdm12c CAA and CSP and CV1 and CV2 and CV3 and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nsm12c CAA and CSN and CV1 and CV2 and CV3 and-not CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and CV2 and CV3 and-not CTA and CCA grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer psm12c CAA and CSP and CV1 and CV2 and CV3 and-not CTA and CCC grow 20 and CM1 and CM2 and-not CWN grow 10 shrink 10 calma CV1 50 * layer nwsm12c CAA and CSN and CV1 and CV2 and CV3 and CWNR and-not CTA and CCA grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer nwsm12c CAA and CSN and CV1 and CV2 and CV3 and CWNR and-not CTA and CCC grow 20 and CM1 and CM2 and CWN grow 10 shrink 10 calma CV1 50 * layer fp 100 calma 100 100 * layer fm1 101 calma 101 101 * layer fm2 102 calma 102 102 * layer fm3 103 calma 103 103 * layer fm4 104 calma 104 104 * layer fa 109 calma 109 109 * layer fn 119 calma 119 119 * layer fapm 110 calma 110 110 * layer m3c CV2 and-not CV3 and-not CV1 and-not XP grow 20 and CM3 and CM2 grow 10 shrink 10 calma CV2 61 * layer m123c CV2 and-not CV3 and CV1 and-not XP grow 20 and CM3 and CM2 and CM1 grow 10 shrink 10 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT and-not XP labels CM3 calma CM3 62 * layer rm3 CRM and CM3 calma CRM 70 * layer rm3 CRT and CM3 calma CRT 73 * layer pseudo_rmetal3 CRT and-not rm3 calma CRT 73 * layer m3p CMTP labels CMTP calma CMTP 83 * layer m234c CV3 and CV2 and-not XP grow 20 and CM4 and CM3 and CM2 grow 20 shrink 20 calma CV3 30 * layer m4 CM4 and-not CRM and-not CRQ and-not XP labels CM4 calma CM4 31 * layer rm4 CRM and CM4 calma CRM 70 * layer rm4 CRQ and CM4 calma CRQ 74 * layer pseudo_rmetal4 CRQ and-not rm4 calma CRQ 74 * layer m4p CMQP labels CMQP calma CMQP 84 * layer m4c CV3 and-not CV2 and-not XP grow 20 and CM4 and CM3 grow 20 shrink 20 calma CV3 30 * layer pad XP labels pad calma XP 26 * layer glass COG and-not COP and-not XP labels COG calma COG 52 * layer nfi CFI and CWN labels CFI calma CFI 27 * layer pfi CFI and-not CWN labels CFI calma CFI 27 * layer sb CSB and-not CWNR labels CSB calma CSB 29 * layer pres CPG and CSB calma CPG 46 * layer anres CAA and CSN and-not CWNR and-not CTA and CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer apres CAA and CSP and-not CWNR and-not CTA and CSB and-not CPG and CWN and-not CSN and-not CPS and-not CBA calma CAA 43 * layer comment CX labels CX calma CX 63 * calma CTA 60 * #CRE/CRM calma CRW 65 * calma CRG 67 * calma CRD 66 * calma CRE 64 * calma CRF 71 * calma CRS 72 * calma CRT 73 * calma CRQ 74 * calma CRM 70 * style lambda=0.20(c) scalefactor 20 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer rnw CWN and-not CWNR and CRE and-not CSB and-not CRD and-not CAA and-not CPG calma CWN 42 * layer rnw CWN and-not CWNR and CRW and-not CRD and-not CAA and-not CPG calma CWN 42 * layer pseudo_rnwell CRW and-not CRE calma CRW 65 * calma CWNR 91 * layer nwr CWND calma CWND 92 * layer pseudo_nwr CRNW calma CRNW 93 * ignore CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * calma CSN 45 * calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer rnd CAA and CSN and-not CWNR and CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer rnd CAA and CSN and-not CWNR and CRD and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer pseudo_rndiff CRD and-not CRE and-not CAA and-not CSB and-not CPG and-not CWN and-not CSP and CSN and-not CBA calma CRD 66 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer rpd CAA and CSP and-not CWNR and CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CAA 43 * layer rpd CAA and CSP and-not CWNR and CRD and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CAA 43 * layer pseudo_rpdiff CRD and-not CRE and-not CAA and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CRD 66 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nwsd CAA and CSN and CWNR shrink 100 and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer gc CCA and CPG and-not CEL calma CCA 48 * layer gc CCP and CPG and-not CEL calma CCP 47 * layer gc CCC and CPG and-not CEL calma CCC 25 * layer gc CCE and CPG and-not CEL calma CCE 55 * layer gc CCA and-not COP and-not CPC and-not CEL calma CCA 48 * layer gc CCP and-not COP and-not CPC and-not CEL calma CCP 47 * layer gc CCC and-not COP and-not CPC and-not CEL calma CCC 25 * layer gc CCE and-not COP and-not CPC and-not CEL calma CCE 55 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer rp CPG and CRE and-not CSB calma CPG 46 * layer rp CPG and CRG calma CPG 46 * layer pseudo_rpoly CRG and-not CRE calma CRG 67 * layer m1 CM1 and-not CRM and-not CRF labels CM1 calma CM1 49 * layer rm1 CRM and CM1 calma CRM 70 * layer rm1 CRF and CM1 calma CRF 71 * layer pseudo_rmetal1 CRF and-not rm1 calma CRF 71 * layer m1p CMFP labels CMFP calma CMFP 81 * layer gv1 CV1 calma CV1 50 * layer m2 CM2 and-not CRM and-not CRS labels CM2 calma CM2 51 * layer rm2 CRM and CM2 calma CRM 70 * layer rm2 CRS and CM2 calma CRS 72 * layer pseudo_rmetal2 CRS and-not rm2 calma CRS 72 * layer m2p CMSP labels CMSP calma CMSP 82 * layer fp 100 calma 100 100 * layer fm1 101 calma 101 101 * layer fm2 102 calma 102 102 * layer fm3 103 calma 103 103 * layer fm4 104 calma 104 104 * layer fa 109 calma 109 109 * layer fn 119 calma 119 119 * layer fapm 110 calma 110 110 * layer gv2 CV2 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT labels CM3 calma CM3 62 * layer rm3 CRM and CM3 calma CRM 70 * layer rm3 CRT and CM3 calma CRT 73 * layer pseudo_rmetal3 CRT and-not rm3 calma CRT 73 * layer m3p CMTP labels CMTP calma CMTP 83 * layer gv3 CV3 calma CV3 30 * layer m4 CM4 and-not CRM and-not CRQ labels CM4 calma CM4 31 * layer rm4 CRM and CM4 calma CRM 70 * layer rm4 CRQ and CM4 calma CRQ 74 * layer pseudo_rmetal4 CRQ and-not rm4 calma CRQ 74 * layer m4p CMQP labels CMQP calma CMQP 84 * layer xp XP calma XP 26 * layer glass COG and-not COP labels COG calma COG 52 * layer nfi CFI and CWN labels CFI calma CFI 27 * layer pfi CFI and-not CWN labels CFI calma CFI 27 * layer sb CSB and-not CWNR labels CSB calma CSB 29 * layer pres CPG and CSB calma CPG 46 * layer anres CAA and CSN and-not CWNR and-not CTA and CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer apres CAA and CSP and-not CWNR and-not CTA and CSB and-not CPG and CWN and-not CSN and-not CPS and-not CBA calma CAA 43 * layer comment CX labels CX calma CX 63 * calma CTA 60 * #CRE/CRM calma CRW 65 * calma CRG 67 * calma CRD 66 * calma CRE 64 * calma CRF 71 * calma CRS 72 * calma CRT 73 * calma CRQ 74 * calma CRM 70 * style lambda=0.20(cs) scalefactor 20 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer rnw CWN and-not CWNR and CRE and-not CSB and-not CRD and-not CAA and-not CPG calma CWN 42 * layer rnw CWN and-not CWNR and CRW and-not CRD and-not CAA and-not CPG calma CWN 42 * layer pseudo_rnwell CRW and-not CRE calma CRW 65 * calma CWNR 91 * layer nwr CWND calma CWND 92 * layer pseudo_nwr CRNW calma CRNW 93 * ignore CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer nselect CSN calma CSN 45 * layer pselect CSP calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer rnd CAA and CSN and-not CWNR and CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer rnd CAA and CSN and-not CWNR and CRD and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer pseudo_rndiff CRD and-not CRE and-not CAA and-not CSB and-not CPG and-not CWN and-not CSP and CSN and-not CBA calma CRD 66 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer rpd CAA and CSP and-not CWNR and CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CAA 43 * layer rpd CAA and CSP and-not CWNR and CRD and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CAA 43 * layer pseudo_rpdiff CRD and-not CRE and-not CAA and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CRD 66 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nwsd CAA and CSN and CWNR shrink 100 and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer gc CCA and CPG and-not CEL calma CCA 48 * layer gc CCP and CPG and-not CEL calma CCP 47 * layer gc CCC and CPG and-not CEL calma CCC 25 * layer gc CCE and CPG and-not CEL calma CCE 55 * layer gc CCA and-not COP and-not CPC and-not CEL calma CCA 48 * layer gc CCP and-not COP and-not CPC and-not CEL calma CCP 47 * layer gc CCC and-not COP and-not CPC and-not CEL calma CCC 25 * layer gc CCE and-not COP and-not CPC and-not CEL calma CCE 55 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer rp CPG and CRE and-not CSB calma CPG 46 * layer rp CPG and CRG calma CPG 46 * layer pseudo_rpoly CRG and-not CRE calma CRG 67 * layer m1 CM1 and-not CRM and-not CRF labels CM1 calma CM1 49 * layer rm1 CRM and CM1 calma CRM 70 * layer rm1 CRF and CM1 calma CRF 71 * layer pseudo_rmetal1 CRF and-not rm1 calma CRF 71 * layer m1p CMFP labels CMFP calma CMFP 81 * layer gv1 CV1 calma CV1 50 * layer m2 CM2 and-not