tech scmos end version version 2001a description "SCMOS: Submit as technology.lambda.vendor: SCN6M_SUBM.10.TSMC [to process: TSMC18] has HV fets!: use ext2spice -jhnfet:0/Gnd -jhpfet:1/6/Vdd" end planes well,w implant,i select,s active,a metal1,m1 metal2,m2 metal3,m3 metal4,m4 metal5,m5 metal6,m6 metali,mi oxide,ox comment xp contact via1,v1 via2,v2 via3,v3 via4,v4 via5,v5 viai,vi fill end types well nwell,nw active nwr well pwell,pw well hvnwell,hnwell,hnw well hvpwell,hpwell,hpw implant n_field_implant,nfi implant p_field_implant,pfi select nselect,ns select pselect,ps active ntransistor,nfet active ptransistor,pfet active diffusion,diff active hdiffusion,hdiff active transistor,fet active htransistor,hfet active ndiffusion,ndif,green active pdiffusion,pdif,brown active ndcontact,ndc active pdcontact,pdc active psubstratepdiff,pohmicdiff,pod,ppdiff,ppd,psd active nsubstratendiff,nohmicdiff,nod,nndiff,nnd,nsd active psubstratepcontact,pohmiccontact,poc,pwcontact,pwc,psc active nsubstratencontact,nohmiccontact,noc,nwcontact,nwc,nsc active nwsd active hnwsd active nwsc active hnwsc active pbase,pb active emitter,emit,em active emittercontact,emitcontact,emc,ec active base active basecontact,bcontact,bc active collector,coll,col,co,cl active collectorcontact,colcontact,colc,coc,clc active hvntransistor,hvnfet,hnfet active hvptransistor,hvpfet,hpfet active hvndiffusion,hvndif,hndiff active hvpdiffusion,hvpdif,hpdiff active hvndcontact,hvndc,hndc active hvpdcontact,hvpdc,hpdc active hvpsubstratepdiff,hpohmicdiff,hpod,hppdiff,hppd,hpsd active hvnsubstratendiff,hnohmicdiff,hnod,hnndiff,hnnd,hnsd active hvpsubstratepcontact,hpohmiccontact,hpoc,hppcontact,hppc,hpwcontact,hpwc,hpsc active hvnsubstratencontact,hnohmiccontact,hnoc,hnncontact,hnnc,hnwcontact,hnwc,hnsc active hactiven_resist,hanres active hactivep_resist,hapres active polysilicon,red,poly,p active polycontact,pcontact,polycut,pc active polypplus,pp active polynplus,pn active polyppluscontact,ppcontact,ppc active polynpluscontact,pncontact,pnc contact genericcontact,gcontact,gc metal1 metal1,m1,blue metal1 pseudo_rmetal1,prm1 metal1 rmetal1,rm1 metal1 fillm1,fm1 metal1 m2contact,m2cut,m2c,via1,v1 metal1 pm12contact,pm12c metal1 ppm12contact,ppm12c metal1 pnm12contact,pnm12c metal1 pdm12contact,pdm12c metal1 psm12contact,psm12c,pom12c,pwm12c metal1 ndm12contact,ndm12c metal1 nsm12contact,nsm12c,nom12c,nwm12c metal1 nwsm12contact,nwsm12c metal1 hpdm12contact,hpdm12c metal1 hpsm12contact,hpsm12c,hpom12c,hpwm12c metal1 hndm12contact,hndm12c metal1 hnsm12contact,hnsm12c,hnom12c,hnwm12c metal2 metal2,m2,purple metal2 pseudo_rmetal2,prm2 metal2 rmetal2,rm2 metal2 fillm2,fm2 via1 gv1 metal2 m3contact,m3cut,m3c,via2,v2 metal2 m123contact,m123c metal3 metal3,m3,cyan metal3 pseudo_rmetal3,prm3 metal3 rmetal3,rm3 metal3 fillm3,fm3 via2 gv2 metal3 m234contact,m234c metal3 m4contact,m4cut,m4c,via3,v3 metal4 metal4,m4,yellow metal4 pseudo_rmetal4,prm4 metal4 rmetal4,rm4 metal4 fillm4,fm4 via3 gv3 metal4 m345contact,m345c metal4 m5contact,m5cut,m5c,via4,v4 metal5 metal5,m5 metal5 pseudo_rmetal5,prm5 metal5 rmetal5,rm5 metal5 fillm5,fm5 via4 gv4 metal5 m456contact,m456c metal5 m6contact,m6cut,m6c,via5,v5 metal6 metal6,m6 metal6 pseudo_rmetal6,prm6 metal6 rmetal6,rm6 metal6 fillm6,fm6 via5 gv5 metal6 pad metal6 micontact,micut,mic,viai,vi metali metali,mim,mi mi pseudo_rmetali,prmi mi rmi viai gvi oxide glass oxide thickoxide,to active silicide_block,sb active poly_resist,pres active pseudo_rpoly,prp active rpoly,rp active pseudo_rndiffusion,prnd active rndiffusion,rndiff,rnd active pseudo_rpdiffusion,prpd active rpdiffusion,rpdiff,rpd active pseudo_rnwell,prnwell,prnw active rnwell,rnw active pseudo_nwr,pnwr implant filln,fn fill filla,fa fill fillb,fb active fillp,fp active fillapm,fapm active activen_resist,anres active activep_resist,apres xp xp xp m1p xp m2p xp m3p xp m4p xp m5p xp m6p comment comment comment bb end contact pc poly metal1 ppc pp metal1 pnc pn metal1 ndc ndiff metal1 pdc pdiff metal1 nsc nsd metal1 nwsc nwsd metal1 hnwsc hnwsd metal1 psc psd metal1 m2c metal1 metal2 m3c metal2 metal3 m4c metal3 metal4 m5c metal4 metal5 m6c metal5 metal6 mic metal6 metali pm12c poly metal1 metal2 ppm12c pp metal1 metal2 pnm12c pn metal1 metal2 pdm12c pdiff metal1 metal2 psm12c psd metal1 metal2 ndm12c ndiff metal1 metal2 nsm12c nsd metal1 metal2 nwsm12c nwsd metal1 metal2 hpdm12c hpdiff metal1 metal2 hpsm12c hpsd metal1 metal2 hndm12c hndiff metal1 metal2 hnsm12c hnsd metal1 metal2 m123c metal1 metal2 metal3 m234c metal2 metal3 metal4 m345c metal3 metal4 metal5 m456c metal4 metal5 metal6 clc collector metal1 emc emit metal1 bc base metal1 hndc hndif metal1 hpdc hpdif metal1 hnsc hnsd metal1 hpsc hpsd metal1