CRM and-not CRS labels CM2 calma CM2 51 * layer rm2 CRM and CM2 calma CRM 70 * layer rm2 CRS and CM2 calma CRS 72 * layer pseudo_rmetal2 CRS and-not rm2 calma CRS 72 * layer m2p CMSP labels CMSP calma CMSP 82 * layer fp 100 calma 100 100 * layer fm1 101 calma 101 101 * layer fm2 102 calma 102 102 * layer fm3 103 calma 103 103 * layer fm4 104 calma 104 104 * layer fa 109 calma 109 109 * layer fn 119 calma 119 119 * layer fapm 110 calma 110 110 * layer gv2 CV2 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT labels CM3 calma CM3 62 * layer rm3 CRM and CM3 calma CRM 70 * layer rm3 CRT and CM3 calma CRT 73 * layer pseudo_rmetal3 CRT and-not rm3 calma CRT 73 * layer m3p CMTP labels CMTP calma CMTP 83 * layer gv3 CV3 calma CV3 30 * layer m4 CM4 and-not CRM and-not CRQ labels CM4 calma CM4 31 * layer rm4 CRM and CM4 calma CRM 70 * layer rm4 CRQ and CM4 calma CRQ 74 * layer pseudo_rmetal4 CRQ and-not rm4 calma CRQ 74 * layer m4p CMQP labels CMQP calma CMQP 84 * layer xp XP calma XP 26 * layer glass COG and-not COP labels COG calma COG 52 * layer nfi CFI and CWN labels CFI calma CFI 27 * layer pfi CFI and-not CWN labels CFI calma CFI 27 * layer sb CSB and-not CWNR labels CSB calma CSB 29 * layer pres CPG and CSB calma CPG 46 * layer anres CAA and CSN and-not CWNR and-not CTA and CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer apres CAA and CSP and-not CWNR and-not CTA and CSB and-not CPG and CWN and-not CSN and-not CPS and-not CBA calma CAA 43 * layer comment CX labels CX calma CX 63 * calma CTA 60 * #CRE/CRM calma CRW 65 * calma CRG 67 * calma CRD 66 * calma CRE 64 * calma CRF 71 * calma CRS 72 * calma CRT 73 * calma CRQ 74 * calma CRM 70 * style lambda=0.20(cps) scalefactor 20 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer rnw CWN and-not CWNR and CRE and-not CSB and-not CRD and-not CAA and-not CPG calma CWN 42 * layer rnw CWN and-not CWNR and CRW and-not CRD and-not CAA and-not CPG calma CWN 42 * layer pseudo_rnwell CRW and-not CRE calma CRW 65 * calma CWNR 91 * layer nwr CWND calma CWND 92 * layer pseudo_nwr CRNW calma CRNW 93 * layer pwell CWP and-not CTA labels CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer nselect CSN calma CSN 45 * layer pselect CSP calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer rnd CAA and CSN and-not CWNR and CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer rnd CAA and CSN and-not CWNR and CRD and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer pseudo_rndiff CRD and-not CRE and-not CAA and-not CSB and-not CPG and-not CWN and-not CSP and CSN and-not CBA calma CRD 66 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer rpd CAA and CSP and-not CWNR and CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CAA 43 * layer rpd CAA and CSP and-not CWNR and CRD and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CAA 43 * layer pseudo_rpdiff CRD and-not CRE and-not CAA and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CRD 66 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nwsd CAA and CSN and CWNR shrink 100 and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer gc CCA and CPG and-not CEL calma CCA 48 * layer gc CCP and CPG and-not CEL calma CCP 47 * layer gc CCC and CPG and-not CEL calma CCC 25 * layer gc CCE and CPG and-not CEL calma CCE 55 * layer gc CCA and-not COP and-not CPC and-not CEL calma CCA 48 * layer gc CCP and-not COP and-not CPC and-not CEL calma CCP 47 * layer gc CCC and-not COP and-not CPC and-not CEL calma CCC 25 * layer gc CCE and-not COP and-not CPC and-not CEL calma CCE 55 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer rp CPG and CRE and-not CSB calma CPG 46 * layer rp CPG and CRG calma CPG 46 * layer pseudo_rpoly CRG and-not CRE calma CRG 67 * layer m1 CM1 and-not CRM and-not CRF labels CM1 calma CM1 49 * layer rm1 CRM and CM1 calma CRM 70 * layer rm1 CRF and CM1 calma CRF 71 * layer pseudo_rmetal1 CRF and-not rm1 calma CRF 71 * layer m1p CMFP labels CMFP calma CMFP 81 * layer gv1 CV1 calma CV1 50 * layer m2 CM2 and-not CRM and-not CRS labels CM2 calma CM2 51 * layer rm2 CRM and CM2 calma CRM 70 * layer rm2 CRS and CM2 calma CRS 72 * layer pseudo_rmetal2 CRS and-not rm2 calma CRS 72 * layer m2p CMSP labels CMSP calma CMSP 82 * layer fp 100 calma 100 100 * layer fm1 101 calma 101 101 * layer fm2 102 calma 102 102 * layer fm3 103 calma 103 103 * layer fm4 104 calma 104 104 * layer fa 109 calma 109 109 * layer fn 119 calma 119 119 * layer fapm 110 calma 110 110 * layer gv2 CV2 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT labels CM3 calma CM3 62 * layer rm3 CRM and CM3 calma CRM 70 * layer rm3 CRT and CM3 calma CRT 73 * layer pseudo_rmetal3 CRT and-not rm3 calma CRT 73 * layer m3p CMTP labels CMTP calma CMTP 83 * layer gv3 CV3 calma CV3 30 * layer m4 CM4 and-not CRM and-not CRQ labels CM4 calma CM4 31 * layer rm4 CRM and CM4 calma CRM 70 * layer rm4 CRQ and CM4 calma CRQ 74 * layer pseudo_rmetal4 CRQ and-not rm4 calma CRQ 74 * layer m4p CMQP labels CMQP calma CMQP 84 * layer xp XP calma XP 26 * layer glass COG and-not COP labels COG calma COG 52 * layer nfi CFI and CWN labels CFI calma CFI 27 * layer pfi CFI and-not CWN labels CFI calma CFI 27 * layer sb CSB and-not CWNR labels CSB calma CSB 29 * layer pres CPG and CSB calma CPG 46 * layer anres CAA and CSN and-not CWNR and-not CTA and CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer apres CAA and CSP and-not CWNR and-not CTA and CSB and-not CPG and CWN and-not CSN and-not CPS and-not CBA calma CAA 43 * layer comment CX labels CX calma CX 63 * calma CTA 60 * #CRE/CRM calma CRW 65 * calma CRG 67 * calma CRD 66 * calma CRE 64 * calma CRF 71 * calma CRS 72 * calma CRT 73 * calma CRQ 74 * calma CRM 70 * style lambda=0.20(cp) scalefactor 20 layer nwell CWN and-not CWNR and-not CTA labels CWN calma CWN 42 * layer rnw CWN and-not CWNR and CRE and-not CSB and-not CRD and-not CAA and-not CPG calma CWN 42 * layer rnw CWN and-not CWNR and CRW and-not CRD and-not CAA and-not CPG calma CWN 42 * layer pseudo_rnwell CRW and-not CRE calma CRW 65 * calma CWNR 91 * layer nwr CWND calma CWND 92 * layer pseudo_nwr CRNW calma CRNW 93 * layer pwell CWP and-not CTA labels CWP calma CWP 41 * layer diff CAA and-not CTA and-not CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * layer tran CAA and-not CTA and CPG and-not CWNR and-not COP and-not CSN and-not CSP labels CAA calma CAA 43 * calma CSN 45 * calma CSP 44 * layer ndiff CAA and CSN and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer rnd CAA and CSN and-not CWNR and CRE and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer rnd CAA and CSN and-not CWNR and CRD and-not CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer pseudo_rndiff CRD and-not CRE and-not CAA and-not CSB and-not CPG and-not CWN and-not CSP and CSN and-not CBA calma CRD 66 * layer pdiff CAA and CSP and-not CWNR and-not CTA and-not CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer rpd CAA and CSP and-not CWNR and CRE and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CAA 43 * layer rpd CAA and CSP and-not CWNR and CRD and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CAA 43 * layer pseudo_rpdiff CRD and-not CRE and-not CAA and-not CSB and-not CPG and CWN and-not CSN and-not CPS and CSP and-not CBA calma CRD 66 * layer nfet CAA and CSN and-not CWNR and-not CTA and CPG and-not CEL and-not CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer pfet CAA and CSP and-not CWNR and-not CTA and CPG and-not CEL and CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nsd CAA and CSN and-not CWNR and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer psd CAA and CSP and-not CWNR and-not CTA and-not CWN and-not CSN and-not CPS and CSP and-not CBA labels CAA calma CAA 43 * layer nwsd CAA and CSN and CWNR shrink 100 and-not CTA and CWN and-not CSP and-not CBA labels CAA calma CAA 43 * layer gc CCA and CPG and-not CEL calma CCA 48 * layer gc CCP and CPG and-not CEL calma CCP 47 * layer gc CCC and CPG and-not CEL calma CCC 25 * layer gc CCE and CPG and-not CEL calma CCE 55 * layer gc CCA and-not COP and-not CPC and-not CEL calma CCA 48 * layer gc CCP and-not COP and-not CPC and-not CEL calma CCP 47 * layer gc CCC and-not COP and-not CPC and-not CEL calma CCC 25 * layer gc CCE and-not COP and-not CPC and-not CEL calma CCE 55 * layer poly CPG and-not CRE labels CPG calma CPG 46 * layer rp CPG and CRE and-not CSB calma CPG 46 * layer rp CPG and CRG calma CPG 46 * layer pseudo_rpoly CRG and-not CRE calma CRG 67 * layer m1 CM1 and-not CRM and-not CRF labels CM1 calma CM1 49 * layer rm1 CRM and CM1 calma CRM 70 * layer rm1 CRF and CM1 calma CRF 71 * layer pseudo_rmetal1 CRF and-not rm1 calma CRF 71 * layer m1p CMFP labels CMFP calma CMFP 81 * layer gv1 CV1 calma CV1 50 * layer m2 CM2 and-not CRM and-not CRS labels CM2 calma CM2 51 * layer rm2 CRM and CM2 calma CRM 70 * layer rm2 CRS and CM2 calma CRS 72 * layer pseudo_rmetal2 CRS and-not rm2 calma CRS 72 * layer m2p CMSP labels CMSP calma CMSP 82 * layer fp 100 calma 100 100 * layer fm1 101 calma 101 101 * layer fm2 102 calma 102 102 * layer fm3 103 calma 103 103 * layer fm4 104 calma 104 104 * layer fa 109 calma 109 109 * layer fn 119 calma 119 119 * layer fapm 110 calma 110 110 * layer gv2 CV2 calma CV2 61 * layer m3 CM3 and-not CRM and-not CRT labels CM3 calma CM3 62 * layer rm3 CRM and CM3 calma CRM 70 * layer rm3 CRT and CM3 calma CRT 73 * layer pseudo_rmetal3 CRT and-not rm3 calma CRT 73 * layer m3p CMTP labels CMTP calma CMTP 83 * layer gv3 CV3 calma CV3 30 * layer m4 CM4 and-not CRM and-not CRQ labels CM4 calma CM4 31 * layer rm4 CRM and CM4 calma CRM 70 * layer rm4 CRQ and CM4 calma CRQ 74 * layer pseudo_rmetal4 CRQ and-not rm4 calma CRQ 74 * layer m4p CMQP labels CMQP calma CMQP 84 * layer xp XP calma XP 26 * layer glass COG and-not COP labels COG calma COG 52 * layer nfi CFI and CWN labels CFI calma CFI 27 * layer pfi CFI and-not CWN labels CFI calma CFI 27 * layer sb CSB and-not CWNR labels CSB calma CSB 29 * layer pres CPG and CSB calma CPG 46 * layer anres CAA and CSN and-not CWNR and-not CTA and CSB and-not CPG and-not CWN and-not CSP and-not CBA calma CAA 43 * layer apres CAA and CSP and-not CWNR and-not CTA and CSB and-not CPG and CWN and-not CSN and-not CPS and-not CBA calma CAA 43 * layer comment CX labels CX calma CX 63 * calma CTA 60 * #CRE/CRM calma CRW 65 * calma CRG 67 * calma CRD 66 * calma CRE 64 * calma CRF 71 * calma CRS 72 * calma CRT 73 * calma CRQ 74 * calma CRM 70 * style fill-only scalefactor 20 # scalefactor 100 layer fp 100 calma 100 100 * layer fm1 101 calma 101 101 * layer fm2 102 calma 102 102 * layer fm3 103 calma 103 103 * layer fm4 104 calma 104 104 * layer fa 109 or fb calma 109 109 * layer fn 119 calma 119 119 * layer fapm 110 calma 110 110 * end mzrouter style irouter # layer hCost vCost jogCost hintCost layer metal4 2 1 2 1 layer metal3 1 2 2 1 layer metal2 2 1 2 1 layer metal1 2 3 2 1 layer poly 10 10 11 1 contact m4contact metal4 metal3 4 contact m3contact metal3 metal2 5 contact m2contact metal2 metal1 6 contact pcontact metal1 poly 7 notactive poly pcontact style garouter layer m2 32 64 256 1 layer m1 64 32 256 1 contact m2contact metal1 metal2 1024 end drc width nwell 12 \ "N-well width < 12 (Mosis #1.1)" width rnw 12 \ "rnwell (for resistor L/W extraction) width < 12 (Mosis #1.1)" width nwr 12 \ "nwr (for Fig1b resistor L/W extraction) width < 12 (Mosis #Fig1bX)" width pwell 12 \ "P-well width < 12 (Mosis #1.1)" width diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a 3 \ "Diffusion width < 3 (Mosis #2.1)" edge4way nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a pdiff,apres,rpd,pdc/a,pdm12c/a 3 ~(nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a)/active pdiff,apres,rpd,pdc/a,pdm12c/a 3 \ "P-Diffusion width in N-Ohmic < 3 (Mosis #2.1)" active edge4way psd,psc/a,psm12c/a ndiff,anres,rnd,ndc/a,ndm12c/a 3 ~(psd,psc/a,psm12c/a)/active ndiff,anres,rnd,ndc/a,ndm12c/a 3 \ "N-Diffusion width in P-Ohmic < 3 (Mosis #2.1)" active edge4way pdiff,apres,rpd,pdc/a,pdm12c/a nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a 3 ~(pdiff,apres,rpd,pdc/a,pdm12c/a)/active nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a 3 \ "N-Ohmic width in P-Diffusion < 3 (Mosis #2.1)" active edge4way ndiff,anres,rnd,ndc/a,ndm12c/a psd,psc/a,psm12c/a 3 ~(ndiff,anres,rnd,ndc/a,ndm12c/a)/active psd,psc/a,psm12c/a 3 \ "P-Ohmic width in N-Diffusion < 3 (Mosis #2.1)" active width poly,fp,pres,rp,pc/a,pm12c/a,nfet,pfet,fet 2 \ "Poly width < 2 (Mosis #3.1)" width nselect 3 \ "N-Select width < 3 (Mosis #4.4)" width pselect 3 \ "P-Select width < 3 (Mosis #4.4)" width ndiff,anres,rnd,ndc/a,ndm12c/a,nsd,nsc/a,nsm12c/a 3 \ "N-Diffusion,N-Ohmic width < 3 (Mosis #4.4)" width pdiff,apres,rpd,pdc/a,pdm12c/a,psd,psc/a,psm12c/a 3 \ "P-Diffusion,P-Ohmic width < 3 (Mosis #4.4)" width pc/m1 4 \ "Poly contact width < 4 (Mosis #5.1)" width pm12c/m1 4 \ "Poly contact width < 4 (Mosis #5.1)" width gc 2 \ "GC contact width < 2 (Mosis #6.1)" width ndc/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width ndm12c/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width nsc/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width nwsc/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width nsm12c/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width nwsm12c/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width nwsc 6 \ "nwr (for Fig1b resistor) active Contact width < 6 (Mosis #Fig1b)" width pdc/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width pdm12c/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width psc/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width psm12c/m1 4 \ "Diffusion contact width < 4 (Mosis #6.1)" width m1,fm1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,m123c/m1 3 \ "Metal1 width < 3 (Mosis #7.1)" width gv1 2 \ "GV1 via width < 2 (Mosis #8.1)" width m2c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width pdm12c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width ndm12c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width psm12c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width nsm12c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width pm12c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width m123c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width nwsm12c/m1 4 \ "Metal2 contact width < 4 (Mosis #8.1)" width m2,fm2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m234c/m2 3 \ "Metal2 width < 3 (Mosis #9.1)" width gv2 2 \ "GV2 via width < 2 (Mosis #14.1)" width m3c/m2 4 \ "Metal3 contact width < 4 (Mosis #14.1)" width m123c/m2 4 \ "Metal3 contact width < 4 (Mosis #14.1)" width m234c/m2 4 \ "Metal3 contact width < 4 (Mosis #14.1)" width m3,fm3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3 3 \ "Metal3 width < 3 (Mosis #15.1)" width sb,pres,anres,apres 4 \ "Silicide-Block width < 4 (Mosis #20.1)" width pres 5 \ "Silicide-Block polyR width < 5 (Mosis #20.6)" width anres,apres 6 \ "Silicide-Block activeR width < 6 (Mosis #20.16)" width gv3 2 \ "GV3 via width < 2 (Mosis #21.3)" width m4c/m3 4 \ "Metal4 contact width < 4 (Mosis #21.3)" width m234c/m3 4 \ "Metal4 contact width < 4 (Mosis #21.3)" width m4,fm4,rm4,m4c/m4,m234c/m4,pad 3 \ "Metal4 width < 3 (Mosis #22.1)" width nfi,pfi 4 \ "N/P_field-implant width < 4 (Mosis #29.1)" spacing nwell nwell 6 touching_ok \ "N-well(at-same-potential) spacing < 6 (Mosis #1.3)" spacing pwell pwell 6 touching_ok \ "P-well(at-same-potential) spacing < 6 (Mosis #1.3)" spacing rnw nwell 18 touching_illegal \ "rnw (for resistor L/W extraction) spacing to N-well < 18 (Mosis #2.3)" spacing nwr nwell 18 touching_illegal \ "nwr (for Fig1b resistor L/W extraction) spacing to N-well < 18 (Mosis #2.3)" edge4way ~(pwell)/well pwell 1 ~(rnw)/active 0 0 \ "P-well cannot touch rnw (for resistor L/W extraction) (Mosis #1.4)" active edge4way ~(pwell)/well pwell 1 ~(nwr)/active 0 0 \ "P-well cannot touch nwr (for Fig1b resistor L/W extraction) (Mosis #1.4)" active spacing diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a 3 touching_ok \ "Diffusion spacing < 3 (Mosis #2.2)" spacing nwell ndiff,anres,rnd,nfet,ndc/a,ndm12c/a 6 touching_illegal \ "N-well spacing to N-Diffusion < 6 (Mosis #2.3)" spacing pwell pdiff,apres,rpd,pfet,pdc/a,pdm12c/a 6 touching_illegal \ "P-well spacing to P-Diffusion < 6 (Mosis #2.3)" spacing ndiff,anres,rnd,nfet,ndc/a,ndm12c/a pdiff,apres,rpd,pfet,pdc/a,pdm12c/a 12 touching_illegal \ "N-Diffusion spacing to P-Diffusion < 12 (Mosis #2.3+2.3)" edge4way ~(nwell)/well nwell 6 ~(pdiff,apres,rpd,pfet,pdc/a,pdm12c/a)/active nwell 6 \ "N-well overlap of P-Diffusion < 6 (Mosis #2.4)" active edge4way ~(pwell)/well pwell 6 ~(ndiff,anres,rnd,nfet,ndc/a,ndm12c/a)/active pwell 6 \ "P-well overlap of N-Diffusion < 6 (Mosis #2.4)" active edge4way ~(nwell)/well nwell 3 ~(nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a)/active nwell 3 \ "N-well overlap of N-Ohmic < 3 (Mosis #2.4)" active edge4way ~(pwell)/well pwell 3 ~(psd,psc/a,psm12c/a)/active pwell 3 \ "P-well overlap of P-Ohmic < 3 (Mosis #2.4)" active spacing ndiff,anres,rnd,ndc/a,ndm12c/a nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a 9 touching_illegal \ "N-Diffusion spacing to N-Ohmic < 9 (Mosis #2.3+2.4)" spacing pdiff,apres,rpd,pdc/a,pdm12c/a psd,psc/a,psm12c/a 9 touching_illegal \ "P-Diffusion spacing to P-Ohmic < 9 (Mosis #2.3+2.4)" spacing nwell psd,psc/a,psm12c/a 3 touching_illegal \ "N-well spacing to P-Ohmic < 3 (Mosis #2.4)" spacing pwell nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a 3 touching_illegal \ "P-well spacing to N-Ohmic < 3 (Mosis #2.4)" spacing psd,psc/a,psm12c/a rnw,prnw 3 touching_illegal \ "P-Ohmic spacing to rnw,prnw < 3 (Mosis #2.4)" spacing psd,psc/a,psm12c/a nwr,pnwr 3 touching_illegal \ "P-Ohmic spacing to nwr,pnwr (for Fig1b Resistor) < 3 (Mosis #2.4)" spacing nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a psd,psc/a,psm12c/a 6 touching_illegal \ "N-Ohmic spacing to P-Ohmic < 6 (Mosis #2.4+2.4)" spacing ndiff,anres,rnd,nfet,ndc/a,ndm12c/a,nfet psd,psc/a,psm12c/a 4 touching_ok \ "N-Diffusion spacing to P-Ohmic < 4 (Mosis #2.5)" spacing pdiff,apres,rpd,pfet,pdc/a,pdm12c/a,pfet nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a 4 touching_ok \ "P-Diffusion spacing to N-Ohmic < 4 (Mosis #2.5)" spacing poly,pres,rp,pc/a,pm12c/a,nfet,pfet,fet poly,pres,rp,pc/a,pm12c/a,nfet,pfet,fet 3 touching_ok \ "Poly spacing < 3 (Mosis #3.2)" spacing poly,pres,rp,pc/a,pm12c/a,nfet,pfet,fet fp,fapm 3 touching_illegal \ "Poly spacing to fill layer (fp) < 3 (Mosis #3.2)" spacing fp fp 4 touching_ok \ "Poly fill layer (fp) spacing < 4 (Mosis #0)" edge4way nfet,pfet,fet space/active,poly,fp,pres,rp,pc/a,pm12c/a 2 poly,fp,pres,rp,pc/a,pm12c/a 0 0 \ "Poly overhang of Transistor < 2 (Mosis #3.3)" active edge4way nfet,pfet,fet space/active,ndiff,anres,rnd,ndc/a,ndm12c/a,pdiff,apres,rpd,pdc/a,pdm12c/a 3 ndiff,anres,rnd,ndc/a,ndm12c/a,pdiff,apres,rpd,pdc/a,pdm12c/a,nfet,pfet,fet 0 0 \ "N-Diffusion,P-Diffusion overhang of Transistor < 3 (Mosis #3.4)" active edge4way poly,fp,rp,pc/a,pm12c/a ~(poly,fp,pres,rp,pc/a,pm12c/a,nfet,pfet,fet,prp)/active 1 space space 1 \ "Poly spacing to Diffusion < 1 (Mosis #3.5)" edge4way nfet ~(nfet)/active 2 ~(pselect)/select ~(nfet)/active 2 \ "N-Transistor space to P-Select < 2 (Mosis #4.1)" select edge4way pfet ~(pfet)/active 2 ~(nselect)/select ~(pfet)/active 2 \ "P-Transistor space to N-Select < 2 (Mosis #4.1)" select edge4way nfet ~(nfet)/active 3 ~(psd,psc/a,psm12c/a)/active ~(nfet)/active 2 \ "N-Transistor space to P-Ohmic < 3 (Mosis #4.1)" active edge4way pfet ~(pfet)/active 3 ~(nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a)/active ~(pfet)/active 2 \ "P-Transistor space to N-Ohmic < 3 (Mosis #4.1)" active #PEZ edge4way psd,psc/a,psm12c/a space ~(nfet)/active space \ #PEZ "P-Ohmic space to N-Transistor < (Mosis #4.1)" active #PEZ edge4way nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a space ~(pfet)/active space \ #PEZ "N-Ohmic space to P-Transistor < (Mosis #4.1)" active edge4way ~(nselect,pselect)/select nselect,pselect 2 ~(diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a)/active nselect,pselect 2 \ "N-Select,P-Select overlap of Diffusion < 2 (Mosis #4.2_)" active edge4way space nselect,pselect 2 ~(ndiff,anres,rnd,nfet,ndc/a,ndm12c/a)/active nselect 2 \ "N-Select space to N-Diffusion < 2 (Mosis #4.2a)" active edge4way nselect,pselect space 2 ~(ndiff,anres,rnd,nfet,ndc/a,ndm12c/a)/active nselect 2 \ "N-Select space to N-Diffusion < 2 (Mosis #4.2b)" active edge4way nselect,pselect space 2 ~(ndiff,anres,rnd,nfet,ndc/a,ndm12c/a)/active space,nselect,pselect 2 \ "N-Select space to N-Diffusion < 2 (Mosis #4.2c)" active edge4way space nselect,pselect 2 ~(pdiff,apres,rpd,pfet,pdc/a,pdm12c/a)/active pselect 2 \ "P-Select space to P-Diffusion < 2 (Mosis #4.2aa)" active edge4way nselect,pselect space 2 ~(pdiff,apres,rpd,pfet,pdc/a,pdm12c/a)/active pselect 2 \ "P-Select space to P-Diffusion < 2 (Mosis #4.2bb)" active edge4way nselect,pselect space 2 ~(pdiff,apres,rpd,pfet,pdc/a,pdm12c/a)/active space,nselect,pselect 2 \ "P-Select space to P-Diffusion < 2 (Mosis #4.2cc)" active area nsd,nwsd,psd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,psc/a,psm12c/a 16 3 \ "Ohmic-Diffusion area < 16 (Mosis #+++)" edge4way diff space 2 nselect space 2 \ "N-Select must overlap Diffusion by 2 (Mosis #4.2)" select edge4way diff space 2 pselect space 2 \ "P-Select must overlap Diffusion by 2 (Mosis #4.2)" select edge4way ndiff,anres,rnd,nfet,ndc/a,ndm12c/a space 2 ~(pselect)/select space 2 \ "P-Select space to N-Diffusion < 2 (Mosis #4.2e)" select edge4way pdiff,apres,rpd,pfet,pdc/a,pdm12c/a space 2 ~(nselect)/select space 2 \ "N-Select space to P-Diffusion < 2 (Mosis #4.2e)" select edge4way ~(pdiff,apres,rpd,pfet,pdc/a,pdm12c/a,psd,psc/a,psm12c/a)/active pdiff,apres,rpd,pfet,pdc/a,pdm12c/a,psd,psc/a,psm12c/a 1 ~(nselect)/select 0 0 \ "N-Select cannot touch P-Diffusion,P-Ohmic (Mosis #4.2f)" select edge4way ~(ndiff,anres,rnd,nfet,ndc/a,ndm12c/a,nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a)/active ndiff,anres,rnd,nfet,ndc/a,ndm12c/a,nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a 1 ~(pselect)/select 0 0 \ "P-Select cannot touch N-Diffusion,N-Ohmic (Mosis #4.2f)" select spacing nselect nselect 3 touching_ok \ "N-Select spacing < 3 (Mosis #4.4)" spacing pselect pselect 3 touching_ok \ "P-Select spacing < 3 (Mosis #4.4)" edge4way ndiff,anres,rnd,ndc/a,ndm12c/a psd,psc/a,psm12c/a 2 ~(ndiff,anres,rnd,ndc/a,ndm12c/a)/active 0 0 \ "P-Ohmic(that touches N-Diffusion) width < 2 (Mosis #4.4)" edge4way pdiff,apres,rpd,pdc/a,pdm12c/a nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a 2 ~(pdiff,apres,rpd,pdc/a,pdm12c/a)/active 0 0 \ "N-Ohmic(that touches P-Diffusion) width < 2 (Mosis #4.4)" edge4way gc ~(gc)/contact 1 poly,fp,pres,rp,pc/a,pm12c/a,diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a ~(gc)/contact 1 \ "Poly,Diffusion overlap of GC contact < 1 (Mosis #5.2)" active edge4way ~(nwsd)/active nwsd 2 ~(gc)/contact nwsd 2 \ "nwr (for Fig1b resistor) active overlap of GC contact < 2 (Mosis #Fig1b)" contact spacing nwr gc 5 touching_illegal \ "nwr (for Fig1b resistor) spacing to GC contact < 5 (Mosis #Fig1b)" spacing nwr ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a 3 touching_illegal \ "nwr (for Fig1b resistor) spacing to Diffusion contact < 3 (Mosis #Fig1b)" edge4way gc space 1 poly,fp,pres,rp,pc/a,pm12c/a,diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a space 1 \ "one of: Poly,Diffusion must overlap GC contact by 1 (Mosis #5.2a,6.2a)" active edge4way ~(poly,fp,pres,rp,pc/a,pm12c/a,diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a)/active poly,fp,pres,rp,pc/a,pm12c/a,diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a 1 ~(gc)/contact 0 0 \ "Edge to one of: Poly,Diffusion cannot touch GC contact (Mosis #5.2a,6.2a)" contact spacing gc gc 3 touching_ok \ "Generic contact spacing < 3 (Mosis #5.3)" edge4way ~(gc)/contact gc 1 ~(ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1)/metal1 0 0 \ "GC contact cannot touch Metal1 contacts (Mosis #0)" metal1 spacing gv1 m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2 2 touching_illegal \ "GV1 via spacing to Metal2 contacts < 2 (Mosis #14.2)" #PSC spacing poly,fp,pres,rp,pc/a,pm12c/a pc/a,pm12c/a 4 touching_ok \ #PSC "Poly spacing to Poly contact < 4 (Mosis #5.5.b)" edge4way gc ~(gc)/contact 1 diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,poly,fp,pres,rp,pc/a,pm12c/a ~(gc)/contact 1 \ "Diffusion,Poly overlap of GC contact < 1 (Mosis #6.2)" active spacing gc pc/a,pm12c/a,ndc/a,ndm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a 2 touching_illegal \ "Generic contact spacing to Poly contact,Diffusion contact < 2 (Mosis #5.3)" spacing nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1 pdc/m1,pdm12c/m1 1 touching_illegal \ "nsc spacing to pdc < 1 (Mosis #6.3)" spacing psc/m1,psm12c/m1 ndc/m1,ndm12c/m1 1 touching_illegal \ "psc spacing to ndc < 1 (Mosis #6.3)" spacing pdm12c/m1 pdc/m1,m2c/m1,nsm12c/m1 1 touching_illegal \ "pdm12c spacing to pdc or m2c or nsm12c < 1 (Mosis #6.3)" spacing psm12c/m1 psc/m1,m2c/m1 1 touching_illegal \ "psm12c spacing to psc or m2c < 1 (Mosis #6.3)" spacing ndm12c/m1 ndc/m1,m2c/m1,nsm12c/m1 1 touching_illegal \ "ndm12c spacing to ndc or m2c or nsm12c < 1 (Mosis #6.3)" spacing nsm12c/m1 nsc/m1,m2c/m1 1 touching_illegal \ "nsm12c spacing to nsc or m2c < 1 (Mosis #6.3)" spacing pm12c/m1 pc/m1,m2c/m1 1 touching_illegal \ "pm12c spacing to pc or m2c < 1 (Mosis #6.3)" spacing m123c/m2 pdm12c/m2,psm12c/m2,ndm12c/m2,nsm12c/m2,pm12c/m2,m2c/m2,m3c/m2 1 touching_illegal \ "m123c spacing to *m12c or m2c or m3c < 1 (Mosis #6.3)" spacing m234c/m3 m3c/m3,m4c/m3,m123c/m3 1 touching_illegal \ "m234c spacing to m3c or m4c or m123c < 1 (Mosis #6.3)" spacing nfet,pfet ndc/a,ndm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a 1 touching_illegal \ "N-Transistor,P-Transistor spacing to Diffusion contact < 1 (Mosis #6.4)" spacing nfet,pfet gc 2 touching_illegal \ "N-Transistor,P-Transistor spacing to Generic contact < 2 (Mosis #6.4)" spacing diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a pc/a,pm12c/a 1 touching_illegal \ "Diffusion spacing to Poly contact < 1 (Mosis #6.5.b)" spacing diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,nfet,pfet ndc/a,ndm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a 4 touching_ok \ "Diffusion spacing to Diffusion contact < 4 (Mosis #6.5.b)" spacing pc/a,pm12c/a ndc/a,ndm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a 2 touching_illegal \ "pc/a,pm12c/a spacing to ndc/a,ndm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a < 2 (Mosis #6.7)" spacing m1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,m123c/m1 m1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,m123c/m1 3 touching_ok \ "Metal1 spacing < 3 (Mosis #7.2)" spacing m1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,m123c/m1 fm1,fapm 3 touching_illegal \ "Metal1 spacing to fill layer (fm1) < 3 (Mosis #7.2)" spacing fm1 fm1 4 touching_ok \ "Metal1 fill layer (fm1) spacing < 4 (Mosis #0)" edge4way gc space 1 m1,fm1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,m123c/m1 space 1 \ "Metal1 must overlap GC contact by 1 (Mosis #7.3,7.4)" metal1 edge4way ~(m1,fm1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,m123c/m1)/metal1 m1,fm1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,m123c/m1 1 ~(gc)/contact 0 0 \ "Metal1(edge) cannot touch GC contact (Mosis #7.3+7.4)" contact spacing gv1 gv1 3 touching_ok \ "GV1 via spacing < 3 (Mosis #8.2)" edge4way gv1 ~(gv1)/via1 1 m1,fm1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,m123c/m1 ~(gv1)/via1 1 \ "Metal1 overlap of GV1 via < 1 (Mosis #8.3)" metal1 edge4way gv1 space 1 m1,fm1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,m123c/m1 space 1 \ "Metal1 must overlap GV1 via by 1 (Mosis #8.3)" metal1 edge4way ~(m1,fm1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,m123c/m1)/metal1 m1,fm1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,m123c/m1 1 ~(gv1)/via1 0 0 \ "Metal1(edge) cannot touch GV1 via (Mosis #8.3)" via1 spacing m2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m234c/m2 m2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m234c/m2 3 touching_ok \ "Metal2 spacing < 3 (Mosis #9.2)" spacing m2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m234c/m2 fm2,fapm 3 touching_illegal \ "Metal2 spacing to fill layer (fm2) < 3 (Mosis #9.2)" spacing fm2 fm2 4 touching_ok \ "Metal2 fill layer (fm2) spacing < 4 (Mosis #0)" edge4way gv1 space 1 m2,fm2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m234c/m2 space 1 \ "Metal2 must overlap GV1 via by 1 (Mosis #9.3)" metal2 edge4way ~(m2,fm2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m234c/m2)/metal2 m2,fm2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m234c/m2 1 ~(gv1)/via1 0 0 \ "Metal2(edge) cannot touch GV1 via (Mosis #9.3)" via1 width glass 10 \ "COG width < 10 (Mosis #10.2)" edge4way ~(pad)/metal4 pad 30 ~(glass)/oxide pad 30 \ "pad overlap of COG < 30 (Mosis #10.3)" oxide spacing gv2 gv2 3 touching_ok \ "GV2 via spacing < 3 (Mosis #14.2)" spacing gv2 m3c/m2,m123c/m2,m234c/m2 2 touching_illegal \ "GV2 via spacing to Metal3 contact < 2 (Mosis #14.2)" edge4way gv2 space 1 m2,fm2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m234c/m2 space 1 \ "Metal2 must overlap GV2 via by 1 (Mosis #14.3)" metal2 edge4way ~(m2,fm2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m234c/m2)/metal2 m2,fm2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m234c/m2 1 ~(gv2)/via2 0 0 \ "Metal2(edge) cannot touch GV2 via (Mosis #14.3)" via2 spacing m3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3 m3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3 3 touching_ok \ "Metal3 spacing < 3 (Mosis #15.2)" spacing m3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3 fm3,fapm 3 touching_illegal \ "Metal3 spacing to fill layer (fm3) < 3 (Mosis #15.2)" spacing fm3 fm3 4 touching_ok \ "Metal3 fill layer (fm3) spacing < 4 (Mosis #0)" edge4way gv2 space 1 m3,fm3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3 space 1 \ "Metal3 must overlap GV2 via by 1 (Mosis #15.3)" metal3 edge4way ~(m3,fm3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3)/metal3 m3,fm3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3 1 ~(gv2)/via2 0 0 \ "Metal3(edge) cannot touch GV2 via (Mosis #15.3)" via2 spacing sb,pres,anres,apres sb,pres,anres,apres 4 touching_ok \ "Silicide-Block spacing < 4 (Mosis #20.2)" spacing sb,pres,anres,apres,pres,anres,apres pc/a,pm12c/a,ndc/a,ndm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a 1 touching_illegal \ "Silicide-Block spacing to Diffusion contact,Poly contact < 1 (Mosis #20.3)" spacing sb,pres,anres,apres,pres,anres,apres gc 2 touching_illegal \ "Silicide-Block spacing to GC contact < 2 (Mosis #20.3)" edge4way sb,pres,anres,apres space 2 ~(diff,ndiff,anres,rnd,nfet,nsd,nwsd,pdiff,apres,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a)/active 0 2 \ "Silicide-Block space to Diffusion < 2 (Mosis #20.4)" active spacing sb,pres,anres,apres,pres poly,fp,pres,rp,pc/a,pm12c/a 2 touching_ok \ "Silicide-Block spacing to other Poly < 2 (Mosis #20.5)" edge4way sb,pres,anres,apres space 2 ~(poly,fp,pres,rp,pc/a,pm12c/a)/contact sb,pres,anres,apres 2 \ "Silicide-Block space to Poly < 2 (Mosis #20.5x)" contact spacing sb,pres,anres,apres,pres nfet,pfet,fet 2 touching_ok \ "Silicide-Block spacing to other Transistor < 2 (Mosis #20.5)" edge4way sb,pres,anres,apres space 2 ~(nfet,pfet,fet)/contact sb,pres,anres,apres 2 \ "Silicide-Block space to Transistor < 2 (Mosis #20.5x)" contact spacing pres pres 7 touching_ok \ "Silicide-Block polyR spacing < 7 (Mosis #20.13)" edge4way pres,anres,apres space/active,sb 2 sb sb 2 \ "Silicide-Block overlap of Silicide-Block polyR/activeR < 2 (Mosis #20.15)" edge4way sb,pres,anres,apres diff,ndiff,rnd,nfet,nsd,nwsd,pdiff,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a 3 diff,ndiff,rnd,nfet,nsd,nwsd,pdiff,rpd,pfet,psd,ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a 0 0 \ "Diffusion overhang of Silicide-Block < 3 (Mosis #20.17) spacing gv3 gv3 3 touching_ok \ "GV3 via spacing < 3 (Mosis #21.2)" spacing gv3 m4c/m3,m234c/m3 2 touching_illegal \ "GV3 via spacing to Metal4 contact < 2 (Mosis #21.2)" edge4way gv3 space 1 m3,fm3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3 space 1 \ "Metal3 must overlap GV3 via by 1 (Mosis #21.3)" metal3 edge4way ~(m3,fm3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3)/metal3 m3,fm3,rm3,m3c/m3,m123c/m3,m234c/m3,m4c/m3 1 ~(gv3)/via3 0 0 \ "Metal3(edge) cannot touch GV3 via (Mosis #21.3)" via3 spacing m4,rm4,m4c/m4,m234c/m4,pad m4,rm4,m4c/m4,m234c/m4,pad 3 touching_ok \ "Metal4 spacing < 3 (Mosis #22.2)" spacing m4,rm4,m4c/m4,m234c/m4,pad fm4,fapm 3 touching_illegal \ "Metal4 spacing to fill layer (fm4) < 3 (Mosis #22.2)" spacing fm4 fm4 4 touching_ok \ "Metal4 fill layer (fm4) spacing < 4 (Mosis #0)" edge4way gv3 space 1 m4,fm4,rm4,m4c/m4,m234c/m4,pad space 1 \ "Metal4 must overlap GV3 via by 1 (Mosis #22.3)" metal4 edge4way ~(m4,fm4,rm4,m4c/m4,m234c/m4,pad)/metal4 m4,fm4,rm4,m4c/m4,m234c/m4,pad 1 ~(gv3)/via3 0 0 \ "Metal4(edge) cannot touch GV3 via (Mosis #22.3)" via3 spacing nfi nfi 4 touching_ok \ "N_field-implant spacing < 4 (Mosis #35.2)" spacing pfi pfi 4 touching_ok \ "P_field-implant spacing < 4 (Mosis #35.2)" spacing nfi pfi 4 touching_illegal \ "N_field-implant spacing to P_field-implant < 4 (Mosis #35.2)" spacing nwell,pdiff,apres,rpd,pfet,pdc/a,pdm12c/a pfi 4 touching_illegal \ "N-well,P-Diffusion spacing to P_field-implant < 4 (Mosis #2.1)" spacing pwell,ndiff,anres,rnd,nfet,ndc/a,ndm12c/a nfi 4 touching_illegal \ "P-well,N-Diffusion spacing to N_field-implant < 4 (Mosis #2.1)" edge4way ~(nwell)/well nwell 4 ~(nfi)/implant nwell 4 \ "N-well overlap of N_field-implant < 4 (Mosis #21.2)" implant edge4way ~(pwell)/well pwell 4 ~(pfi)/implant pwell 4 \ "P-well overlap of P_field-implant < 4 (Mosis #21.2)" implant spacing fa fapm 4 touching_illegal \ "fill layer fa spacing to fill layer fapm < 4 (Mosis #0)" width fa 10 \ "filla width < 10 (Mosis #0)" width fapm 10 \ "fillapm width < 10 (Mosis #0)" width fp 10 \ "fillp width < 10 (Mosis #0)" width fm1 10 \ "fillm1 width < 10 (Mosis #0)" width fm2 10 \ "fillm2 width < 10 (Mosis #0)" width fm3 10 \ "fillm3 width < 10 (Mosis #0)" width fm4 10 \ "fillm4 width < 10 (Mosis #0)" edge4way fa ~(fa)/fill 1 ~(fa)/fill (~(fa),fa)/fill 1 \ "Contact not rectangular (Magic rule)" edge4way fb ~(fb)/fill 1 ~(fb)/fill (~(fb),fb)/fill 1 \ "Contact not rectangular (Magic rule)" edge4way fapm ~(fapm)/active 1 ~(fapm)/active (~(fapm),fapm)/active 1 \ "Contact not rectangular (Magic rule)" edge4way fp ~(fp)/active 1 ~(fp)/active (~(fp),fp)/active 1 \ "Contact not rectangular (Magic rule)" edge4way fm1 ~(fm1)/metal1 1 ~(fm1)/metal1 (~(fm1),fm1)/metal1 1 \ "Contact not rectangular (Magic rule)" edge4way fm2 ~(fm2)/metal2 1 ~(fm2)/metal2 (~(fm2),fm2)/metal2 1 \ "Contact not rectangular (Magic rule)" edge4way fm3 ~(fm3)/metal3 1 ~(fm3)/metal3 (~(fm3),fm3)/metal3 1 \ "Contact not rectangular (Magic rule)" edge4way fm4 ~(fm4)/metal4 1 ~(fm4)/metal4 (~(fm4),fm4)/metal4 1 \ "Contact not rectangular (Magic rule)" edge4way rp space/active 1 prp 0 0 \ "prp overhang of rpoly (for resistor L/W extraction) < 1 (Mosis #0)" active edge4way rnw space/active 1 prnw 0 0 \ "prnw overhang of rnwell (for resistor L/W extraction) < 1 (Mosis #0)" active edge4way nwr space/active 1 pnwr 0 0 \ "pnwr overhang of nwr (for Fig1b resistor L/W extraction) < 1 (Mosis #0)" active edge4way rpd space/active 1 prpd 0 0 \ "prpd overhang of rpdiff (for resistor L/W extraction) < 1 (Mosis #0)" active edge4way rnd space/active 1 prnd 0 0 \ "prnd overhang of rndiff (for resistor L/W extraction) < 1 (Mosis #0)" active edge4way rm1 space/metal1 1 prm1 0 0 \ "prm1 overhang of rmetal1 (for resistor L/W extraction) < 1 (Mosis #0)" metal1 edge4way rm2 space/metal2 1 prm2 0 0 \ "prm2 overhang of rmetal2 (for resistor L/W extraction) < 1 (Mosis #0)" metal2 edge4way rm3 space/metal3 1 prm3 0 0 \ "prm3 overhang of rmetal3 (for resistor L/W extraction) < 1 (Mosis #0)" metal3 edge4way rm4 space/metal4 1 prm4 0 0 \ "prm4 overhang of rmetal4 (for resistor L/W extraction) < 1 (Mosis #0)" metal4 edge4way ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a ~(ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a)/active 1 ~(ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a)/active (~(ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a),ndc/a,ndm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a)/active 1 \ "Contact not rectangular (Magic rule)" edge4way pdc/a,pdm12c/a,psc/a,psm12c/a ~(pdc/a,pdm12c/a,psc/a,psm12c/a)/active 1 ~(pdc/a,pdm12c/a,psc/a,psm12c/a)/active (~(pdc/a,pdm12c/a,psc/a,psm12c/a),pdc/a,pdm12c/a,psc/a,psm12c/a)/active 1 \ "Contact not rectangular (Magic rule)" edge4way pc/a,pm12c/a ~(pc/a,pm12c/a)/active 1 ~(pc/a,pm12c/a)/active (~(pc/a,pm12c/a),pc/a,pm12c/a)/active 1 \ "Contact not rectangular (Magic rule)" edge4way gc ~(gc)/contact 1 ~(gc)/contact (~(gc),gc)/contact 1 \ "Contact not rectangular (Magic rule)" edge4way gv1 ~(gv1)/via1 1 ~(gv1)/via1 (~(gv1),gv1)/via1 1 \ "Contact not rectangular (Magic rule)" edge4way m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 ~(m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1)/metal1 1 ~(m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1)/metal1 (~(m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1),m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1)/metal1 1 \ "Contact not rectangular (Magic rule)" edge4way gv2 ~(gv2)/via2 1 ~(gv2)/via2 (~(gv2),gv2)/via2 1 \ "Contact not rectangular (Magic rule)" edge4way m3c/m2,m123c/m2,m234c/m2 ~(m3c/m2,m123c/m2,m234c/m2)/metal2 1 ~(m3c/m2,m123c/m2,m234c/m2)/metal2 (~(m3c/m2,m123c/m2,m234c/m2),m3c/m2,m123c/m2,m234c/m2)/metal2 1 \ "Contact not rectangular (Magic rule)" edge4way gv3 ~(gv3)/via3 1 ~(gv3)/via3 (~(gv3),gv3)/via3 1 \ "Contact not rectangular (Magic rule)" edge4way m4c/m3,m234c/m3 ~(m4c/m3,m234c/m3)/metal3 1 ~(m4c/m3,m234c/m3)/metal3 (~(m4c/m3,m234c/m3),m4c/m3,m234c/m3)/metal3 1 \ "Contact not rectangular (Magic rule)" exact_overlap gc,ndc/a,ndm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,gc,pc/a,pm12c/a,gc edge4way pad ~(pad)/m4 1 ~(pad)/m4 (~(pad),pad)/m4 1 \ "Contact not rectangular (Magic rule)" exact_overlap ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1 exact_overlap m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2 exact_overlap m3c/m3,m123c/m3,m234c/m3 exact_overlap m4c/m4,m234c/m4 exact_overlap gv1 exact_overlap gv2 exact_overlap gv3 edge4way nfet,pfet,fet ~(nfet,pfet,fet)/active 1 ~(nfet,pfet,fet)/active nfet,pfet,fet 1 \ "Transistor cannot bend in this process (Mosis #?.?)" width m1p 4 \ "Metal1 PIN width < 4 (do_pins)" spacing m1p m1p 4 touching_ok \ "Metal1 PIN spacing < 4 (do_pins)" width m2p 4 \ "Metal2 PIN width < 4 (do_pins)" spacing m2p m2p 4 touching_ok \ "Metal2 PIN spacing < 4 (do_pins)" width m3p 4 \ "Metal3 PIN width < 4 (do_pins)" spacing m3p m3p 4 touching_ok \ "Metal3 PIN spacing < 4 (do_pins)" width m4p 4 \ "Metal4 PIN width < 4 (do_pins)" spacing m4p m4p 4 touching_ok \ "Metal4 PIN spacing < 4 (do_pins)" #CC cifstyle lambda=0.20(p) #CC cifwidth CWN 240 \ #CC "generated CIF layer CWN width will be < 12 (';cif see CWN')" #CC cifspacing CWN CWN 120 touching_ok \ #CC "generated CIF layer CWN spacing will be < 6 (';cif see CWN')" #CC cifwidth CWP 240 \ #CC "generated CIF layer CWP width will be < 12 (';cif see CWP')" #CC cifspacing CWP CWP 120 touching_ok \ #CC "generated CIF layer CWP spacing will be < 6 (';cif see CWP')" #CC cifwidth CSN 60 \ #CC "generated CIF layer CSN width will be < 3 (';cif see CSN')" #CC cifspacing CSN CSN 60 touching_ok \ #CC "generated CIF layer CSN spacing will be < 3 (';cif see CSN')" #CC cifwidth CSP 60 \ #CC "generated CIF layer CSP width will be < 3 (';cif see CSP')" #CC cifspacing CSP CSP 60 touching_ok \ #CC "generated CIF layer CSP spacing will be < 3 (';cif see CSP')" stepsize 400 end extract style TSMC0.35um(tsmc35)from:t11c cscale 1 lambda 20 step 100 sidehalo 8 planeorder well 0 planeorder implant 1 planeorder select 2 planeorder active 3 planeorder metal1 4 planeorder metal2 5 planeorder metal3 6 planeorder metal4 7 planeorder oxide 8 planeorder xp 9 planeorder comment 10 planeorder contact 11 planeorder via1 12 planeorder via2 13 planeorder via3 14 planeorder fill 15 resist (ndiff,anres,rnd,ndc,ndm12c,nsd,nwsd,nsc,nwsc,nsm12c,nwsm12c)/active 3700 resist (pdiff,apres,rpd,pdc,pdm12c,psd,psc,psm12c)/active 2800 resist (nwell)/well 1018000 resist (rnw,nwr)/active 1018000 resist (pwell)/well 1 resist (poly,fp,rp,pc,pm12c,pc,pm12c,nfet,pfet,fet)/active 6000 resist (pres)/active 6000 resist (m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c)/metal1 80 resist (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c,m3c,m123c,m234c)/metal2 70 resist (m3,fm3,rm3,m3c,m123c,m234c,m4c,m4c,m234c)/metal3 80 resist (m4,fm4,rm4,m4c,m234c,pad)/metal4 40 contact ndc 4 4100 contact pdc 4 3400 contact pc 4 4600 contact m2c 4 1300 contact m3c 4 1170 contact m4c 4 1110 #nwell,cwell,pwell areacap (nwell)/well 2.360 #rnw areacap (rnw,nwr)/active 2.360 #ndiff # MODEL HANDLES THIS: areacap (ndiff,ndc,ndm12c)/active 43.160 # MODEL HANDLES THIS: overlap (ndiff,ndc,ndm12c)/active ~space/w 43.160 # MODEL HANDLES THIS: perimc (ndiff,ndc,ndm12c)/active ~(ndiff,ndc,ndm12c,nfet,pfet,fet)/active 64.200 # MODEL HANDLES THIS: sideoverlap (ndiff,ndc,ndm12c)/active ~(ndiff,ndc,ndm12c,nfet,pfet,fet)/active ~space/w 64.200 areacap (rnd,anres)/active 43.160 overlap (rnd,anres)/active ~space/w 43.160 perimc (rnd,anres)/active ~(rnd,anres)/active 64.200 sideoverlap (rnd,anres)/active ~(rnd,anres)/active ~space/w 64.200 #pdiff # MODEL HANDLES THIS: areacap (pdiff,pdc,pdm12c)/active 55.880 # MODEL HANDLES THIS: overlap (pdiff,pdc,pdm12c)/active ~space/w 55.880 # MODEL HANDLES THIS: perimc (pdiff,pdc,pdm12c)/active ~(pdiff,pdc,pdm12c,nfet,pfet,fet)/active 81.800 # MODEL HANDLES THIS: sideoverlap (pdiff,pdc,pdm12c)/active ~(pdiff,pdc,pdm12c,nfet,pfet,fet)/active ~space/w 81.800 areacap (rpd,apres)/active 55.880 overlap (rpd,apres)/active ~space/w 55.880 perimc (rpd,apres)/active ~(rpd,apres)/active 81.800 sideoverlap (rpd,apres)/active ~(rpd,apres)/active ~space/w 81.800 #rnw #poly # MODEL HANDLES THIS: overlap (nfet)/active (ndiff,anres,rnd,ndc,ndm12c)/active 181.800 # MODEL HANDLES THIS: sideoverlap (nfet)/active ~(nfet)/active (ndiff,anres,rnd,ndc,ndm12c)/active 55.400 # MODEL HANDLES THIS: overlap (pfet)/active (pdiff,apres,rpd,pdc,pdm12c)/active 181.160 # MODEL HANDLES THIS: sideoverlap (pfet)/active ~(pfet)/active (pdiff,apres,rpd,pdc,pdm12c)/active 52.200 sidewall (poly,fp,pres,rp,pc,pm12c)/active ~(poly,fp,pres,rp,pc,pm12c)/active ~(poly,fp,pres,rp,pc,pm12c)/active (poly,fp,pres,rp,pc,pm12c)/active 11.331 areacap (poly,fp,pres,rp,pc,pm12c)/active 4.074 overlap (poly,fp,pres,rp,pc,pm12c)/active ~space/w 4.074 perimc (poly,fp,pres,rp,pc,pm12c)/active ~(poly,fp,pres,rp,pc,pm12c)/active 4.622 sideoverlap (poly,fp,pres,rp,pc,pm12c)/active ~(poly,fp,pres,rp,pc,pm12c)/active ~space/w 4.622 #poly2 #rnw #metal1 sidewall (m1,fm1,rm1,ndc,ndm12c,pdc,pdm12c,pc,pm12c,m2c,m123c)/metal1 ~(m1,fm1,rm1,ndc,ndm12c,pdc,pdm12c,pc,pm12c,m2c,m123c)/metal1 ~(m1,fm1,rm1,ndc,ndm12c,pdc,pdm12c,pc,pm12c,m2c,m123c)/metal1 (m1,fm1,rm1,ndc,ndm12c,pdc,pdm12c,pc,pm12c,m2c,m123c)/metal1 20.619 areacap (m1,fm1,rm1,ndc,ndm12c,pdc,pdm12c,pc,pm12c,m2c,m123c)/metal1 1.666 #metal1-sub blocked by ~space/a overlap (m1,fm1,rm1,ndc,ndm12c,pdc,pdm12c,pc,pm12c,m2c,m123c)/metal1 ~space/w 1.666 ~space/a perimc (m1,fm1,rm1,ndc,ndm12c,pdc,pdm12c,pc,pm12c,m2c,m123c)/metal1 ~(m1,fm1,rm1,ndc,ndm12c,pdc,pdm12c,pc,pm12c,m2c,m123c)/metal1 2.226 sideoverlap (m1,fm1,rm1,ndc,ndm12c,pdc,pdm12c,pc,pm12c,m2c,m123c)/metal1 ~(m1,fm1,rm1,ndc,ndm12c,pdc,pdm12c,pc,pm12c,m2c,m123c)/metal1 ~space/w 2.226 ~space/a #rnw overlap (m1,fm1,rm1,ndc,ndm12c,pdc,pdm12c,pc,pm12c,m2c,m123c)/metal1 rnw,nwr/active 1.666 sideoverlap (m1,fm1,rm1,ndc,ndm12c,pdc,pdm12c,pc,pm12c,m2c,m123c)/metal1 ~(m1,fm1,rm1,ndc,ndm12c,pdc,pdm12c,pc,pm12c,m2c,m123c)/metal1 rnw,nwr/active 2.226 #metal1-diff blocked by overlap (m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 (ndiff,anres,rnd,ndc,ndm12c)/active 1.640 sideoverlap (m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 ~(m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 (ndiff,anres,rnd,ndc,ndm12c)/active 2.226 overlap (m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 (pdiff,apres,rpd,pdc,pdm12c)/active 1.640 sideoverlap (m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 ~(m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 (pdiff,apres,rpd,pdc,pdm12c)/active 2.226 #metal1-poly blocked by overlap (m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 (poly,fp,pres,rp,pc,pm12c,nfet,pfet,fet)/active 1.687 sideoverlap (m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 ~(m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 (poly,fp,pres,rp,pc,pm12c,nfet,pfet,fet)/active 2.250 sideoverlap (poly,fp,pres,rp,pc,pm12c,nfet,pfet,fet)/active ~(poly,fp,pres,rp,pc,pm12c,nfet,pfet,fet)/active (m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 2.250 #metal2 sidewall (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 ~(m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 ~(m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 23.532 areacap (m2,fm2,rm2,m3c,m123c,m234c)/metal2 0.581 #metal2-sub blocked by overlap (m2,fm2,rm2,m3c,m123c,m234c)/metal2 ~space/w 0.581 ~space/a,~space/m1 perimc (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 ~(m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 0.836 sideoverlap (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 ~(m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 ~space/w 0.836 ~space/a,~space/m1 overlap (m2,fm2,rm2,m3c,m123c,m234c)/metal2 rnw,nwr/active 0.581 ~space/m1 sideoverlap (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 ~(m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 rnw,nwr/active 0.836 ~space/m1 #metal2-*diff blocked by ~space/m1 overlap (m2,fm2,rm2,m3c,m123c,m234c)/metal2 (ndiff,anres,rnd,ndc,ndm12c)/active 0.720 ~space/m1 sideoverlap (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 ~(m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 (ndiff,anres,rnd,ndc,ndm12c)/active 0.836 ~space/m1 overlap (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 (pdiff,apres,rpd,pdc,pdm12c)/active 0.720 ~space/m1 sideoverlap (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 ~(m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 (pdiff,apres,rpd,pdc,pdm12c)/active 0.836 ~space/m1 #metal2-poly blocked by ~space/m1 overlap (m2,fm2,rm2,m3c,m123c,m234c)/metal2 (poly,fp,pres,rp,pc,pm12c,nfet,pfet,fet)/active 0.583 ~space/m1 sideoverlap (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 ~(m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 (poly,fp,pres,rp,pc,pm12c,nfet,pfet,fet)/active 0.840 ~space/m1 sideoverlap (poly,fp,pres,rp,pc,pm12c,nfet,pfet,fet)/active ~(poly,fp,pres,rp,pc,pm12c,nfet,pfet,fet)/active (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 0.840 ~space/m1 #M2->M1 overlap (m2,fm2,rm2,m3c,m123c,m234c)/metal2 (m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 1.844 sideoverlap (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 ~(m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 (m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 2.432 sideoverlap (m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 ~(m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 2.432 #metal3 sidewall (m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 ~(m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 ~(m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 (m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 24.216 areacap (m3,fm3,rm3,m4c,m234c)/metal3 0.352 #metal3-sub blocked by ~space/a,~space/m1,~space/m2 overlap (m3,fm3,rm3,m4c,m234c)/metal3 ~space/w 0.352 ~space/a,~space/m1,~space/m2 perimc (m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 ~(m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 0.514 sideoverlap (m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 ~(m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 ~space/w 0.514 ~space/a,~space/m1,~space/m2 #rnw overlap (m3,fm3,rm3,m4c,m234c)/metal3 rnw,nwr/active 0.352 ~space/m1,~space/m2 sideoverlap (m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 ~(m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 rnw,nwr/active 0.514 ~space/m1,~space/m2 #metal3-*diff blocked by ~space/m1,~space/m2 overlap (m3,fm3,rm3,m4c,m234c)/metal3 (ndiff,anres,rnd,ndc,ndm12c)/active 0.520 ~space/m1,~space/m2 sideoverlap (m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 ~(m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 (ndiff,anres,rnd,ndc,ndm12c)/active 0.514 ~space/m1,~space/m2 overlap (m3,fm3,rm3,m4c,m234c)/metal3 (pdiff,apres,rpd,pdc,pdm12c)/active 0.520 ~space/m1,~space/m2 sideoverlap (m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 ~(m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 (pdiff,apres,rpd,pdc,pdm12c)/active 0.514 ~space/m1,~space/m2 #metal3-poly blocked by ~space/m1,~space/m2 overlap (m3,fm3,rm3,m4c,m234c)/metal3 (poly,fp,pres,rp,pc,pm12c,nfet,pfet,fet)/active 0.352 ~space/m1,~space/m2 sideoverlap (m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 ~(m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 (poly,fp,pres,rp,pc,pm12c,nfet,pfet,fet)/active 0.516 ~space/m1,~space/m2 sideoverlap (poly,fp,pres,rp,pc,pm12c,nfet,pfet,fet)/active ~(poly,fp,pres,rp,pc,pm12c,nfet,pfet,fet)/active (m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 0.516 ~space/m1,~space/m2 #M3->M1 #metal3-metal1 blocked by ~space/m2 overlap (m3,fm3,rm3,m4c,m234c)/metal3 (m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 0.601 ~space/m2 sideoverlap (m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 ~(m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 (m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 0.864 ~space/m2 sideoverlap (m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 ~(m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 (m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 0.864 ~space/m2 #M3->M2 overlap (m3,fm3,rm3,m4c,m234c)/metal3 (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 1.844 sideoverlap (m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 ~(m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 2.430 sideoverlap (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 ~(m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 (m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 2.430 #metal4 sidewall (m4,fm4,rm4,m4c,m234c,pad)/metal4 ~(m4,fm4,rm4,m4c,m234c,pad)/metal4 ~(m4,fm4,rm4,m4c,m234c,pad)/metal4 (m4,fm4,rm4,m4c,m234c,pad)/metal4 64.860 areacap (m4,fm4,rm4,pad)/metal4 0.235 #metal4-sub blocked by ~space/a,~space/m1,~space/m2,~space/m3 overlap (m4,fm4,rm4,pad)/metal4 ~space/w 0.235 ~space/a,~space/m1,~space/m2,~space/m3 perimc (m4,fm4,rm4,m4c,m234c,pad)/metal4 ~(m4,fm4,rm4,m4c,m234c,pad)/metal4 0.802 sideoverlap (m4,fm4,rm4,m4c,m234c,pad)/metal4 ~(m4,fm4,rm4,m4c,m234c,pad)/metal4 ~space/w 0.802 ~space/a,~space/m1,~space/m2,~space/m3 #rnw overlap (m4,fm4,rm4,pad)/metal4 rnw,nwr/active 0.235 ~space/m1,~space/m2,~space/m3 sideoverlap (m4,fm4,rm4,m4c,m234c,pad)/metal4 ~(m4,fm4,rm4,m4c,m234c,pad)/metal4 rnw,nwr/active 0.802 ~space/m1,~space/m2,~space/m3 #metal4-*diff blocked by ~space/m1,~space/m2,~space/m3 overlap (m4,fm4,rm4,pad)/metal4 (ndiff,anres,rnd,ndc,ndm12c)/active 0.400 ~space/m1,~space/m2,~space/m3 sideoverlap (m4,fm4,rm4,m4c,m234c,pad)/metal4 ~(m4,fm4,rm4,m4c,m234c,pad)/metal4 (ndiff,anres,rnd,ndc,ndm12c)/active 0.802 ~space/m1,~space/m2,~space/m3 overlap (m4,fm4,rm4,pad)/metal4 (pdiff,apres,rpd,pdc,pdm12c)/active 0.400 ~space/m1,~space/m2,~space/m3 sideoverlap (m4,fm4,rm4,m4c,m234c,pad)/metal4 ~(m4,fm4,rm4,m4c,m234c,pad)/metal4 (pdiff,apres,rpd,pdc,pdm12c)/active 0.802 ~space/m1,~space/m2,~space/m3 #metal4-poly blocked by ~space/m1,~space/m2,~space/m3 overlap (m4,fm4,rm4,pad)/metal4 (poly,fp,pres,rp,pc,pm12c,nfet,pfet,fet)/active 0.271 ~space/m1,~space/m2,~space/m3 sideoverlap (m4,fm4,rm4,m4c,m234c,pad)/metal4 ~(m4,fm4,rm4,m4c,m234c,pad)/metal4 (poly,fp,pres,rp,pc,pm12c,nfet,pfet,fet)/active 0.666 ~space/m1,~space/m2,~space/m3 sideoverlap (poly,fp,pres,rp,pc,pm12c,nfet,pfet,fet)/active ~(poly,fp,pres,rp,pc,pm12c,nfet,pfet,fet)/active (m4,fm4,rm4,m4c,m234c,pad)/metal4 0.666 ~space/m1,~space/m2,~space/m3 #M4->M1 #metal4-metal1 blocked by ~space/m2,~space/m3 overlap (m4,fm4,rm4,pad)/metal4 (m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 0.359 ~space/m2,~space/m3 sideoverlap (m4,fm4,rm4,m4c,m234c,pad)/metal4 ~(m4,fm4,rm4,m4c,m234c,pad)/metal4 (m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 1.038 ~space/m2,~space/m3 sideoverlap (m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 ~(m1,fm1,rm1,ndc,ndm12c,nsc,nwsc,nsm12c,nwsm12c,pdc,pdm12c,psc,psm12c,pc,pm12c,m2c,m123c)/metal1 (m4,fm4,rm4,m4c,m234c,pad)/metal4 1.038 ~space/m2,~space/m3 #M4->M2 #metal4-metal2 blocked by ~space/m3 overlap (m4,fm4,rm4,pad)/metal4 (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 0.601 ~space/m3 sideoverlap (m4,fm4,rm4,m4c,m234c,pad)/metal4 ~(m4,fm4,rm4,m4c,m234c,pad)/metal4 (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 1.698 ~space/m3 sideoverlap (m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 ~(m2,fm2,rm2,m2c,pdm12c,ndm12c,psm12c,nsm12c,pm12c,m123c,nwsm12c,m3c,m234c)/metal2 (m4,fm4,rm4,m4c,m234c,pad)/metal4 1.698 ~space/m3 #M4->M3 overlap (m4,fm4,rm4,pad)/metal4 (m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 1.844 sideoverlap (m4,fm4,rm4,m4c,m234c,pad)/metal4 ~(m4,fm4,rm4,m4c,m234c,pad)/metal4 (m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 4.604 sideoverlap (m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 ~(m3,fm3,rm3,m3c,m123c,m234c,m4c)/metal3 (m4,fm4,rm4,m4c,m234c,pad)/metal4 4.604 #metal5 #metal6 #metal7 #metali #fets fet pfet pdiff,pdc 2 pfet Vdd! nwell 52 181 fet pfet pdiff,pdc 1 pfet Vdd! nwell 52 181 fet nfet ndiff,ndc 2 nfet Gnd! pwell 55 182 fet nfet ndiff,ndc 1 nfet Gnd! pwell 55 182 fetresis pfet linear 12182 fetresis pfet saturation 12182 fetresis nfet linear 3961 fetresis nfet saturation 3961 fet rnwell nsd,nsc 2 nwellResistor Gnd! nwell,pwell 0 0 fet rpoly poly,pc 2 polyResistor Gnd! nwell,pwell 0 0 fet nwr nwsd 2 nwellFig1bResistor Gnd! nwell,pwell 0 0 fet rndiff ndiff,ndc 2 ndiffResistor Gnd! nwell,pwell 0 0 fet rpdiff pdiff,pdc 2 pdiffResistor Gnd! nwell,pwell 0 0 fet rmetal1 metal1 2 metal1Resistor Gnd! nwell,pwell 0 0 fet rmetal2 metal2 2 metal2Resistor Gnd! nwell,pwell 0 0 fet rmetal3 metal3 2 metal3Resistor Gnd! nwell,pwell 0 0 fet rmetal4 metal4 2 metal4Resistor Gnd! nwell,pwell 0 0 fet pres poly,pc 2 presResistor Gnd! nwell,pwell 0 0 fet anres ndiff,ndc 2 anresResistor Gnd! nwell,pwell 0 0 fet apres pdiff,pdc 2 apresResistor Gnd! nwell,pwell 0 0 end wiring contact pdcontact 4 metal1 0 pdiff 0 contact ndcontact 4 metal1 0 ndiff 0 contact pcontact 4 metal1 0 poly 0 contact m2contact 4 metal1 0 metal2 0 contact m3contact 5 metal2 0 metal3 1 contact m4contact 4 metal3 0 metal4 0 end router layer2 metal2 3 m2,fm2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m123c/m2,m234c/m2,m3c/m2,m123c/m2,m234c/m2 4 poly,fp,pres,rp,ndiff,anres,rnd,nsd,nwsd,pdiff,apres,rpd,psd,m1,fm1,rm1 1 layer1 metal1 3 m1,fm1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1 3 contacts m2contact 4 gridspacing 8 end plowing fixed nfet,pfet,glass,pad covered nfet,pfet drag nfet,pfet end plot style colorversatec ndiff,anres,rnd,ndc/a,ndm12c/a yellow \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA ndiff,anres,rnd,ndc/a,ndm12c/a cyan \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a yellow \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a cyan \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 pdiff,apres,rpd,pdc/a,pdm12c/a yellow \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA pdiff,apres,rpd,pdc/a,pdm12c/a cyan \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 pdiff,apres,rpd,pdc/a,pdm12c/a magenta \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 psd,psc/a,psm12c/a yellow \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 psd,psc/a,psm12c/a cyan \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 psd,psc/a,psm12c/a magenta \ 2A2A 0000 A2A2 0000 \ 2A2A 0000 A2A2 0000 \ 2A2A 0000 A2A2 0000 \ 2A2A 0000 A2A2 0000 poly,fp,pres,rp,pc/a,pm12c/a magenta \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA nfet yellow \ 0505 8282 1414 0A0A \ 5050 2828 4141 A0A0 \ 0505 8282 1414 0A0A \ 5050 2828 4141 A0A0 nfet cyan \ 0000 0505 0000 1414 \ 0000 5050 0000 4141 \ 0000 0505 0000 1414 \ 0000 5050 0000 4141 nfet magenta \ 5050 2828 4141 A0A0 \ 0505 8282 1414 0A0A \ 5050 2828 4141 A0A0 \ 0505 8282 1414 0A0A pfet yellow \ 6363 A0A0 5050 2828 \ 3636 0A0A 0505 8282 \ 6363 A0A0 5050 2828 \ 3636 0A0A 0505 8282 pfet cyan \ 0000 5151 0000 5454 \ 0000 1515 0000 1515 \ 0000 5151 0000 5454 \ 0000 1515 0000 1515 pfet magenta \ 9494 0A0A 2525 8282 \ 4949 A0A0 5252 2828 \ 9494 0A0A 2525 8282 \ 4949 A0A0 5252 2828 m1,fm1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,m123c/m1 cyan \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 m2,fm2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m234c/m2 cyan \ 0000 1111 0000 4444 \ 0000 1111 0000 4444 \ 0000 1111 0000 4444 \ 0000 1111 0000 4444 m2,fm2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m234c/m2 magenta \ 0000 4444 0000 1111 \ 0000 4444 0000 1111 \ 0000 4444 0000 1111 \ 0000 4444 0000 1111 m2c/m1,pdm12c/m1,ndm12c/m1,psm12c/m1,nsm12c/m1,pm12c/m1,m123c/m1,nwsm12c/m1,gv1 black \ 0000 6666 6666 0000 \ 0000 9999 9999 0000 \ 0000 6666 6666 0000 \ 0000 9999 9999 0000 pad,glass black \ 0300 0700 0E00 1C00 \ 3800 7000 E000 C000 \ 00C0 00E0 0070 0038 \ 001C 000E 0007 0003 nwell yellow \ 0800 1000 2000 4000 \ 8000 0001 0002 0004 \ 0008 0010 0020 0040 \ 0080 0010 0200 0400 nwell cyan \ 1000 2000 4000 8000 \ 0001 0002 0004 0008 \ 0010 0020 0040 0080 \ 0100 0200 0400 0800 pwell yellow \ 1000 0400 0400 0100 \ 0100 0040 0040 0010 \ 0010 0004 0004 0001 \ 0001 4000 4000 1000 pwell cyan \ 0000 0800 0000 0200 \ 0000 0080 0000 0020 \ 0000 0008 0000 0002 \ 0000 8000 0000 2000 pwell magenta \ 0800 0000 0200 0000 \ 0080 0000 0020 0000 \ 0008 0000 0002 0000 \ 8000 0000 2000 0000 m3c/m2,m123c/m2,m234c/m2,gv2 black \ 0100 0000 0000 0000 \ 1010 0000 0000 0000 \ 0001 0000 0000 0000 \ 1010 0000 0000 0000 m3c/m2,m123c/m2,m234c/m2,gv2 cyan \ 0280 0000 0820 0000 \ 2008 0000 8002 0000 \ 8002 0000 2008 0000 \ 0820 0000 0280 0000 m3c/m2,m123c/m2,m234c/m2,gv2 magenta \ 0100 06C0 0440 1830 \ 1010 600C 4004 8003 \ 0001 C006 4004 3018 \ 1010 0C60 0440 0380 m3c/m2,m123c/m2,m234c/m2,gv2 black \ 0820 0820 0820 0FE0 \ E00F 2008 2008 2008 \ 2008 2008 2008 E00F \ 0000 0FE0 0820 0820 error_p,error_s,error_ps black \ 0000 3C3C 4646 4A4A \ 5252 6262 3C3C 0000 \ 0000 3C3C 4646 4A4A \ 5252 6262 3C3C 0000 magnet yellow \ AAAA 0000 5555 0000 \ AAAA 0000 5555 0000 \ AAAA 0000 5555 0000 \ AAAA 0000 5555 0000 fence magenta \ FFFF 0000 0000 0000 \ 0000 0000 0000 0000 \ FFFF 0000 0000 0000 \ 0000 0000 0000 0000 rotate cyan \ 0000 E0E0 E0E0 E0E0 \ 0000 0000 0000 0000 \ 0000 E0E0 E0E0 E0E0 \ 0000 0000 0000 0000 pc/a,pm12c/a,ndc/a,ndm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,gc,gc,gc X style versatec pfet \ 07c0 0f80 1f00 3e00 \ 7c00 f800 f001 e003 \ c007 800f 001f 003e \ 00c7 00f8 01f0 03e0 nfet \ 1f00 0f80 07c0 03e0 \ 01f0 00f8 007c 003e \ 001f 800f c007 e003 \ f001 f800 7c00 3e00 gv1 \ c3c3 c3c3 0000 0000 \ 0000 0000 c3c3 c3c3 \ c3c3 c3c3 0000 0000 \ 0000 0000 c3c3 c3c3 pwell \ 2020 2020 2020 2020 \ 2020 2020 2020 2020 \ 0000 0000 0000 0000 \ 0000 0000 0000 0000 nwell \ 0808 0404 0202 0101 \ 0000 0000 0000 0000 \ 0808 0404 0202 0101 \ 0000 0000 0000 0000 poly,fp,pres,rp,pc/a,pm12c/a,nfet,pfet \ 0808 0400 0202 0101 \ 8080 4000 2020 1010 \ 0808 0004 0202 0101 \ 8080 0040 2020 1010 m1,fm1,rm1,ndc/m1,ndm12c/m1,nsc/m1,nwsc/m1,nsm12c/m1,nwsm12c/m1,pdc/m1,pdm12c/m1,psc/m1,psm12c/m1,pc/m1,pm12c/m1,m2c/m1,m123c/m1 \ 8080 0000 0000 0000 \ 0808 0000 0000 0000 \ 8080 0000 0000 0000 \ 0808 0000 0000 0000 pad,glass \ 0000 0000 1c1c 3e3e \ 3636 3e3e 1c1c 0000 \ 0000 0000 1c1c 3e3e \ 3636 3e3e 1c1c 0000 nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a \ 0808 1414 2222 4141 \ 8080 4040 2020 1010 \ 0808 1414 2222 4141 \ 8080 4040 2020 1010 m2,fm2,rm2,m2c/m2,pdm12c/m2,ndm12c/m2,psm12c/m2,nsm12c/m2,pm12c/m2,m123c/m2,nwsm12c/m2,m3c/m2,m234c/m2 \ 0000 1111 0000 0000 \ 0000 1111 0000 0000 \ 0000 1111 0000 0000 \ 0000 1111 0000 0000 pdiff,apres,rpd,pdc/a,pdm12c/a,pfet \ 0000 0808 5555 8080 \ 0000 8080 5555 0808 \ 0000 0808 5555 8080 \ 0000 8080 5555 0808 psd,psc/a,psm12c/a \ 1414 2222 0000 2222 \ 4141 2222 0000 2222 \ 1414 2222 0000 2222 \ 4141 2222 0000 2222 ndiff,anres,rnd,ndc/a,ndm12c/a,nfet \ 0808 1010 2020 4040 \ 8080 4141 2222 1414 \ 0808 1010 2020 4040 \ 8080 4141 2222 1414 pc/a,pm12c/a,ndc/a,ndm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,gc,gc,gc X style gremlin pfet 9 nfet 10 gv1 11 pwell 15 nwell 16 poly,fp,pres,rp,pc/a,pm12c/a,nfet,pfet 19 pc/a,pm12c/a,ndc/a,ndm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,gc,gc,gc 22 pad,glass 23 nsd,nwsd,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a 24 gv1 28 pdiff,apres,rpd,pdc/a,pdm12c/a,pfet 29 psd,psc/a,psm12c/a 30 ndiff,anres,rnd,ndc/a,ndm12c/a,nfet 31 pc/a,pm12c/a,ndc/a,ndm12c/a,pdc/a,pdm12c/a,psc/a,psm12c/a,nsc/a,nwsc/a,nsm12c/a,nwsm12c/a,gc,gc,gc,gv1 X end